8/21/2012	9:00:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	9:00:40 AM	Recipe started at 9:00 AM
8/21/2012	9:00:40 AM	Helium valve closed
8/21/2012	9:00:40 AM	H2 valve closed
8/21/2012	9:00:40 AM	BCl3 valve closed
8/21/2012	9:00:40 AM	PH3 valve closed
8/21/2012	9:00:40 AM	SiCl4 pre valve closed
8/21/2012	9:00:40 AM	SiCl4 post valve closed
8/21/2012	9:00:40 AM	Main Vac valve closed
8/21/2012	9:00:40 AM	Bypass valve closed
8/21/2012	9:00:40 AM	Bubbler valve closed
8/21/2012	9:00:40 AM	Helium MFC set to  0.000000
8/21/2012	9:00:40 AM	H2 MFC set to  0.000000
8/21/2012	9:00:40 AM	BCl3 MFC set to  0.000000
8/21/2012	9:00:40 AM	PH3 MFC set to  0.000000
8/21/2012	9:00:40 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:00:40 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:00:40 AM	Tube furnace set to 0
8/21/2012	9:00:43 AM	H2 valve closed
8/21/2012	9:00:43 AM	BCl3 valve closed
8/21/2012	9:00:43 AM	PH3 valve closed
8/21/2012	9:00:43 AM	SiCl4 pre valve closed
8/21/2012	9:00:43 AM	SiCl4 post valve closed
8/21/2012	9:00:43 AM	Main Vac valve closed
8/21/2012	9:00:43 AM	Bypass valve closed
8/21/2012	9:00:43 AM	Bubbler valve closed
8/21/2012	9:00:43 AM	Helium valve opened
8/21/2012	9:00:43 AM	Helium MFC set to  500.000000
8/21/2012	9:00:43 AM	H2 MFC set to  0.000000
8/21/2012	9:00:43 AM	BCl3 MFC set to  0.000000
8/21/2012	9:00:43 AM	PH3 MFC set to  0.000000
8/21/2012	9:00:43 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:00:43 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:00:43 AM	Tube furnace set to 0
8/21/2012	9:01:56 AM	Helium valve closed
8/21/2012	9:01:56 AM	H2 valve closed
8/21/2012	9:01:56 AM	BCl3 valve closed
8/21/2012	9:01:56 AM	PH3 valve closed
8/21/2012	9:01:56 AM	SiCl4 pre valve closed
8/21/2012	9:01:56 AM	SiCl4 post valve closed
8/21/2012	9:01:56 AM	Main Vac valve closed
8/21/2012	9:01:56 AM	Bypass valve closed
8/21/2012	9:01:56 AM	Bubbler valve closed
8/21/2012	9:01:56 AM	Helium MFC set to  0.000000
8/21/2012	9:01:56 AM	H2 MFC set to  0.000000
8/21/2012	9:01:56 AM	BCl3 MFC set to  0.000000
8/21/2012	9:01:56 AM	PH3 MFC set to  0.000000
8/21/2012	9:01:56 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:01:56 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:01:56 AM	Tube furnace set to 0
8/21/2012	9:01:57 AM	Run finished at 9:01 AM
8/21/2012	9:01:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	9:09:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	9:09:58 AM	Recipe started at 9:09 AM
8/21/2012	9:09:58 AM	Helium valve closed
8/21/2012	9:09:58 AM	H2 valve closed
8/21/2012	9:09:58 AM	BCl3 valve closed
8/21/2012	9:09:58 AM	PH3 valve closed
8/21/2012	9:09:58 AM	SiCl4 pre valve closed
8/21/2012	9:09:58 AM	SiCl4 post valve closed
8/21/2012	9:09:58 AM	Main Vac valve closed
8/21/2012	9:09:58 AM	Bubbler valve closed
8/21/2012	9:09:58 AM	Bypass valve opened
8/21/2012	9:09:58 AM	Helium MFC set to  0.000000
8/21/2012	9:09:58 AM	H2 MFC set to  0.000000
8/21/2012	9:09:58 AM	BCl3 MFC set to  0.000000
8/21/2012	9:09:58 AM	PH3 MFC set to  0.000000
8/21/2012	9:09:58 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:09:58 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:09:58 AM	Tube furnace set to 0
8/21/2012	9:11:20 AM	Helium valve closed
8/21/2012	9:11:20 AM	H2 valve closed
8/21/2012	9:11:20 AM	BCl3 valve closed
8/21/2012	9:11:20 AM	PH3 valve closed
8/21/2012	9:11:20 AM	SiCl4 pre valve closed
8/21/2012	9:11:20 AM	SiCl4 post valve closed
8/21/2012	9:11:20 AM	Main Vac valve closed
8/21/2012	9:11:20 AM	Bubbler valve closed
8/21/2012	9:11:20 AM	Bypass valve opened
8/21/2012	9:11:20 AM	Helium MFC set to  0.000000
8/21/2012	9:11:20 AM	H2 MFC set to  0.000000
8/21/2012	9:11:20 AM	BCl3 MFC set to  0.000000
8/21/2012	9:11:20 AM	PH3 MFC set to  0.000000
8/21/2012	9:11:20 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:11:20 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:11:20 AM	Tube furnace set to 0
8/21/2012	9:12:20 AM	Helium valve closed
8/21/2012	9:12:20 AM	H2 valve closed
8/21/2012	9:12:20 AM	BCl3 valve closed
8/21/2012	9:12:20 AM	PH3 valve closed
8/21/2012	9:12:20 AM	SiCl4 pre valve closed
8/21/2012	9:12:20 AM	SiCl4 post valve closed
8/21/2012	9:12:20 AM	Bypass valve closed
8/21/2012	9:12:20 AM	Bubbler valve closed
8/21/2012	9:12:20 AM	Main Vac valve opened
8/21/2012	9:12:20 AM	Helium MFC set to  0.000000
8/21/2012	9:12:20 AM	H2 MFC set to  0.000000
8/21/2012	9:12:20 AM	BCl3 MFC set to  0.000000
8/21/2012	9:12:20 AM	PH3 MFC set to  0.000000
8/21/2012	9:12:20 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:12:20 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:12:20 AM	Tube furnace set to 0
8/21/2012	9:12:21 AM	Run finished at 9:12 AM
8/21/2012	9:12:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	9:34:27 AM	Recipe started at 9:34 AM
8/21/2012	9:34:27 AM	Helium valve closed
8/21/2012	9:34:27 AM	H2 valve closed
8/21/2012	9:34:27 AM	BCl3 valve closed
8/21/2012	9:34:27 AM	PH3 valve closed
8/21/2012	9:34:27 AM	SiCl4 pre valve closed
8/21/2012	9:34:27 AM	SiCl4 post valve closed
8/21/2012	9:34:27 AM	Main Vac valve closed
8/21/2012	9:34:27 AM	Bubbler valve closed
8/21/2012	9:34:27 AM	Bypass valve opened
8/21/2012	9:34:27 AM	Helium MFC set to  0.000000
8/21/2012	9:34:27 AM	H2 MFC set to  0.000000
8/21/2012	9:34:27 AM	BCl3 MFC set to  0.000000
8/21/2012	9:34:27 AM	PH3 MFC set to  0.000000
8/21/2012	9:34:27 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:34:27 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:34:27 AM	Tube furnace set to 150
8/21/2012	9:34:28 AM	Helium valve closed
8/21/2012	9:34:28 AM	H2 valve closed
8/21/2012	9:34:28 AM	BCl3 valve closed
8/21/2012	9:34:28 AM	PH3 valve closed
8/21/2012	9:34:28 AM	SiCl4 pre valve closed
8/21/2012	9:34:28 AM	SiCl4 post valve closed
8/21/2012	9:34:28 AM	Main Vac valve closed
8/21/2012	9:34:28 AM	Bubbler valve closed
8/21/2012	9:34:28 AM	Bypass valve opened
8/21/2012	9:34:28 AM	Helium MFC set to  0.000000
8/21/2012	9:34:28 AM	H2 MFC set to  0.000000
8/21/2012	9:34:28 AM	BCl3 MFC set to  0.000000
8/21/2012	9:34:28 AM	PH3 MFC set to  0.000000
8/21/2012	9:34:28 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:34:28 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:34:28 AM	Tube furnace set to 150
8/21/2012	9:34:33 AM	Helium valve closed
8/21/2012	9:34:33 AM	H2 valve closed
8/21/2012	9:34:33 AM	BCl3 valve closed
8/21/2012	9:34:33 AM	PH3 valve closed
8/21/2012	9:34:33 AM	SiCl4 pre valve closed
8/21/2012	9:34:33 AM	SiCl4 post valve closed
8/21/2012	9:34:33 AM	Bypass valve closed
8/21/2012	9:34:33 AM	Bubbler valve closed
8/21/2012	9:34:33 AM	Main Vac valve opened
8/21/2012	9:34:33 AM	Helium MFC set to  0.000000
8/21/2012	9:34:33 AM	H2 MFC set to  0.000000
8/21/2012	9:34:33 AM	BCl3 MFC set to  0.000000
8/21/2012	9:34:33 AM	PH3 MFC set to  0.000000
8/21/2012	9:34:33 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:34:33 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:34:33 AM	Tube furnace set to 150
8/21/2012	9:34:40 AM	H2 valve closed
8/21/2012	9:34:40 AM	BCl3 valve closed
8/21/2012	9:34:40 AM	PH3 valve closed
8/21/2012	9:34:40 AM	SiCl4 pre valve closed
8/21/2012	9:34:40 AM	SiCl4 post valve closed
8/21/2012	9:34:40 AM	Bypass valve closed
8/21/2012	9:34:40 AM	Bubbler valve closed
8/21/2012	9:34:40 AM	Helium valve opened
8/21/2012	9:34:40 AM	Main Vac valve opened
8/21/2012	9:34:40 AM	Helium MFC set to  20.000000
8/21/2012	9:34:40 AM	H2 MFC set to  0.000000
8/21/2012	9:34:40 AM	BCl3 MFC set to  0.000000
8/21/2012	9:34:40 AM	PH3 MFC set to  0.000000
8/21/2012	9:34:40 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:34:40 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:34:40 AM	Tube furnace set to 150
8/21/2012	9:35:10 AM	Helium valve closed
8/21/2012	9:35:10 AM	H2 valve closed
8/21/2012	9:35:10 AM	BCl3 valve closed
8/21/2012	9:35:10 AM	PH3 valve closed
8/21/2012	9:35:10 AM	SiCl4 pre valve closed
8/21/2012	9:35:10 AM	SiCl4 post valve closed
8/21/2012	9:35:10 AM	Bypass valve closed
8/21/2012	9:35:10 AM	Bubbler valve closed
8/21/2012	9:35:10 AM	Main Vac valve opened
8/21/2012	9:35:10 AM	Helium MFC set to  0.000000
8/21/2012	9:35:10 AM	H2 MFC set to  0.000000
8/21/2012	9:35:10 AM	BCl3 MFC set to  0.000000
8/21/2012	9:35:10 AM	PH3 MFC set to  0.000000
8/21/2012	9:35:10 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:35:10 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:35:10 AM	Tube furnace set to 150
8/21/2012	9:35:40 AM	H2 valve closed
8/21/2012	9:35:40 AM	BCl3 valve closed
8/21/2012	9:35:40 AM	PH3 valve closed
8/21/2012	9:35:40 AM	SiCl4 pre valve closed
8/21/2012	9:35:40 AM	SiCl4 post valve closed
8/21/2012	9:35:40 AM	Bypass valve closed
8/21/2012	9:35:40 AM	Bubbler valve closed
8/21/2012	9:35:40 AM	Helium valve opened
8/21/2012	9:35:40 AM	Main Vac valve opened
8/21/2012	9:35:40 AM	Helium MFC set to  20.000000
8/21/2012	9:35:40 AM	H2 MFC set to  0.000000
8/21/2012	9:35:40 AM	BCl3 MFC set to  0.000000
8/21/2012	9:35:40 AM	PH3 MFC set to  0.000000
8/21/2012	9:35:40 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:35:40 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:35:40 AM	Tube furnace set to 150
8/21/2012	9:36:10 AM	Helium valve closed
8/21/2012	9:36:10 AM	H2 valve closed
8/21/2012	9:36:10 AM	BCl3 valve closed
8/21/2012	9:36:10 AM	PH3 valve closed
8/21/2012	9:36:10 AM	SiCl4 pre valve closed
8/21/2012	9:36:10 AM	SiCl4 post valve closed
8/21/2012	9:36:10 AM	Bypass valve closed
8/21/2012	9:36:10 AM	Bubbler valve closed
8/21/2012	9:36:10 AM	Main Vac valve opened
8/21/2012	9:36:10 AM	Helium MFC set to  0.000000
8/21/2012	9:36:10 AM	H2 MFC set to  0.000000
8/21/2012	9:36:10 AM	BCl3 MFC set to  0.000000
8/21/2012	9:36:10 AM	PH3 MFC set to  0.000000
8/21/2012	9:36:10 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:36:10 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:36:11 AM	Tube furnace set to 150
8/21/2012	9:36:41 AM	H2 valve closed
8/21/2012	9:36:41 AM	BCl3 valve closed
8/21/2012	9:36:41 AM	PH3 valve closed
8/21/2012	9:36:41 AM	SiCl4 pre valve closed
8/21/2012	9:36:41 AM	SiCl4 post valve closed
8/21/2012	9:36:41 AM	Bypass valve closed
8/21/2012	9:36:41 AM	Bubbler valve closed
8/21/2012	9:36:41 AM	Helium valve opened
8/21/2012	9:36:41 AM	Main Vac valve opened
8/21/2012	9:36:41 AM	Helium MFC set to  20.000000
8/21/2012	9:36:41 AM	H2 MFC set to  0.000000
8/21/2012	9:36:41 AM	BCl3 MFC set to  0.000000
8/21/2012	9:36:41 AM	PH3 MFC set to  0.000000
8/21/2012	9:36:41 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:36:41 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:36:41 AM	Tube furnace set to 150
8/21/2012	9:37:11 AM	Helium valve closed
8/21/2012	9:37:11 AM	H2 valve closed
8/21/2012	9:37:11 AM	BCl3 valve closed
8/21/2012	9:37:11 AM	PH3 valve closed
8/21/2012	9:37:11 AM	SiCl4 pre valve closed
8/21/2012	9:37:11 AM	SiCl4 post valve closed
8/21/2012	9:37:11 AM	Bypass valve closed
8/21/2012	9:37:11 AM	Bubbler valve closed
8/21/2012	9:37:11 AM	Main Vac valve opened
8/21/2012	9:37:11 AM	Helium MFC set to  0.000000
8/21/2012	9:37:11 AM	H2 MFC set to  0.000000
8/21/2012	9:37:11 AM	BCl3 MFC set to  0.000000
8/21/2012	9:37:11 AM	PH3 MFC set to  0.000000
8/21/2012	9:37:11 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:37:11 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:37:11 AM	Tube furnace set to 150
8/21/2012	9:37:41 AM	H2 valve closed
8/21/2012	9:37:41 AM	BCl3 valve closed
8/21/2012	9:37:41 AM	PH3 valve closed
8/21/2012	9:37:41 AM	SiCl4 pre valve closed
8/21/2012	9:37:41 AM	SiCl4 post valve closed
8/21/2012	9:37:41 AM	Bypass valve closed
8/21/2012	9:37:41 AM	Bubbler valve closed
8/21/2012	9:37:41 AM	Helium valve opened
8/21/2012	9:37:41 AM	Main Vac valve opened
8/21/2012	9:37:41 AM	Helium MFC set to  20.000000
8/21/2012	9:37:41 AM	H2 MFC set to  0.000000
8/21/2012	9:37:41 AM	BCl3 MFC set to  0.000000
8/21/2012	9:37:41 AM	PH3 MFC set to  0.000000
8/21/2012	9:37:41 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:37:41 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:37:41 AM	Tube furnace set to 150
8/21/2012	9:38:11 AM	Helium valve closed
8/21/2012	9:38:11 AM	H2 valve closed
8/21/2012	9:38:11 AM	BCl3 valve closed
8/21/2012	9:38:11 AM	PH3 valve closed
8/21/2012	9:38:11 AM	SiCl4 pre valve closed
8/21/2012	9:38:11 AM	SiCl4 post valve closed
8/21/2012	9:38:11 AM	Bypass valve closed
8/21/2012	9:38:11 AM	Bubbler valve closed
8/21/2012	9:38:11 AM	Main Vac valve opened
8/21/2012	9:38:11 AM	Helium MFC set to  0.000000
8/21/2012	9:38:11 AM	H2 MFC set to  0.000000
8/21/2012	9:38:11 AM	BCl3 MFC set to  0.000000
8/21/2012	9:38:11 AM	PH3 MFC set to  0.000000
8/21/2012	9:38:11 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:38:11 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:38:12 AM	Tube furnace set to 150
8/21/2012	9:38:42 AM	H2 valve closed
8/21/2012	9:38:42 AM	BCl3 valve closed
8/21/2012	9:38:42 AM	PH3 valve closed
8/21/2012	9:38:42 AM	SiCl4 pre valve closed
8/21/2012	9:38:42 AM	SiCl4 post valve closed
8/21/2012	9:38:42 AM	Bypass valve closed
8/21/2012	9:38:42 AM	Bubbler valve closed
8/21/2012	9:38:42 AM	Helium valve opened
8/21/2012	9:38:42 AM	Main Vac valve opened
8/21/2012	9:38:42 AM	Helium MFC set to  20.000000
8/21/2012	9:38:42 AM	H2 MFC set to  0.000000
8/21/2012	9:38:42 AM	BCl3 MFC set to  0.000000
8/21/2012	9:38:42 AM	PH3 MFC set to  0.000000
8/21/2012	9:38:42 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:38:42 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:38:42 AM	Tube furnace set to 150
8/21/2012	9:39:12 AM	Helium valve closed
8/21/2012	9:39:12 AM	H2 valve closed
8/21/2012	9:39:12 AM	BCl3 valve closed
8/21/2012	9:39:12 AM	PH3 valve closed
8/21/2012	9:39:12 AM	SiCl4 pre valve closed
8/21/2012	9:39:12 AM	SiCl4 post valve closed
8/21/2012	9:39:12 AM	Bypass valve closed
8/21/2012	9:39:12 AM	Bubbler valve closed
8/21/2012	9:39:12 AM	Main Vac valve opened
8/21/2012	9:39:12 AM	Helium MFC set to  0.000000
8/21/2012	9:39:12 AM	H2 MFC set to  0.000000
8/21/2012	9:39:12 AM	BCl3 MFC set to  0.000000
8/21/2012	9:39:12 AM	PH3 MFC set to  0.000000
8/21/2012	9:39:12 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:39:12 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:39:12 AM	Tube furnace set to 150
8/21/2012	9:39:42 AM	H2 valve closed
8/21/2012	9:39:42 AM	BCl3 valve closed
8/21/2012	9:39:42 AM	PH3 valve closed
8/21/2012	9:39:42 AM	SiCl4 pre valve closed
8/21/2012	9:39:42 AM	SiCl4 post valve closed
8/21/2012	9:39:42 AM	Bypass valve closed
8/21/2012	9:39:42 AM	Bubbler valve closed
8/21/2012	9:39:42 AM	Helium valve opened
8/21/2012	9:39:42 AM	Main Vac valve opened
8/21/2012	9:39:42 AM	Helium MFC set to  20.000000
8/21/2012	9:39:42 AM	H2 MFC set to  0.000000
8/21/2012	9:39:42 AM	BCl3 MFC set to  0.000000
8/21/2012	9:39:42 AM	PH3 MFC set to  0.000000
8/21/2012	9:39:42 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:39:42 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:39:42 AM	Tube furnace set to 150
8/21/2012	9:40:12 AM	Helium valve closed
8/21/2012	9:40:12 AM	H2 valve closed
8/21/2012	9:40:12 AM	BCl3 valve closed
8/21/2012	9:40:12 AM	PH3 valve closed
8/21/2012	9:40:12 AM	SiCl4 pre valve closed
8/21/2012	9:40:12 AM	SiCl4 post valve closed
8/21/2012	9:40:12 AM	Bypass valve closed
8/21/2012	9:40:12 AM	Bubbler valve closed
8/21/2012	9:40:12 AM	Main Vac valve opened
8/21/2012	9:40:12 AM	Helium MFC set to  0.000000
8/21/2012	9:40:12 AM	H2 MFC set to  0.000000
8/21/2012	9:40:12 AM	BCl3 MFC set to  0.000000
8/21/2012	9:40:12 AM	PH3 MFC set to  0.000000
8/21/2012	9:40:12 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:40:12 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:40:13 AM	Tube furnace set to 150
8/21/2012	9:40:43 AM	H2 valve closed
8/21/2012	9:40:43 AM	BCl3 valve closed
8/21/2012	9:40:43 AM	PH3 valve closed
8/21/2012	9:40:43 AM	SiCl4 pre valve closed
8/21/2012	9:40:43 AM	SiCl4 post valve closed
8/21/2012	9:40:43 AM	Bypass valve closed
8/21/2012	9:40:43 AM	Bubbler valve closed
8/21/2012	9:40:43 AM	Helium valve opened
8/21/2012	9:40:43 AM	Main Vac valve opened
8/21/2012	9:40:43 AM	Helium MFC set to  20.000000
8/21/2012	9:40:43 AM	H2 MFC set to  0.000000
8/21/2012	9:40:43 AM	BCl3 MFC set to  0.000000
8/21/2012	9:40:43 AM	PH3 MFC set to  0.000000
8/21/2012	9:40:43 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:40:43 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:40:43 AM	Tube furnace set to 150
8/21/2012	9:41:13 AM	Helium valve closed
8/21/2012	9:41:13 AM	H2 valve closed
8/21/2012	9:41:13 AM	BCl3 valve closed
8/21/2012	9:41:13 AM	PH3 valve closed
8/21/2012	9:41:13 AM	SiCl4 pre valve closed
8/21/2012	9:41:13 AM	SiCl4 post valve closed
8/21/2012	9:41:13 AM	Bypass valve closed
8/21/2012	9:41:13 AM	Bubbler valve closed
8/21/2012	9:41:13 AM	Main Vac valve opened
8/21/2012	9:41:13 AM	Helium MFC set to  0.000000
8/21/2012	9:41:13 AM	H2 MFC set to  0.000000
8/21/2012	9:41:13 AM	BCl3 MFC set to  0.000000
8/21/2012	9:41:13 AM	PH3 MFC set to  0.000000
8/21/2012	9:41:13 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:41:13 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:41:13 AM	Tube furnace set to 150
8/21/2012	9:41:43 AM	H2 valve closed
8/21/2012	9:41:43 AM	BCl3 valve closed
8/21/2012	9:41:43 AM	PH3 valve closed
8/21/2012	9:41:43 AM	SiCl4 pre valve closed
8/21/2012	9:41:43 AM	SiCl4 post valve closed
8/21/2012	9:41:43 AM	Bypass valve closed
8/21/2012	9:41:43 AM	Bubbler valve closed
8/21/2012	9:41:43 AM	Helium valve opened
8/21/2012	9:41:43 AM	Main Vac valve opened
8/21/2012	9:41:43 AM	Helium MFC set to  20.000000
8/21/2012	9:41:43 AM	H2 MFC set to  0.000000
8/21/2012	9:41:43 AM	BCl3 MFC set to  0.000000
8/21/2012	9:41:43 AM	PH3 MFC set to  0.000000
8/21/2012	9:41:43 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:41:43 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:41:43 AM	Tube furnace set to 150
8/21/2012	9:42:13 AM	Helium valve closed
8/21/2012	9:42:13 AM	H2 valve closed
8/21/2012	9:42:13 AM	BCl3 valve closed
8/21/2012	9:42:13 AM	PH3 valve closed
8/21/2012	9:42:13 AM	SiCl4 pre valve closed
8/21/2012	9:42:13 AM	SiCl4 post valve closed
8/21/2012	9:42:13 AM	Bypass valve closed
8/21/2012	9:42:13 AM	Bubbler valve closed
8/21/2012	9:42:13 AM	Main Vac valve opened
8/21/2012	9:42:13 AM	Helium MFC set to  0.000000
8/21/2012	9:42:13 AM	H2 MFC set to  0.000000
8/21/2012	9:42:13 AM	BCl3 MFC set to  0.000000
8/21/2012	9:42:13 AM	PH3 MFC set to  0.000000
8/21/2012	9:42:13 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:42:13 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:42:13 AM	Tube furnace set to 150
8/21/2012	9:42:43 AM	H2 valve closed
8/21/2012	9:42:43 AM	BCl3 valve closed
8/21/2012	9:42:43 AM	PH3 valve closed
8/21/2012	9:42:43 AM	SiCl4 pre valve closed
8/21/2012	9:42:44 AM	SiCl4 post valve closed
8/21/2012	9:42:44 AM	Bypass valve closed
8/21/2012	9:42:44 AM	Bubbler valve closed
8/21/2012	9:42:44 AM	Helium valve opened
8/21/2012	9:42:44 AM	Main Vac valve opened
8/21/2012	9:42:44 AM	Helium MFC set to  20.000000
8/21/2012	9:42:44 AM	H2 MFC set to  0.000000
8/21/2012	9:42:44 AM	BCl3 MFC set to  0.000000
8/21/2012	9:42:44 AM	PH3 MFC set to  0.000000
8/21/2012	9:42:44 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:42:44 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:42:44 AM	Tube furnace set to 150
8/21/2012	9:43:14 AM	Helium valve closed
8/21/2012	9:43:14 AM	H2 valve closed
8/21/2012	9:43:14 AM	BCl3 valve closed
8/21/2012	9:43:14 AM	PH3 valve closed
8/21/2012	9:43:14 AM	SiCl4 pre valve closed
8/21/2012	9:43:14 AM	SiCl4 post valve closed
8/21/2012	9:43:14 AM	Bypass valve closed
8/21/2012	9:43:14 AM	Bubbler valve closed
8/21/2012	9:43:14 AM	Main Vac valve opened
8/21/2012	9:43:14 AM	Helium MFC set to  0.000000
8/21/2012	9:43:14 AM	H2 MFC set to  0.000000
8/21/2012	9:43:14 AM	BCl3 MFC set to  0.000000
8/21/2012	9:43:14 AM	PH3 MFC set to  0.000000
8/21/2012	9:43:14 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:43:14 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:43:14 AM	Tube furnace set to 150
8/21/2012	9:43:44 AM	H2 valve closed
8/21/2012	9:43:44 AM	BCl3 valve closed
8/21/2012	9:43:44 AM	PH3 valve closed
8/21/2012	9:43:44 AM	SiCl4 pre valve closed
8/21/2012	9:43:44 AM	SiCl4 post valve closed
8/21/2012	9:43:44 AM	Bypass valve closed
8/21/2012	9:43:44 AM	Bubbler valve closed
8/21/2012	9:43:44 AM	Helium valve opened
8/21/2012	9:43:44 AM	Main Vac valve opened
8/21/2012	9:43:44 AM	Helium MFC set to  20.000000
8/21/2012	9:43:44 AM	H2 MFC set to  0.000000
8/21/2012	9:43:44 AM	BCl3 MFC set to  0.000000
8/21/2012	9:43:44 AM	PH3 MFC set to  0.000000
8/21/2012	9:43:44 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:43:44 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:43:44 AM	Tube furnace set to 150
8/21/2012	9:44:14 AM	Helium valve closed
8/21/2012	9:44:14 AM	H2 valve closed
8/21/2012	9:44:14 AM	BCl3 valve closed
8/21/2012	9:44:14 AM	PH3 valve closed
8/21/2012	9:44:14 AM	SiCl4 pre valve closed
8/21/2012	9:44:14 AM	SiCl4 post valve closed
8/21/2012	9:44:14 AM	Bypass valve closed
8/21/2012	9:44:14 AM	Bubbler valve closed
8/21/2012	9:44:14 AM	Main Vac valve opened
8/21/2012	9:44:14 AM	Helium MFC set to  0.000000
8/21/2012	9:44:14 AM	H2 MFC set to  0.000000
8/21/2012	9:44:14 AM	BCl3 MFC set to  0.000000
8/21/2012	9:44:14 AM	PH3 MFC set to  0.000000
8/21/2012	9:44:14 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:44:14 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:44:14 AM	Tube furnace set to 150
8/21/2012	9:44:15 AM	Run finished at 9:44 AM
8/21/2012	9:48:16 AM	Recipe started at 9:48 AM
8/21/2012	9:48:16 AM	Helium valve closed
8/21/2012	9:48:16 AM	H2 valve closed
8/21/2012	9:48:16 AM	BCl3 valve closed
8/21/2012	9:48:16 AM	PH3 valve closed
8/21/2012	9:48:16 AM	SiCl4 pre valve closed
8/21/2012	9:48:16 AM	SiCl4 post valve closed
8/21/2012	9:48:16 AM	Main Vac valve closed
8/21/2012	9:48:16 AM	Bubbler valve closed
8/21/2012	9:48:16 AM	Bypass valve opened
8/21/2012	9:48:16 AM	Helium MFC set to  0.000000
8/21/2012	9:48:16 AM	H2 MFC set to  0.000000
8/21/2012	9:48:16 AM	BCl3 MFC set to  0.000000
8/21/2012	9:48:16 AM	PH3 MFC set to  0.000000
8/21/2012	9:48:16 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:48:16 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:48:16 AM	Tube furnace set to 150
8/21/2012	9:48:16 AM	Helium valve closed
8/21/2012	9:48:16 AM	H2 valve closed
8/21/2012	9:48:16 AM	BCl3 valve closed
8/21/2012	9:48:16 AM	PH3 valve closed
8/21/2012	9:48:16 AM	SiCl4 pre valve closed
8/21/2012	9:48:16 AM	SiCl4 post valve closed
8/21/2012	9:48:16 AM	Main Vac valve closed
8/21/2012	9:48:16 AM	Bubbler valve closed
8/21/2012	9:48:16 AM	Bypass valve opened
8/21/2012	9:48:16 AM	Helium MFC set to  0.000000
8/21/2012	9:48:16 AM	H2 MFC set to  0.000000
8/21/2012	9:48:16 AM	BCl3 MFC set to  0.000000
8/21/2012	9:48:16 AM	PH3 MFC set to  0.000000
8/21/2012	9:48:16 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:48:16 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:48:17 AM	Tube furnace set to 150
8/21/2012	9:48:22 AM	Helium valve closed
8/21/2012	9:48:22 AM	H2 valve closed
8/21/2012	9:48:22 AM	BCl3 valve closed
8/21/2012	9:48:22 AM	PH3 valve closed
8/21/2012	9:48:22 AM	SiCl4 pre valve closed
8/21/2012	9:48:22 AM	SiCl4 post valve closed
8/21/2012	9:48:22 AM	Bypass valve closed
8/21/2012	9:48:22 AM	Bubbler valve closed
8/21/2012	9:48:22 AM	Main Vac valve opened
8/21/2012	9:48:22 AM	Helium MFC set to  0.000000
8/21/2012	9:48:22 AM	H2 MFC set to  0.000000
8/21/2012	9:48:22 AM	BCl3 MFC set to  0.000000
8/21/2012	9:48:22 AM	PH3 MFC set to  0.000000
8/21/2012	9:48:22 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:48:22 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:48:22 AM	Tube furnace set to 150
8/21/2012	9:48:29 AM	H2 valve closed
8/21/2012	9:48:29 AM	BCl3 valve closed
8/21/2012	9:48:29 AM	PH3 valve closed
8/21/2012	9:48:29 AM	SiCl4 pre valve closed
8/21/2012	9:48:29 AM	SiCl4 post valve closed
8/21/2012	9:48:29 AM	Bypass valve closed
8/21/2012	9:48:29 AM	Bubbler valve closed
8/21/2012	9:48:29 AM	Helium valve opened
8/21/2012	9:48:29 AM	Main Vac valve opened
8/21/2012	9:48:29 AM	Helium MFC set to  20.000000
8/21/2012	9:48:29 AM	H2 MFC set to  0.000000
8/21/2012	9:48:29 AM	BCl3 MFC set to  0.000000
8/21/2012	9:48:29 AM	PH3 MFC set to  0.000000
8/21/2012	9:48:29 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:48:29 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:48:29 AM	Tube furnace set to 150
8/21/2012	9:48:59 AM	Helium valve closed
8/21/2012	9:48:59 AM	H2 valve closed
8/21/2012	9:48:59 AM	BCl3 valve closed
8/21/2012	9:48:59 AM	PH3 valve closed
8/21/2012	9:48:59 AM	SiCl4 pre valve closed
8/21/2012	9:48:59 AM	SiCl4 post valve closed
8/21/2012	9:48:59 AM	Bypass valve closed
8/21/2012	9:48:59 AM	Bubbler valve closed
8/21/2012	9:48:59 AM	Main Vac valve opened
8/21/2012	9:48:59 AM	Helium MFC set to  0.000000
8/21/2012	9:48:59 AM	H2 MFC set to  0.000000
8/21/2012	9:48:59 AM	BCl3 MFC set to  0.000000
8/21/2012	9:48:59 AM	PH3 MFC set to  0.000000
8/21/2012	9:48:59 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:48:59 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:48:59 AM	Tube furnace set to 150
8/21/2012	9:49:29 AM	H2 valve closed
8/21/2012	9:49:29 AM	BCl3 valve closed
8/21/2012	9:49:29 AM	PH3 valve closed
8/21/2012	9:49:29 AM	SiCl4 pre valve closed
8/21/2012	9:49:29 AM	SiCl4 post valve closed
8/21/2012	9:49:29 AM	Bypass valve closed
8/21/2012	9:49:29 AM	Bubbler valve closed
8/21/2012	9:49:29 AM	Helium valve opened
8/21/2012	9:49:29 AM	Main Vac valve opened
8/21/2012	9:49:29 AM	Helium MFC set to  20.000000
8/21/2012	9:49:29 AM	H2 MFC set to  0.000000
8/21/2012	9:49:29 AM	BCl3 MFC set to  0.000000
8/21/2012	9:49:29 AM	PH3 MFC set to  0.000000
8/21/2012	9:49:29 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:49:29 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:49:29 AM	Tube furnace set to 150
8/21/2012	9:49:59 AM	Helium valve closed
8/21/2012	9:49:59 AM	H2 valve closed
8/21/2012	9:50:00 AM	BCl3 valve closed
8/21/2012	9:50:00 AM	PH3 valve closed
8/21/2012	9:50:00 AM	SiCl4 pre valve closed
8/21/2012	9:50:00 AM	SiCl4 post valve closed
8/21/2012	9:50:00 AM	Bypass valve closed
8/21/2012	9:50:00 AM	Bubbler valve closed
8/21/2012	9:50:00 AM	Main Vac valve opened
8/21/2012	9:50:00 AM	Helium MFC set to  0.000000
8/21/2012	9:50:00 AM	H2 MFC set to  0.000000
8/21/2012	9:50:00 AM	BCl3 MFC set to  0.000000
8/21/2012	9:50:00 AM	PH3 MFC set to  0.000000
8/21/2012	9:50:00 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:50:00 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:50:00 AM	Tube furnace set to 150
8/21/2012	9:50:30 AM	H2 valve closed
8/21/2012	9:50:30 AM	BCl3 valve closed
8/21/2012	9:50:30 AM	PH3 valve closed
8/21/2012	9:50:30 AM	SiCl4 pre valve closed
8/21/2012	9:50:30 AM	SiCl4 post valve closed
8/21/2012	9:50:30 AM	Bypass valve closed
8/21/2012	9:50:30 AM	Bubbler valve closed
8/21/2012	9:50:30 AM	Helium valve opened
8/21/2012	9:50:30 AM	Main Vac valve opened
8/21/2012	9:50:30 AM	Helium MFC set to  20.000000
8/21/2012	9:50:30 AM	H2 MFC set to  0.000000
8/21/2012	9:50:30 AM	BCl3 MFC set to  0.000000
8/21/2012	9:50:30 AM	PH3 MFC set to  0.000000
8/21/2012	9:50:30 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:50:30 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:50:30 AM	Tube furnace set to 150
8/21/2012	9:51:00 AM	Helium valve closed
8/21/2012	9:51:00 AM	H2 valve closed
8/21/2012	9:51:00 AM	BCl3 valve closed
8/21/2012	9:51:00 AM	PH3 valve closed
8/21/2012	9:51:00 AM	SiCl4 pre valve closed
8/21/2012	9:51:00 AM	SiCl4 post valve closed
8/21/2012	9:51:00 AM	Bypass valve closed
8/21/2012	9:51:00 AM	Bubbler valve closed
8/21/2012	9:51:00 AM	Main Vac valve opened
8/21/2012	9:51:00 AM	Helium MFC set to  0.000000
8/21/2012	9:51:00 AM	H2 MFC set to  0.000000
8/21/2012	9:51:00 AM	BCl3 MFC set to  0.000000
8/21/2012	9:51:00 AM	PH3 MFC set to  0.000000
8/21/2012	9:51:00 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:51:00 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:51:00 AM	Tube furnace set to 150
8/21/2012	9:51:30 AM	H2 valve closed
8/21/2012	9:51:30 AM	BCl3 valve closed
8/21/2012	9:51:30 AM	PH3 valve closed
8/21/2012	9:51:30 AM	SiCl4 pre valve closed
8/21/2012	9:51:30 AM	SiCl4 post valve closed
8/21/2012	9:51:30 AM	Bypass valve closed
8/21/2012	9:51:30 AM	Bubbler valve closed
8/21/2012	9:51:30 AM	Helium valve opened
8/21/2012	9:51:30 AM	Main Vac valve opened
8/21/2012	9:51:30 AM	Helium MFC set to  20.000000
8/21/2012	9:51:30 AM	H2 MFC set to  0.000000
8/21/2012	9:51:30 AM	BCl3 MFC set to  0.000000
8/21/2012	9:51:30 AM	PH3 MFC set to  0.000000
8/21/2012	9:51:30 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:51:30 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:51:30 AM	Tube furnace set to 150
8/21/2012	9:52:00 AM	Helium valve closed
8/21/2012	9:52:00 AM	H2 valve closed
8/21/2012	9:52:00 AM	BCl3 valve closed
8/21/2012	9:52:00 AM	PH3 valve closed
8/21/2012	9:52:00 AM	SiCl4 pre valve closed
8/21/2012	9:52:00 AM	SiCl4 post valve closed
8/21/2012	9:52:00 AM	Bypass valve closed
8/21/2012	9:52:00 AM	Bubbler valve closed
8/21/2012	9:52:00 AM	Main Vac valve opened
8/21/2012	9:52:00 AM	Helium MFC set to  0.000000
8/21/2012	9:52:01 AM	H2 MFC set to  0.000000
8/21/2012	9:52:01 AM	BCl3 MFC set to  0.000000
8/21/2012	9:52:01 AM	PH3 MFC set to  0.000000
8/21/2012	9:52:01 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:52:01 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:52:01 AM	Tube furnace set to 150
8/21/2012	9:52:31 AM	H2 valve closed
8/21/2012	9:52:31 AM	BCl3 valve closed
8/21/2012	9:52:31 AM	PH3 valve closed
8/21/2012	9:52:31 AM	SiCl4 pre valve closed
8/21/2012	9:52:31 AM	SiCl4 post valve closed
8/21/2012	9:52:31 AM	Bypass valve closed
8/21/2012	9:52:31 AM	Bubbler valve closed
8/21/2012	9:52:31 AM	Helium valve opened
8/21/2012	9:52:31 AM	Main Vac valve opened
8/21/2012	9:52:31 AM	Helium MFC set to  20.000000
8/21/2012	9:52:31 AM	H2 MFC set to  0.000000
8/21/2012	9:52:31 AM	BCl3 MFC set to  0.000000
8/21/2012	9:52:31 AM	PH3 MFC set to  0.000000
8/21/2012	9:52:31 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:52:31 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:52:31 AM	Tube furnace set to 150
8/21/2012	9:53:01 AM	Helium valve closed
8/21/2012	9:53:01 AM	H2 valve closed
8/21/2012	9:53:01 AM	BCl3 valve closed
8/21/2012	9:53:01 AM	PH3 valve closed
8/21/2012	9:53:01 AM	SiCl4 pre valve closed
8/21/2012	9:53:01 AM	SiCl4 post valve closed
8/21/2012	9:53:01 AM	Bypass valve closed
8/21/2012	9:53:01 AM	Bubbler valve closed
8/21/2012	9:53:01 AM	Main Vac valve opened
8/21/2012	9:53:01 AM	Helium MFC set to  0.000000
8/21/2012	9:53:01 AM	H2 MFC set to  0.000000
8/21/2012	9:53:01 AM	BCl3 MFC set to  0.000000
8/21/2012	9:53:01 AM	PH3 MFC set to  0.000000
8/21/2012	9:53:01 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:53:01 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:53:01 AM	Tube furnace set to 150
8/21/2012	9:53:31 AM	H2 valve closed
8/21/2012	9:53:31 AM	BCl3 valve closed
8/21/2012	9:53:31 AM	PH3 valve closed
8/21/2012	9:53:31 AM	SiCl4 pre valve closed
8/21/2012	9:53:31 AM	SiCl4 post valve closed
8/21/2012	9:53:31 AM	Bypass valve closed
8/21/2012	9:53:31 AM	Bubbler valve closed
8/21/2012	9:53:31 AM	Helium valve opened
8/21/2012	9:53:31 AM	Main Vac valve opened
8/21/2012	9:53:31 AM	Helium MFC set to  20.000000
8/21/2012	9:53:31 AM	H2 MFC set to  0.000000
8/21/2012	9:53:31 AM	BCl3 MFC set to  0.000000
8/21/2012	9:53:31 AM	PH3 MFC set to  0.000000
8/21/2012	9:53:31 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:53:31 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:53:31 AM	Tube furnace set to 150
8/21/2012	9:54:01 AM	Helium valve closed
8/21/2012	9:54:01 AM	H2 valve closed
8/21/2012	9:54:01 AM	BCl3 valve closed
8/21/2012	9:54:01 AM	PH3 valve closed
8/21/2012	9:54:01 AM	SiCl4 pre valve closed
8/21/2012	9:54:01 AM	SiCl4 post valve closed
8/21/2012	9:54:01 AM	Bypass valve closed
8/21/2012	9:54:01 AM	Bubbler valve closed
8/21/2012	9:54:01 AM	Main Vac valve opened
8/21/2012	9:54:01 AM	Helium MFC set to  0.000000
8/21/2012	9:54:01 AM	H2 MFC set to  0.000000
8/21/2012	9:54:01 AM	BCl3 MFC set to  0.000000
8/21/2012	9:54:01 AM	PH3 MFC set to  0.000000
8/21/2012	9:54:01 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:54:01 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:54:02 AM	Tube furnace set to 150
8/21/2012	9:54:32 AM	H2 valve closed
8/21/2012	9:54:32 AM	BCl3 valve closed
8/21/2012	9:54:32 AM	PH3 valve closed
8/21/2012	9:54:32 AM	SiCl4 pre valve closed
8/21/2012	9:54:32 AM	SiCl4 post valve closed
8/21/2012	9:54:32 AM	Bypass valve closed
8/21/2012	9:54:32 AM	Bubbler valve closed
8/21/2012	9:54:32 AM	Helium valve opened
8/21/2012	9:54:32 AM	Main Vac valve opened
8/21/2012	9:54:32 AM	Helium MFC set to  20.000000
8/21/2012	9:54:32 AM	H2 MFC set to  0.000000
8/21/2012	9:54:32 AM	BCl3 MFC set to  0.000000
8/21/2012	9:54:32 AM	PH3 MFC set to  0.000000
8/21/2012	9:54:32 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:54:32 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:54:32 AM	Tube furnace set to 150
8/21/2012	9:55:02 AM	Helium valve closed
8/21/2012	9:55:02 AM	H2 valve closed
8/21/2012	9:55:02 AM	BCl3 valve closed
8/21/2012	9:55:02 AM	PH3 valve closed
8/21/2012	9:55:02 AM	SiCl4 pre valve closed
8/21/2012	9:55:02 AM	SiCl4 post valve closed
8/21/2012	9:55:02 AM	Bypass valve closed
8/21/2012	9:55:02 AM	Bubbler valve closed
8/21/2012	9:55:02 AM	Main Vac valve opened
8/21/2012	9:55:02 AM	Helium MFC set to  0.000000
8/21/2012	9:55:02 AM	H2 MFC set to  0.000000
8/21/2012	9:55:02 AM	BCl3 MFC set to  0.000000
8/21/2012	9:55:02 AM	PH3 MFC set to  0.000000
8/21/2012	9:55:02 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:55:02 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:55:02 AM	Tube furnace set to 150
8/21/2012	9:55:32 AM	H2 valve closed
8/21/2012	9:55:32 AM	BCl3 valve closed
8/21/2012	9:55:32 AM	PH3 valve closed
8/21/2012	9:55:32 AM	SiCl4 pre valve closed
8/21/2012	9:55:32 AM	SiCl4 post valve closed
8/21/2012	9:55:32 AM	Bypass valve closed
8/21/2012	9:55:32 AM	Bubbler valve closed
8/21/2012	9:55:32 AM	Helium valve opened
8/21/2012	9:55:32 AM	Main Vac valve opened
8/21/2012	9:55:32 AM	Helium MFC set to  20.000000
8/21/2012	9:55:32 AM	H2 MFC set to  0.000000
8/21/2012	9:55:32 AM	BCl3 MFC set to  0.000000
8/21/2012	9:55:32 AM	PH3 MFC set to  0.000000
8/21/2012	9:55:32 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:55:32 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:55:32 AM	Tube furnace set to 150
8/21/2012	9:56:02 AM	Helium valve closed
8/21/2012	9:56:02 AM	H2 valve closed
8/21/2012	9:56:02 AM	BCl3 valve closed
8/21/2012	9:56:02 AM	PH3 valve closed
8/21/2012	9:56:02 AM	SiCl4 pre valve closed
8/21/2012	9:56:02 AM	SiCl4 post valve closed
8/21/2012	9:56:02 AM	Bypass valve closed
8/21/2012	9:56:02 AM	Bubbler valve closed
8/21/2012	9:56:02 AM	Main Vac valve opened
8/21/2012	9:56:02 AM	Helium MFC set to  0.000000
8/21/2012	9:56:02 AM	H2 MFC set to  0.000000
8/21/2012	9:56:02 AM	BCl3 MFC set to  0.000000
8/21/2012	9:56:02 AM	PH3 MFC set to  0.000000
8/21/2012	9:56:02 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:56:02 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:56:03 AM	Tube furnace set to 150
8/21/2012	9:56:33 AM	H2 valve closed
8/21/2012	9:56:33 AM	BCl3 valve closed
8/21/2012	9:56:33 AM	PH3 valve closed
8/21/2012	9:56:33 AM	SiCl4 pre valve closed
8/21/2012	9:56:33 AM	SiCl4 post valve closed
8/21/2012	9:56:33 AM	Bypass valve closed
8/21/2012	9:56:33 AM	Bubbler valve closed
8/21/2012	9:56:33 AM	Helium valve opened
8/21/2012	9:56:33 AM	Main Vac valve opened
8/21/2012	9:56:33 AM	Helium MFC set to  20.000000
8/21/2012	9:56:33 AM	H2 MFC set to  0.000000
8/21/2012	9:56:33 AM	BCl3 MFC set to  0.000000
8/21/2012	9:56:33 AM	PH3 MFC set to  0.000000
8/21/2012	9:56:33 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:56:33 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:56:33 AM	Tube furnace set to 150
8/21/2012	9:57:03 AM	Helium valve closed
8/21/2012	9:57:03 AM	H2 valve closed
8/21/2012	9:57:03 AM	BCl3 valve closed
8/21/2012	9:57:03 AM	PH3 valve closed
8/21/2012	9:57:03 AM	SiCl4 pre valve closed
8/21/2012	9:57:03 AM	SiCl4 post valve closed
8/21/2012	9:57:03 AM	Bypass valve closed
8/21/2012	9:57:03 AM	Bubbler valve closed
8/21/2012	9:57:03 AM	Main Vac valve opened
8/21/2012	9:57:03 AM	Helium MFC set to  0.000000
8/21/2012	9:57:03 AM	H2 MFC set to  0.000000
8/21/2012	9:57:03 AM	BCl3 MFC set to  0.000000
8/21/2012	9:57:03 AM	PH3 MFC set to  0.000000
8/21/2012	9:57:03 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:57:03 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:57:03 AM	Tube furnace set to 150
8/21/2012	9:57:33 AM	H2 valve closed
8/21/2012	9:57:33 AM	BCl3 valve closed
8/21/2012	9:57:33 AM	PH3 valve closed
8/21/2012	9:57:33 AM	SiCl4 pre valve closed
8/21/2012	9:57:33 AM	SiCl4 post valve closed
8/21/2012	9:57:33 AM	Bypass valve closed
8/21/2012	9:57:33 AM	Bubbler valve closed
8/21/2012	9:57:33 AM	Helium valve opened
8/21/2012	9:57:33 AM	Main Vac valve opened
8/21/2012	9:57:33 AM	Helium MFC set to  20.000000
8/21/2012	9:57:33 AM	H2 MFC set to  0.000000
8/21/2012	9:57:33 AM	BCl3 MFC set to  0.000000
8/21/2012	9:57:33 AM	PH3 MFC set to  0.000000
8/21/2012	9:57:33 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:57:33 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:57:33 AM	Tube furnace set to 150
8/21/2012	9:58:03 AM	Helium valve closed
8/21/2012	9:58:03 AM	H2 valve closed
8/21/2012	9:58:03 AM	BCl3 valve closed
8/21/2012	9:58:03 AM	PH3 valve closed
8/21/2012	9:58:03 AM	SiCl4 pre valve closed
8/21/2012	9:58:03 AM	SiCl4 post valve closed
8/21/2012	9:58:03 AM	Bypass valve closed
8/21/2012	9:58:03 AM	Bubbler valve closed
8/21/2012	9:58:03 AM	Main Vac valve opened
8/21/2012	9:58:03 AM	Helium MFC set to  0.000000
8/21/2012	9:58:03 AM	H2 MFC set to  0.000000
8/21/2012	9:58:03 AM	BCl3 MFC set to  0.000000
8/21/2012	9:58:03 AM	PH3 MFC set to  0.000000
8/21/2012	9:58:03 AM	SiCl4 MFC set to  0.000000
8/21/2012	9:58:03 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:58:03 AM	Tube furnace set to 150
8/21/2012	9:58:04 AM	Run finished at 9:58 AM
8/21/2012	10:06:22 AM	Main Vac valve closed
8/21/2012	10:06:34 AM	Main Vac valve opened
8/21/2012	10:08:37 AM	Recipe started at 10:08 AM
8/21/2012	10:08:37 AM	Helium valve closed
8/21/2012	10:08:37 AM	H2 valve closed
8/21/2012	10:08:37 AM	BCl3 valve closed
8/21/2012	10:08:37 AM	PH3 valve closed
8/21/2012	10:08:37 AM	SiCl4 pre valve closed
8/21/2012	10:08:37 AM	SiCl4 post valve closed
8/21/2012	10:08:37 AM	Main Vac valve closed
8/21/2012	10:08:37 AM	Bypass valve closed
8/21/2012	10:08:37 AM	Bubbler valve closed
8/21/2012	10:08:37 AM	Helium MFC set to  0.000000
8/21/2012	10:08:37 AM	H2 MFC set to  0.000000
8/21/2012	10:08:37 AM	BCl3 MFC set to  0.000000
8/21/2012	10:08:37 AM	PH3 MFC set to  0.000000
8/21/2012	10:08:37 AM	SiCl4 MFC set to  0.000000
8/21/2012	10:08:37 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:08:37 AM	Tube furnace set to 0
8/21/2012	10:08:40 AM	Helium valve closed
8/21/2012	10:08:40 AM	BCl3 valve closed
8/21/2012	10:08:40 AM	PH3 valve closed
8/21/2012	10:08:40 AM	SiCl4 pre valve closed
8/21/2012	10:08:40 AM	SiCl4 post valve closed
8/21/2012	10:08:40 AM	Main Vac valve closed
8/21/2012	10:08:40 AM	Bypass valve closed
8/21/2012	10:08:40 AM	Bubbler valve closed
8/21/2012	10:08:40 AM	H2 valve opened
8/21/2012	10:08:40 AM	Helium MFC set to  0.000000
8/21/2012	10:08:40 AM	H2 MFC set to  500.000000
8/21/2012	10:08:40 AM	BCl3 MFC set to  0.000000
8/21/2012	10:08:40 AM	PH3 MFC set to  0.000000
8/21/2012	10:08:40 AM	SiCl4 MFC set to  0.000000
8/21/2012	10:08:40 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:08:40 AM	Tube furnace set to 50
8/21/2012	10:09:52 AM	Helium valve closed
8/21/2012	10:09:52 AM	BCl3 valve closed
8/21/2012	10:09:52 AM	PH3 valve closed
8/21/2012	10:09:52 AM	SiCl4 pre valve closed
8/21/2012	10:09:52 AM	SiCl4 post valve closed
8/21/2012	10:09:52 AM	Main Vac valve closed
8/21/2012	10:09:52 AM	Bypass valve closed
8/21/2012	10:09:52 AM	H2 valve opened
8/21/2012	10:09:52 AM	Bubbler valve opened
8/21/2012	10:09:52 AM	Helium MFC set to  0.000000
8/21/2012	10:09:52 AM	H2 MFC set to  500.000000
8/21/2012	10:09:52 AM	BCl3 MFC set to  0.000000
8/21/2012	10:09:52 AM	PH3 MFC set to  0.000000
8/21/2012	10:09:52 AM	SiCl4 MFC set to  0.000000
8/21/2012	10:09:52 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:09:53 AM	Tube furnace set to 50
8/21/2012	10:09:54 AM	Helium valve closed
8/21/2012	10:09:54 AM	BCl3 valve closed
8/21/2012	10:09:54 AM	PH3 valve closed
8/21/2012	10:09:54 AM	SiCl4 pre valve closed
8/21/2012	10:09:54 AM	SiCl4 post valve closed
8/21/2012	10:09:54 AM	Main Vac valve closed
8/21/2012	10:09:54 AM	Bypass valve closed
8/21/2012	10:09:54 AM	H2 valve opened
8/21/2012	10:09:54 AM	Bubbler valve opened
8/21/2012	10:09:54 AM	Helium MFC set to  0.000000
8/21/2012	10:09:54 AM	H2 MFC set to  450.000000
8/21/2012	10:09:54 AM	BCl3 MFC set to  0.000000
8/21/2012	10:09:54 AM	PH3 MFC set to  0.000000
8/21/2012	10:09:54 AM	SiCl4 MFC set to  0.000000
8/21/2012	10:09:54 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:09:54 AM	Tube furnace set to 1000
8/21/2012	10:29:54 AM	Helium valve closed
8/21/2012	10:29:54 AM	PH3 valve closed
8/21/2012	10:29:54 AM	Main Vac valve closed
8/21/2012	10:29:54 AM	Bypass valve closed
8/21/2012	10:29:54 AM	H2 valve opened
8/21/2012	10:29:54 AM	BCl3 valve opened
8/21/2012	10:29:54 AM	SiCl4 pre valve opened
8/21/2012	10:29:54 AM	SiCl4 post valve opened
8/21/2012	10:29:54 AM	Bubbler valve opened
8/21/2012	10:29:54 AM	Helium MFC set to  0.000000
8/21/2012	10:29:54 AM	H2 MFC set to  500.000000
8/21/2012	10:29:54 AM	BCl3 MFC set to  1.200000
8/21/2012	10:29:54 AM	PH3 MFC set to  0.000000
8/21/2012	10:29:54 AM	SiCl4 MFC set to  50.000000
8/21/2012	10:29:54 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:29:54 AM	Tube furnace set to 1000
8/21/2012	10:44:54 AM	Helium valve closed
8/21/2012	10:44:54 AM	BCl3 valve closed
8/21/2012	10:44:54 AM	PH3 valve closed
8/21/2012	10:44:54 AM	SiCl4 pre valve closed
8/21/2012	10:44:54 AM	SiCl4 post valve closed
8/21/2012	10:44:54 AM	Main Vac valve closed
8/21/2012	10:44:54 AM	Bypass valve closed
8/21/2012	10:44:54 AM	H2 valve opened
8/21/2012	10:44:54 AM	Bubbler valve opened
8/21/2012	10:44:54 AM	Helium MFC set to  0.000000
8/21/2012	10:44:54 AM	H2 MFC set to  500.000000
8/21/2012	10:44:54 AM	BCl3 MFC set to  0.000000
8/21/2012	10:44:54 AM	PH3 MFC set to  0.000000
8/21/2012	10:44:54 AM	SiCl4 MFC set to  0.000000
8/21/2012	10:44:54 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:44:54 AM	Tube furnace set to 750
8/21/2012	10:54:54 AM	H2 valve closed
8/21/2012	10:54:54 AM	BCl3 valve closed
8/21/2012	10:54:54 AM	PH3 valve closed
8/21/2012	10:54:54 AM	SiCl4 pre valve closed
8/21/2012	10:54:54 AM	SiCl4 post valve closed
8/21/2012	10:54:54 AM	Main Vac valve closed
8/21/2012	10:54:54 AM	Bypass valve closed
8/21/2012	10:54:54 AM	Helium valve opened
8/21/2012	10:54:54 AM	Bubbler valve opened
8/21/2012	10:54:54 AM	Helium MFC set to  400.000000
8/21/2012	10:54:54 AM	H2 MFC set to  0.000000
8/21/2012	10:54:54 AM	BCl3 MFC set to  0.000000
8/21/2012	10:54:54 AM	PH3 MFC set to  0.000000
8/21/2012	10:54:54 AM	SiCl4 MFC set to  0.000000
8/21/2012	10:54:54 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:54:55 AM	Tube furnace set to 0
8/21/2012	11:17:53 AM	Run aborted at 11:17 AM
8/21/2012	11:17:53 AM	Helium valve closed
8/21/2012	11:17:53 AM	H2 valve closed
8/21/2012	11:17:53 AM	BCl3 valve closed
8/21/2012	11:17:53 AM	PH3 valve closed
8/21/2012	11:17:53 AM	SiCl4 pre valve closed
8/21/2012	11:17:53 AM	SiCl4 post valve closed
8/21/2012	11:17:53 AM	Bypass valve closed
8/21/2012	11:17:53 AM	Main Vac valve closed
8/21/2012	11:17:53 AM	Bubbler valve closed
8/21/2012	11:17:53 AM	Helium MFC set to  0.000000
8/21/2012	11:17:53 AM	H2 MFC set to  0.000000
8/21/2012	11:17:53 AM	BCl3 MFC set to  0.000000
8/21/2012	11:17:53 AM	PH3 MFC set to  0.000000
8/21/2012	11:17:53 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:17:54 AM	Tube furnace set to 0
8/21/2012	11:18:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	11:18:52 AM	Recipe started at 11:18 AM
8/21/2012	11:18:52 AM	Helium valve closed
8/21/2012	11:18:52 AM	H2 valve closed
8/21/2012	11:18:52 AM	BCl3 valve closed
8/21/2012	11:18:52 AM	PH3 valve closed
8/21/2012	11:18:52 AM	SiCl4 pre valve closed
8/21/2012	11:18:52 AM	SiCl4 post valve closed
8/21/2012	11:18:52 AM	Main Vac valve closed
8/21/2012	11:18:52 AM	Bubbler valve closed
8/21/2012	11:18:52 AM	Bypass valve opened
8/21/2012	11:18:52 AM	Helium MFC set to  0.000000
8/21/2012	11:18:52 AM	H2 MFC set to  0.000000
8/21/2012	11:18:52 AM	BCl3 MFC set to  0.000000
8/21/2012	11:18:52 AM	PH3 MFC set to  0.000000
8/21/2012	11:18:52 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:18:52 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:18:52 AM	Tube furnace set to 0
8/21/2012	11:19:56 AM	Helium valve closed
8/21/2012	11:19:56 AM	H2 valve closed
8/21/2012	11:19:56 AM	BCl3 valve closed
8/21/2012	11:19:56 AM	PH3 valve closed
8/21/2012	11:19:56 AM	SiCl4 pre valve closed
8/21/2012	11:19:56 AM	SiCl4 post valve closed
8/21/2012	11:19:56 AM	Main Vac valve closed
8/21/2012	11:19:56 AM	Bubbler valve closed
8/21/2012	11:19:56 AM	Bypass valve opened
8/21/2012	11:19:56 AM	Helium MFC set to  0.000000
8/21/2012	11:19:56 AM	H2 MFC set to  0.000000
8/21/2012	11:19:56 AM	BCl3 MFC set to  0.000000
8/21/2012	11:19:56 AM	PH3 MFC set to  0.000000
8/21/2012	11:19:56 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:19:56 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:19:56 AM	Tube furnace set to 0
8/21/2012	11:20:56 AM	Helium valve closed
8/21/2012	11:20:56 AM	H2 valve closed
8/21/2012	11:20:56 AM	BCl3 valve closed
8/21/2012	11:20:56 AM	PH3 valve closed
8/21/2012	11:20:56 AM	SiCl4 pre valve closed
8/21/2012	11:20:56 AM	SiCl4 post valve closed
8/21/2012	11:20:56 AM	Bypass valve closed
8/21/2012	11:20:56 AM	Bubbler valve closed
8/21/2012	11:20:56 AM	Main Vac valve opened
8/21/2012	11:20:56 AM	Helium MFC set to  0.000000
8/21/2012	11:20:56 AM	H2 MFC set to  0.000000
8/21/2012	11:20:56 AM	BCl3 MFC set to  0.000000
8/21/2012	11:20:56 AM	PH3 MFC set to  0.000000
8/21/2012	11:20:56 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:20:56 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:20:56 AM	Tube furnace set to 0
8/21/2012	11:20:57 AM	Run finished at 11:20 AM
8/21/2012	11:20:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	11:30:40 AM	Recipe started at 11:30 AM
8/21/2012	11:30:40 AM	Helium valve closed
8/21/2012	11:30:40 AM	H2 valve closed
8/21/2012	11:30:40 AM	BCl3 valve closed
8/21/2012	11:30:40 AM	PH3 valve closed
8/21/2012	11:30:40 AM	SiCl4 pre valve closed
8/21/2012	11:30:40 AM	SiCl4 post valve closed
8/21/2012	11:30:40 AM	Main Vac valve closed
8/21/2012	11:30:40 AM	Bubbler valve closed
8/21/2012	11:30:40 AM	Bypass valve opened
8/21/2012	11:30:40 AM	Helium MFC set to  0.000000
8/21/2012	11:30:40 AM	H2 MFC set to  0.000000
8/21/2012	11:30:40 AM	BCl3 MFC set to  0.000000
8/21/2012	11:30:40 AM	PH3 MFC set to  0.000000
8/21/2012	11:30:40 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:30:40 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:30:40 AM	Tube furnace set to 150
8/21/2012	11:30:40 AM	Helium valve closed
8/21/2012	11:30:40 AM	H2 valve closed
8/21/2012	11:30:40 AM	BCl3 valve closed
8/21/2012	11:30:40 AM	PH3 valve closed
8/21/2012	11:30:40 AM	SiCl4 pre valve closed
8/21/2012	11:30:40 AM	SiCl4 post valve closed
8/21/2012	11:30:40 AM	Main Vac valve closed
8/21/2012	11:30:40 AM	Bubbler valve closed
8/21/2012	11:30:40 AM	Bypass valve opened
8/21/2012	11:30:40 AM	Helium MFC set to  0.000000
8/21/2012	11:30:40 AM	H2 MFC set to  0.000000
8/21/2012	11:30:40 AM	BCl3 MFC set to  0.000000
8/21/2012	11:30:40 AM	PH3 MFC set to  0.000000
8/21/2012	11:30:40 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:30:40 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:30:40 AM	Tube furnace set to 150
8/21/2012	11:30:44 AM	Helium valve closed
8/21/2012	11:30:44 AM	H2 valve closed
8/21/2012	11:30:44 AM	BCl3 valve closed
8/21/2012	11:30:44 AM	PH3 valve closed
8/21/2012	11:30:44 AM	SiCl4 pre valve closed
8/21/2012	11:30:44 AM	SiCl4 post valve closed
8/21/2012	11:30:44 AM	Bypass valve closed
8/21/2012	11:30:44 AM	Bubbler valve closed
8/21/2012	11:30:44 AM	Main Vac valve opened
8/21/2012	11:30:44 AM	Helium MFC set to  0.000000
8/21/2012	11:30:44 AM	H2 MFC set to  0.000000
8/21/2012	11:30:44 AM	BCl3 MFC set to  0.000000
8/21/2012	11:30:44 AM	PH3 MFC set to  0.000000
8/21/2012	11:30:44 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:30:44 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:30:44 AM	Tube furnace set to 150
8/21/2012	11:30:48 AM	H2 valve closed
8/21/2012	11:30:48 AM	BCl3 valve closed
8/21/2012	11:30:48 AM	PH3 valve closed
8/21/2012	11:30:48 AM	SiCl4 pre valve closed
8/21/2012	11:30:48 AM	SiCl4 post valve closed
8/21/2012	11:30:48 AM	Bypass valve closed
8/21/2012	11:30:48 AM	Bubbler valve closed
8/21/2012	11:30:48 AM	Helium valve opened
8/21/2012	11:30:48 AM	Main Vac valve opened
8/21/2012	11:30:48 AM	Helium MFC set to  20.000000
8/21/2012	11:30:48 AM	H2 MFC set to  0.000000
8/21/2012	11:30:48 AM	BCl3 MFC set to  0.000000
8/21/2012	11:30:48 AM	PH3 MFC set to  0.000000
8/21/2012	11:30:48 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:30:48 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:30:48 AM	Tube furnace set to 150
8/21/2012	11:31:18 AM	Helium valve closed
8/21/2012	11:31:18 AM	H2 valve closed
8/21/2012	11:31:18 AM	BCl3 valve closed
8/21/2012	11:31:18 AM	PH3 valve closed
8/21/2012	11:31:18 AM	SiCl4 pre valve closed
8/21/2012	11:31:18 AM	SiCl4 post valve closed
8/21/2012	11:31:18 AM	Bypass valve closed
8/21/2012	11:31:18 AM	Bubbler valve closed
8/21/2012	11:31:18 AM	Main Vac valve opened
8/21/2012	11:31:18 AM	Helium MFC set to  0.000000
8/21/2012	11:31:18 AM	H2 MFC set to  0.000000
8/21/2012	11:31:18 AM	BCl3 MFC set to  0.000000
8/21/2012	11:31:18 AM	PH3 MFC set to  0.000000
8/21/2012	11:31:18 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:31:18 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:31:18 AM	Tube furnace set to 150
8/21/2012	11:31:48 AM	H2 valve closed
8/21/2012	11:31:48 AM	BCl3 valve closed
8/21/2012	11:31:48 AM	PH3 valve closed
8/21/2012	11:31:48 AM	SiCl4 pre valve closed
8/21/2012	11:31:48 AM	SiCl4 post valve closed
8/21/2012	11:31:48 AM	Bypass valve closed
8/21/2012	11:31:48 AM	Bubbler valve closed
8/21/2012	11:31:48 AM	Helium valve opened
8/21/2012	11:31:48 AM	Main Vac valve opened
8/21/2012	11:31:48 AM	Helium MFC set to  20.000000
8/21/2012	11:31:48 AM	H2 MFC set to  0.000000
8/21/2012	11:31:48 AM	BCl3 MFC set to  0.000000
8/21/2012	11:31:49 AM	PH3 MFC set to  0.000000
8/21/2012	11:31:49 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:31:49 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:31:49 AM	Tube furnace set to 150
8/21/2012	11:32:19 AM	Helium valve closed
8/21/2012	11:32:19 AM	H2 valve closed
8/21/2012	11:32:19 AM	BCl3 valve closed
8/21/2012	11:32:19 AM	PH3 valve closed
8/21/2012	11:32:19 AM	SiCl4 pre valve closed
8/21/2012	11:32:19 AM	SiCl4 post valve closed
8/21/2012	11:32:19 AM	Bypass valve closed
8/21/2012	11:32:19 AM	Bubbler valve closed
8/21/2012	11:32:19 AM	Main Vac valve opened
8/21/2012	11:32:19 AM	Helium MFC set to  0.000000
8/21/2012	11:32:19 AM	H2 MFC set to  0.000000
8/21/2012	11:32:19 AM	BCl3 MFC set to  0.000000
8/21/2012	11:32:19 AM	PH3 MFC set to  0.000000
8/21/2012	11:32:19 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:32:19 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:32:19 AM	Tube furnace set to 150
8/21/2012	11:32:49 AM	H2 valve closed
8/21/2012	11:32:49 AM	BCl3 valve closed
8/21/2012	11:32:49 AM	PH3 valve closed
8/21/2012	11:32:49 AM	SiCl4 pre valve closed
8/21/2012	11:32:49 AM	SiCl4 post valve closed
8/21/2012	11:32:49 AM	Bypass valve closed
8/21/2012	11:32:49 AM	Bubbler valve closed
8/21/2012	11:32:49 AM	Helium valve opened
8/21/2012	11:32:49 AM	Main Vac valve opened
8/21/2012	11:32:49 AM	Helium MFC set to  20.000000
8/21/2012	11:32:49 AM	H2 MFC set to  0.000000
8/21/2012	11:32:49 AM	BCl3 MFC set to  0.000000
8/21/2012	11:32:49 AM	PH3 MFC set to  0.000000
8/21/2012	11:32:49 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:32:49 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:32:49 AM	Tube furnace set to 150
8/21/2012	11:33:19 AM	Helium valve closed
8/21/2012	11:33:19 AM	H2 valve closed
8/21/2012	11:33:19 AM	BCl3 valve closed
8/21/2012	11:33:19 AM	PH3 valve closed
8/21/2012	11:33:19 AM	SiCl4 pre valve closed
8/21/2012	11:33:19 AM	SiCl4 post valve closed
8/21/2012	11:33:19 AM	Bypass valve closed
8/21/2012	11:33:19 AM	Bubbler valve closed
8/21/2012	11:33:19 AM	Main Vac valve opened
8/21/2012	11:33:19 AM	Helium MFC set to  0.000000
8/21/2012	11:33:19 AM	H2 MFC set to  0.000000
8/21/2012	11:33:19 AM	BCl3 MFC set to  0.000000
8/21/2012	11:33:19 AM	PH3 MFC set to  0.000000
8/21/2012	11:33:19 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:33:19 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:33:19 AM	Tube furnace set to 150
8/21/2012	11:33:49 AM	H2 valve closed
8/21/2012	11:33:49 AM	BCl3 valve closed
8/21/2012	11:33:49 AM	PH3 valve closed
8/21/2012	11:33:49 AM	SiCl4 pre valve closed
8/21/2012	11:33:49 AM	SiCl4 post valve closed
8/21/2012	11:33:49 AM	Bypass valve closed
8/21/2012	11:33:49 AM	Bubbler valve closed
8/21/2012	11:33:49 AM	Helium valve opened
8/21/2012	11:33:49 AM	Main Vac valve opened
8/21/2012	11:33:49 AM	Helium MFC set to  20.000000
8/21/2012	11:33:49 AM	H2 MFC set to  0.000000
8/21/2012	11:33:49 AM	BCl3 MFC set to  0.000000
8/21/2012	11:33:49 AM	PH3 MFC set to  0.000000
8/21/2012	11:33:49 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:33:49 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:33:50 AM	Tube furnace set to 150
8/21/2012	11:34:20 AM	Helium valve closed
8/21/2012	11:34:20 AM	H2 valve closed
8/21/2012	11:34:20 AM	BCl3 valve closed
8/21/2012	11:34:20 AM	PH3 valve closed
8/21/2012	11:34:20 AM	SiCl4 pre valve closed
8/21/2012	11:34:20 AM	SiCl4 post valve closed
8/21/2012	11:34:20 AM	Bypass valve closed
8/21/2012	11:34:20 AM	Bubbler valve closed
8/21/2012	11:34:20 AM	Main Vac valve opened
8/21/2012	11:34:20 AM	Helium MFC set to  0.000000
8/21/2012	11:34:20 AM	H2 MFC set to  0.000000
8/21/2012	11:34:20 AM	BCl3 MFC set to  0.000000
8/21/2012	11:34:20 AM	PH3 MFC set to  0.000000
8/21/2012	11:34:20 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:34:20 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:34:20 AM	Tube furnace set to 150
8/21/2012	11:34:50 AM	H2 valve closed
8/21/2012	11:34:50 AM	BCl3 valve closed
8/21/2012	11:34:50 AM	PH3 valve closed
8/21/2012	11:34:50 AM	SiCl4 pre valve closed
8/21/2012	11:34:50 AM	SiCl4 post valve closed
8/21/2012	11:34:50 AM	Bypass valve closed
8/21/2012	11:34:50 AM	Bubbler valve closed
8/21/2012	11:34:50 AM	Helium valve opened
8/21/2012	11:34:50 AM	Main Vac valve opened
8/21/2012	11:34:50 AM	Helium MFC set to  20.000000
8/21/2012	11:34:50 AM	H2 MFC set to  0.000000
8/21/2012	11:34:50 AM	BCl3 MFC set to  0.000000
8/21/2012	11:34:50 AM	PH3 MFC set to  0.000000
8/21/2012	11:34:50 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:34:50 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:34:50 AM	Tube furnace set to 150
8/21/2012	11:35:20 AM	Helium valve closed
8/21/2012	11:35:20 AM	H2 valve closed
8/21/2012	11:35:20 AM	BCl3 valve closed
8/21/2012	11:35:20 AM	PH3 valve closed
8/21/2012	11:35:20 AM	SiCl4 pre valve closed
8/21/2012	11:35:20 AM	SiCl4 post valve closed
8/21/2012	11:35:20 AM	Bypass valve closed
8/21/2012	11:35:20 AM	Bubbler valve closed
8/21/2012	11:35:20 AM	Main Vac valve opened
8/21/2012	11:35:20 AM	Helium MFC set to  0.000000
8/21/2012	11:35:20 AM	H2 MFC set to  0.000000
8/21/2012	11:35:20 AM	BCl3 MFC set to  0.000000
8/21/2012	11:35:20 AM	PH3 MFC set to  0.000000
8/21/2012	11:35:20 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:35:20 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:35:20 AM	Tube furnace set to 150
8/21/2012	11:35:50 AM	H2 valve closed
8/21/2012	11:35:50 AM	BCl3 valve closed
8/21/2012	11:35:50 AM	PH3 valve closed
8/21/2012	11:35:50 AM	SiCl4 pre valve closed
8/21/2012	11:35:50 AM	SiCl4 post valve closed
8/21/2012	11:35:50 AM	Bypass valve closed
8/21/2012	11:35:50 AM	Bubbler valve closed
8/21/2012	11:35:50 AM	Helium valve opened
8/21/2012	11:35:50 AM	Main Vac valve opened
8/21/2012	11:35:50 AM	Helium MFC set to  20.000000
8/21/2012	11:35:50 AM	H2 MFC set to  0.000000
8/21/2012	11:35:50 AM	BCl3 MFC set to  0.000000
8/21/2012	11:35:50 AM	PH3 MFC set to  0.000000
8/21/2012	11:35:50 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:35:50 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:35:51 AM	Tube furnace set to 150
8/21/2012	11:36:21 AM	Helium valve closed
8/21/2012	11:36:21 AM	H2 valve closed
8/21/2012	11:36:21 AM	BCl3 valve closed
8/21/2012	11:36:21 AM	PH3 valve closed
8/21/2012	11:36:21 AM	SiCl4 pre valve closed
8/21/2012	11:36:21 AM	SiCl4 post valve closed
8/21/2012	11:36:21 AM	Bypass valve closed
8/21/2012	11:36:21 AM	Bubbler valve closed
8/21/2012	11:36:21 AM	Main Vac valve opened
8/21/2012	11:36:21 AM	Helium MFC set to  0.000000
8/21/2012	11:36:21 AM	H2 MFC set to  0.000000
8/21/2012	11:36:21 AM	BCl3 MFC set to  0.000000
8/21/2012	11:36:21 AM	PH3 MFC set to  0.000000
8/21/2012	11:36:21 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:36:21 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:36:21 AM	Tube furnace set to 150
8/21/2012	11:36:51 AM	H2 valve closed
8/21/2012	11:36:51 AM	BCl3 valve closed
8/21/2012	11:36:51 AM	PH3 valve closed
8/21/2012	11:36:51 AM	SiCl4 pre valve closed
8/21/2012	11:36:51 AM	SiCl4 post valve closed
8/21/2012	11:36:51 AM	Bypass valve closed
8/21/2012	11:36:51 AM	Bubbler valve closed
8/21/2012	11:36:51 AM	Helium valve opened
8/21/2012	11:36:51 AM	Main Vac valve opened
8/21/2012	11:36:51 AM	Helium MFC set to  20.000000
8/21/2012	11:36:51 AM	H2 MFC set to  0.000000
8/21/2012	11:36:51 AM	BCl3 MFC set to  0.000000
8/21/2012	11:36:51 AM	PH3 MFC set to  0.000000
8/21/2012	11:36:51 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:36:51 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:36:51 AM	Tube furnace set to 150
8/21/2012	11:37:21 AM	Helium valve closed
8/21/2012	11:37:21 AM	H2 valve closed
8/21/2012	11:37:21 AM	BCl3 valve closed
8/21/2012	11:37:21 AM	PH3 valve closed
8/21/2012	11:37:21 AM	SiCl4 pre valve closed
8/21/2012	11:37:21 AM	SiCl4 post valve closed
8/21/2012	11:37:21 AM	Bypass valve closed
8/21/2012	11:37:21 AM	Bubbler valve closed
8/21/2012	11:37:21 AM	Main Vac valve opened
8/21/2012	11:37:21 AM	Helium MFC set to  0.000000
8/21/2012	11:37:21 AM	H2 MFC set to  0.000000
8/21/2012	11:37:21 AM	BCl3 MFC set to  0.000000
8/21/2012	11:37:21 AM	PH3 MFC set to  0.000000
8/21/2012	11:37:21 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:37:21 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:37:21 AM	Tube furnace set to 150
8/21/2012	11:37:51 AM	H2 valve closed
8/21/2012	11:37:51 AM	BCl3 valve closed
8/21/2012	11:37:51 AM	PH3 valve closed
8/21/2012	11:37:51 AM	SiCl4 pre valve closed
8/21/2012	11:37:51 AM	SiCl4 post valve closed
8/21/2012	11:37:51 AM	Bypass valve closed
8/21/2012	11:37:51 AM	Bubbler valve closed
8/21/2012	11:37:51 AM	Helium valve opened
8/21/2012	11:37:51 AM	Main Vac valve opened
8/21/2012	11:37:51 AM	Helium MFC set to  20.000000
8/21/2012	11:37:51 AM	H2 MFC set to  0.000000
8/21/2012	11:37:51 AM	BCl3 MFC set to  0.000000
8/21/2012	11:37:51 AM	PH3 MFC set to  0.000000
8/21/2012	11:37:51 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:37:51 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:37:51 AM	Tube furnace set to 150
8/21/2012	11:38:22 AM	Helium valve closed
8/21/2012	11:38:22 AM	H2 valve closed
8/21/2012	11:38:22 AM	BCl3 valve closed
8/21/2012	11:38:22 AM	PH3 valve closed
8/21/2012	11:38:22 AM	SiCl4 pre valve closed
8/21/2012	11:38:22 AM	SiCl4 post valve closed
8/21/2012	11:38:22 AM	Bypass valve closed
8/21/2012	11:38:22 AM	Bubbler valve closed
8/21/2012	11:38:22 AM	Main Vac valve opened
8/21/2012	11:38:22 AM	Helium MFC set to  0.000000
8/21/2012	11:38:22 AM	H2 MFC set to  0.000000
8/21/2012	11:38:22 AM	BCl3 MFC set to  0.000000
8/21/2012	11:38:22 AM	PH3 MFC set to  0.000000
8/21/2012	11:38:22 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:38:22 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:38:22 AM	Tube furnace set to 150
8/21/2012	11:38:52 AM	H2 valve closed
8/21/2012	11:38:52 AM	BCl3 valve closed
8/21/2012	11:38:52 AM	PH3 valve closed
8/21/2012	11:38:52 AM	SiCl4 pre valve closed
8/21/2012	11:38:52 AM	SiCl4 post valve closed
8/21/2012	11:38:52 AM	Bypass valve closed
8/21/2012	11:38:52 AM	Bubbler valve closed
8/21/2012	11:38:52 AM	Helium valve opened
8/21/2012	11:38:52 AM	Main Vac valve opened
8/21/2012	11:38:52 AM	Helium MFC set to  20.000000
8/21/2012	11:38:52 AM	H2 MFC set to  0.000000
8/21/2012	11:38:52 AM	BCl3 MFC set to  0.000000
8/21/2012	11:38:52 AM	PH3 MFC set to  0.000000
8/21/2012	11:38:52 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:38:52 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:38:52 AM	Tube furnace set to 150
8/21/2012	11:39:22 AM	Helium valve closed
8/21/2012	11:39:22 AM	H2 valve closed
8/21/2012	11:39:22 AM	BCl3 valve closed
8/21/2012	11:39:22 AM	PH3 valve closed
8/21/2012	11:39:22 AM	SiCl4 pre valve closed
8/21/2012	11:39:22 AM	SiCl4 post valve closed
8/21/2012	11:39:22 AM	Bypass valve closed
8/21/2012	11:39:22 AM	Bubbler valve closed
8/21/2012	11:39:22 AM	Main Vac valve opened
8/21/2012	11:39:22 AM	Helium MFC set to  0.000000
8/21/2012	11:39:22 AM	H2 MFC set to  0.000000
8/21/2012	11:39:22 AM	BCl3 MFC set to  0.000000
8/21/2012	11:39:22 AM	PH3 MFC set to  0.000000
8/21/2012	11:39:22 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:39:22 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:39:22 AM	Tube furnace set to 150
8/21/2012	11:39:52 AM	H2 valve closed
8/21/2012	11:39:52 AM	BCl3 valve closed
8/21/2012	11:39:52 AM	PH3 valve closed
8/21/2012	11:39:52 AM	SiCl4 pre valve closed
8/21/2012	11:39:52 AM	SiCl4 post valve closed
8/21/2012	11:39:52 AM	Bypass valve closed
8/21/2012	11:39:52 AM	Bubbler valve closed
8/21/2012	11:39:52 AM	Helium valve opened
8/21/2012	11:39:52 AM	Main Vac valve opened
8/21/2012	11:39:52 AM	Helium MFC set to  20.000000
8/21/2012	11:39:52 AM	H2 MFC set to  0.000000
8/21/2012	11:39:52 AM	BCl3 MFC set to  0.000000
8/21/2012	11:39:52 AM	PH3 MFC set to  0.000000
8/21/2012	11:39:52 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:39:52 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:39:52 AM	Tube furnace set to 150
8/21/2012	11:40:22 AM	Helium valve closed
8/21/2012	11:40:22 AM	H2 valve closed
8/21/2012	11:40:22 AM	BCl3 valve closed
8/21/2012	11:40:22 AM	PH3 valve closed
8/21/2012	11:40:22 AM	SiCl4 pre valve closed
8/21/2012	11:40:22 AM	SiCl4 post valve closed
8/21/2012	11:40:22 AM	Bypass valve closed
8/21/2012	11:40:22 AM	Bubbler valve closed
8/21/2012	11:40:23 AM	Main Vac valve opened
8/21/2012	11:40:23 AM	Helium MFC set to  0.000000
8/21/2012	11:40:23 AM	H2 MFC set to  0.000000
8/21/2012	11:40:23 AM	BCl3 MFC set to  0.000000
8/21/2012	11:40:23 AM	PH3 MFC set to  0.000000
8/21/2012	11:40:23 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:40:23 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:40:23 AM	Tube furnace set to 150
8/21/2012	11:40:24 AM	Run finished at 11:40 AM
8/21/2012	11:52:17 AM	Main Vac valve closed
8/21/2012	11:52:32 AM	Main Vac valve opened
8/21/2012	11:53:00 AM	Recipe started at 11:52 AM
8/21/2012	11:53:00 AM	Helium valve closed
8/21/2012	11:53:00 AM	H2 valve closed
8/21/2012	11:53:00 AM	BCl3 valve closed
8/21/2012	11:53:00 AM	PH3 valve closed
8/21/2012	11:53:00 AM	SiCl4 pre valve closed
8/21/2012	11:53:00 AM	SiCl4 post valve closed
8/21/2012	11:53:00 AM	Main Vac valve closed
8/21/2012	11:53:00 AM	Bubbler valve closed
8/21/2012	11:53:00 AM	Bypass valve opened
8/21/2012	11:53:00 AM	Helium MFC set to  0.000000
8/21/2012	11:53:00 AM	H2 MFC set to  0.000000
8/21/2012	11:53:00 AM	BCl3 MFC set to  0.000000
8/21/2012	11:53:00 AM	PH3 MFC set to  0.000000
8/21/2012	11:53:00 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:53:00 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:53:00 AM	Tube furnace set to 150
8/21/2012	11:53:01 AM	Helium valve closed
8/21/2012	11:53:01 AM	H2 valve closed
8/21/2012	11:53:01 AM	BCl3 valve closed
8/21/2012	11:53:01 AM	PH3 valve closed
8/21/2012	11:53:01 AM	SiCl4 pre valve closed
8/21/2012	11:53:01 AM	SiCl4 post valve closed
8/21/2012	11:53:01 AM	Main Vac valve closed
8/21/2012	11:53:01 AM	Bubbler valve closed
8/21/2012	11:53:01 AM	Bypass valve opened
8/21/2012	11:53:01 AM	Helium MFC set to  0.000000
8/21/2012	11:53:01 AM	H2 MFC set to  0.000000
8/21/2012	11:53:01 AM	BCl3 MFC set to  0.000000
8/21/2012	11:53:01 AM	PH3 MFC set to  0.000000
8/21/2012	11:53:01 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:53:01 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:53:01 AM	Tube furnace set to 150
8/21/2012	11:53:02 AM	Helium valve closed
8/21/2012	11:53:02 AM	H2 valve closed
8/21/2012	11:53:02 AM	BCl3 valve closed
8/21/2012	11:53:02 AM	PH3 valve closed
8/21/2012	11:53:02 AM	SiCl4 pre valve closed
8/21/2012	11:53:02 AM	SiCl4 post valve closed
8/21/2012	11:53:02 AM	Bypass valve closed
8/21/2012	11:53:02 AM	Bubbler valve closed
8/21/2012	11:53:02 AM	Main Vac valve opened
8/21/2012	11:53:02 AM	Helium MFC set to  0.000000
8/21/2012	11:53:02 AM	H2 MFC set to  0.000000
8/21/2012	11:53:02 AM	BCl3 MFC set to  0.000000
8/21/2012	11:53:02 AM	PH3 MFC set to  0.000000
8/21/2012	11:53:02 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:53:02 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:53:03 AM	Tube furnace set to 150
8/21/2012	11:53:04 AM	H2 valve closed
8/21/2012	11:53:04 AM	BCl3 valve closed
8/21/2012	11:53:04 AM	PH3 valve closed
8/21/2012	11:53:04 AM	SiCl4 pre valve closed
8/21/2012	11:53:04 AM	SiCl4 post valve closed
8/21/2012	11:53:04 AM	Bypass valve closed
8/21/2012	11:53:04 AM	Bubbler valve closed
8/21/2012	11:53:04 AM	Helium valve opened
8/21/2012	11:53:04 AM	Main Vac valve opened
8/21/2012	11:53:04 AM	Helium MFC set to  20.000000
8/21/2012	11:53:04 AM	H2 MFC set to  0.000000
8/21/2012	11:53:04 AM	BCl3 MFC set to  0.000000
8/21/2012	11:53:04 AM	PH3 MFC set to  0.000000
8/21/2012	11:53:04 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:53:04 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:53:04 AM	Tube furnace set to 150
8/21/2012	11:53:34 AM	Helium valve closed
8/21/2012	11:53:34 AM	H2 valve closed
8/21/2012	11:53:34 AM	BCl3 valve closed
8/21/2012	11:53:34 AM	PH3 valve closed
8/21/2012	11:53:34 AM	SiCl4 pre valve closed
8/21/2012	11:53:34 AM	SiCl4 post valve closed
8/21/2012	11:53:34 AM	Bypass valve closed
8/21/2012	11:53:34 AM	Bubbler valve closed
8/21/2012	11:53:34 AM	Main Vac valve opened
8/21/2012	11:53:34 AM	Helium MFC set to  0.000000
8/21/2012	11:53:34 AM	H2 MFC set to  0.000000
8/21/2012	11:53:34 AM	BCl3 MFC set to  0.000000
8/21/2012	11:53:34 AM	PH3 MFC set to  0.000000
8/21/2012	11:53:34 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:53:34 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:53:34 AM	Tube furnace set to 150
8/21/2012	11:54:04 AM	H2 valve closed
8/21/2012	11:54:04 AM	BCl3 valve closed
8/21/2012	11:54:04 AM	PH3 valve closed
8/21/2012	11:54:04 AM	SiCl4 pre valve closed
8/21/2012	11:54:04 AM	SiCl4 post valve closed
8/21/2012	11:54:04 AM	Bypass valve closed
8/21/2012	11:54:04 AM	Bubbler valve closed
8/21/2012	11:54:04 AM	Helium valve opened
8/21/2012	11:54:04 AM	Main Vac valve opened
8/21/2012	11:54:04 AM	Helium MFC set to  20.000000
8/21/2012	11:54:04 AM	H2 MFC set to  0.000000
8/21/2012	11:54:04 AM	BCl3 MFC set to  0.000000
8/21/2012	11:54:04 AM	PH3 MFC set to  0.000000
8/21/2012	11:54:04 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:54:04 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:54:04 AM	Tube furnace set to 150
8/21/2012	11:54:34 AM	Helium valve closed
8/21/2012	11:54:34 AM	H2 valve closed
8/21/2012	11:54:34 AM	BCl3 valve closed
8/21/2012	11:54:34 AM	PH3 valve closed
8/21/2012	11:54:34 AM	SiCl4 pre valve closed
8/21/2012	11:54:34 AM	SiCl4 post valve closed
8/21/2012	11:54:34 AM	Bypass valve closed
8/21/2012	11:54:34 AM	Bubbler valve closed
8/21/2012	11:54:34 AM	Main Vac valve opened
8/21/2012	11:54:34 AM	Helium MFC set to  0.000000
8/21/2012	11:54:34 AM	H2 MFC set to  0.000000
8/21/2012	11:54:34 AM	BCl3 MFC set to  0.000000
8/21/2012	11:54:34 AM	PH3 MFC set to  0.000000
8/21/2012	11:54:34 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:54:34 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:54:35 AM	Tube furnace set to 150
8/21/2012	11:55:05 AM	H2 valve closed
8/21/2012	11:55:05 AM	BCl3 valve closed
8/21/2012	11:55:05 AM	PH3 valve closed
8/21/2012	11:55:05 AM	SiCl4 pre valve closed
8/21/2012	11:55:05 AM	SiCl4 post valve closed
8/21/2012	11:55:05 AM	Bypass valve closed
8/21/2012	11:55:05 AM	Bubbler valve closed
8/21/2012	11:55:05 AM	Helium valve opened
8/21/2012	11:55:05 AM	Main Vac valve opened
8/21/2012	11:55:05 AM	Helium MFC set to  20.000000
8/21/2012	11:55:05 AM	H2 MFC set to  0.000000
8/21/2012	11:55:05 AM	BCl3 MFC set to  0.000000
8/21/2012	11:55:05 AM	PH3 MFC set to  0.000000
8/21/2012	11:55:05 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:55:05 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:55:05 AM	Tube furnace set to 150
8/21/2012	11:55:35 AM	Helium valve closed
8/21/2012	11:55:35 AM	H2 valve closed
8/21/2012	11:55:35 AM	BCl3 valve closed
8/21/2012	11:55:35 AM	PH3 valve closed
8/21/2012	11:55:35 AM	SiCl4 pre valve closed
8/21/2012	11:55:35 AM	SiCl4 post valve closed
8/21/2012	11:55:35 AM	Bypass valve closed
8/21/2012	11:55:35 AM	Bubbler valve closed
8/21/2012	11:55:35 AM	Main Vac valve opened
8/21/2012	11:55:35 AM	Helium MFC set to  0.000000
8/21/2012	11:55:35 AM	H2 MFC set to  0.000000
8/21/2012	11:55:35 AM	BCl3 MFC set to  0.000000
8/21/2012	11:55:35 AM	PH3 MFC set to  0.000000
8/21/2012	11:55:35 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:55:35 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:55:35 AM	Tube furnace set to 150
8/21/2012	11:56:05 AM	H2 valve closed
8/21/2012	11:56:05 AM	BCl3 valve closed
8/21/2012	11:56:05 AM	PH3 valve closed
8/21/2012	11:56:05 AM	SiCl4 pre valve closed
8/21/2012	11:56:05 AM	SiCl4 post valve closed
8/21/2012	11:56:05 AM	Bypass valve closed
8/21/2012	11:56:05 AM	Bubbler valve closed
8/21/2012	11:56:05 AM	Helium valve opened
8/21/2012	11:56:05 AM	Main Vac valve opened
8/21/2012	11:56:05 AM	Helium MFC set to  20.000000
8/21/2012	11:56:05 AM	H2 MFC set to  0.000000
8/21/2012	11:56:05 AM	BCl3 MFC set to  0.000000
8/21/2012	11:56:05 AM	PH3 MFC set to  0.000000
8/21/2012	11:56:05 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:56:05 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:56:05 AM	Tube furnace set to 150
8/21/2012	11:56:35 AM	Helium valve closed
8/21/2012	11:56:35 AM	H2 valve closed
8/21/2012	11:56:35 AM	BCl3 valve closed
8/21/2012	11:56:35 AM	PH3 valve closed
8/21/2012	11:56:35 AM	SiCl4 pre valve closed
8/21/2012	11:56:35 AM	SiCl4 post valve closed
8/21/2012	11:56:35 AM	Bypass valve closed
8/21/2012	11:56:35 AM	Bubbler valve closed
8/21/2012	11:56:35 AM	Main Vac valve opened
8/21/2012	11:56:35 AM	Helium MFC set to  0.000000
8/21/2012	11:56:35 AM	H2 MFC set to  0.000000
8/21/2012	11:56:35 AM	BCl3 MFC set to  0.000000
8/21/2012	11:56:35 AM	PH3 MFC set to  0.000000
8/21/2012	11:56:35 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:56:35 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:56:35 AM	Tube furnace set to 150
8/21/2012	11:57:06 AM	H2 valve closed
8/21/2012	11:57:06 AM	BCl3 valve closed
8/21/2012	11:57:06 AM	PH3 valve closed
8/21/2012	11:57:06 AM	SiCl4 pre valve closed
8/21/2012	11:57:06 AM	SiCl4 post valve closed
8/21/2012	11:57:06 AM	Bypass valve closed
8/21/2012	11:57:06 AM	Bubbler valve closed
8/21/2012	11:57:06 AM	Helium valve opened
8/21/2012	11:57:06 AM	Main Vac valve opened
8/21/2012	11:57:06 AM	Helium MFC set to  20.000000
8/21/2012	11:57:06 AM	H2 MFC set to  0.000000
8/21/2012	11:57:06 AM	BCl3 MFC set to  0.000000
8/21/2012	11:57:06 AM	PH3 MFC set to  0.000000
8/21/2012	11:57:06 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:57:06 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:57:06 AM	Tube furnace set to 150
8/21/2012	11:57:36 AM	Helium valve closed
8/21/2012	11:57:36 AM	H2 valve closed
8/21/2012	11:57:36 AM	BCl3 valve closed
8/21/2012	11:57:36 AM	PH3 valve closed
8/21/2012	11:57:36 AM	SiCl4 pre valve closed
8/21/2012	11:57:36 AM	SiCl4 post valve closed
8/21/2012	11:57:36 AM	Bypass valve closed
8/21/2012	11:57:36 AM	Bubbler valve closed
8/21/2012	11:57:36 AM	Main Vac valve opened
8/21/2012	11:57:36 AM	Helium MFC set to  0.000000
8/21/2012	11:57:36 AM	H2 MFC set to  0.000000
8/21/2012	11:57:36 AM	BCl3 MFC set to  0.000000
8/21/2012	11:57:36 AM	PH3 MFC set to  0.000000
8/21/2012	11:57:36 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:57:36 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:57:36 AM	Tube furnace set to 150
8/21/2012	11:58:06 AM	H2 valve closed
8/21/2012	11:58:06 AM	BCl3 valve closed
8/21/2012	11:58:06 AM	PH3 valve closed
8/21/2012	11:58:06 AM	SiCl4 pre valve closed
8/21/2012	11:58:06 AM	SiCl4 post valve closed
8/21/2012	11:58:06 AM	Bypass valve closed
8/21/2012	11:58:06 AM	Bubbler valve closed
8/21/2012	11:58:06 AM	Helium valve opened
8/21/2012	11:58:06 AM	Main Vac valve opened
8/21/2012	11:58:06 AM	Helium MFC set to  20.000000
8/21/2012	11:58:06 AM	H2 MFC set to  0.000000
8/21/2012	11:58:06 AM	BCl3 MFC set to  0.000000
8/21/2012	11:58:06 AM	PH3 MFC set to  0.000000
8/21/2012	11:58:06 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:58:06 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:58:06 AM	Tube furnace set to 150
8/21/2012	11:58:36 AM	Helium valve closed
8/21/2012	11:58:36 AM	H2 valve closed
8/21/2012	11:58:36 AM	BCl3 valve closed
8/21/2012	11:58:36 AM	PH3 valve closed
8/21/2012	11:58:36 AM	SiCl4 pre valve closed
8/21/2012	11:58:36 AM	SiCl4 post valve closed
8/21/2012	11:58:36 AM	Bypass valve closed
8/21/2012	11:58:36 AM	Bubbler valve closed
8/21/2012	11:58:36 AM	Main Vac valve opened
8/21/2012	11:58:36 AM	Helium MFC set to  0.000000
8/21/2012	11:58:36 AM	H2 MFC set to  0.000000
8/21/2012	11:58:36 AM	BCl3 MFC set to  0.000000
8/21/2012	11:58:36 AM	PH3 MFC set to  0.000000
8/21/2012	11:58:36 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:58:36 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:58:36 AM	Tube furnace set to 150
8/21/2012	11:59:06 AM	H2 valve closed
8/21/2012	11:59:06 AM	BCl3 valve closed
8/21/2012	11:59:06 AM	PH3 valve closed
8/21/2012	11:59:06 AM	SiCl4 pre valve closed
8/21/2012	11:59:06 AM	SiCl4 post valve closed
8/21/2012	11:59:06 AM	Bypass valve closed
8/21/2012	11:59:06 AM	Bubbler valve closed
8/21/2012	11:59:06 AM	Helium valve opened
8/21/2012	11:59:06 AM	Main Vac valve opened
8/21/2012	11:59:06 AM	Helium MFC set to  20.000000
8/21/2012	11:59:06 AM	H2 MFC set to  0.000000
8/21/2012	11:59:07 AM	BCl3 MFC set to  0.000000
8/21/2012	11:59:07 AM	PH3 MFC set to  0.000000
8/21/2012	11:59:07 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:59:07 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:59:07 AM	Tube furnace set to 150
8/21/2012	11:59:37 AM	Helium valve closed
8/21/2012	11:59:37 AM	H2 valve closed
8/21/2012	11:59:37 AM	BCl3 valve closed
8/21/2012	11:59:37 AM	PH3 valve closed
8/21/2012	11:59:37 AM	SiCl4 pre valve closed
8/21/2012	11:59:37 AM	SiCl4 post valve closed
8/21/2012	11:59:37 AM	Bypass valve closed
8/21/2012	11:59:37 AM	Bubbler valve closed
8/21/2012	11:59:37 AM	Main Vac valve opened
8/21/2012	11:59:37 AM	Helium MFC set to  0.000000
8/21/2012	11:59:37 AM	H2 MFC set to  0.000000
8/21/2012	11:59:37 AM	BCl3 MFC set to  0.000000
8/21/2012	11:59:37 AM	PH3 MFC set to  0.000000
8/21/2012	11:59:37 AM	SiCl4 MFC set to  0.000000
8/21/2012	11:59:37 AM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:59:37 AM	Tube furnace set to 150
8/21/2012	12:00:07 PM	H2 valve closed
8/21/2012	12:00:07 PM	BCl3 valve closed
8/21/2012	12:00:07 PM	PH3 valve closed
8/21/2012	12:00:07 PM	SiCl4 pre valve closed
8/21/2012	12:00:07 PM	SiCl4 post valve closed
8/21/2012	12:00:07 PM	Bypass valve closed
8/21/2012	12:00:07 PM	Bubbler valve closed
8/21/2012	12:00:07 PM	Helium valve opened
8/21/2012	12:00:07 PM	Main Vac valve opened
8/21/2012	12:00:07 PM	Helium MFC set to  20.000000
8/21/2012	12:00:07 PM	H2 MFC set to  0.000000
8/21/2012	12:00:07 PM	BCl3 MFC set to  0.000000
8/21/2012	12:00:07 PM	PH3 MFC set to  0.000000
8/21/2012	12:00:07 PM	SiCl4 MFC set to  0.000000
8/21/2012	12:00:07 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:00:07 PM	Tube furnace set to 150
8/21/2012	12:00:37 PM	Helium valve closed
8/21/2012	12:00:37 PM	H2 valve closed
8/21/2012	12:00:37 PM	BCl3 valve closed
8/21/2012	12:00:37 PM	PH3 valve closed
8/21/2012	12:00:37 PM	SiCl4 pre valve closed
8/21/2012	12:00:37 PM	SiCl4 post valve closed
8/21/2012	12:00:37 PM	Bypass valve closed
8/21/2012	12:00:37 PM	Bubbler valve closed
8/21/2012	12:00:37 PM	Main Vac valve opened
8/21/2012	12:00:37 PM	Helium MFC set to  0.000000
8/21/2012	12:00:37 PM	H2 MFC set to  0.000000
8/21/2012	12:00:37 PM	BCl3 MFC set to  0.000000
8/21/2012	12:00:37 PM	PH3 MFC set to  0.000000
8/21/2012	12:00:37 PM	SiCl4 MFC set to  0.000000
8/21/2012	12:00:37 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:00:37 PM	Tube furnace set to 150
8/21/2012	12:01:07 PM	H2 valve closed
8/21/2012	12:01:07 PM	BCl3 valve closed
8/21/2012	12:01:07 PM	PH3 valve closed
8/21/2012	12:01:07 PM	SiCl4 pre valve closed
8/21/2012	12:01:07 PM	SiCl4 post valve closed
8/21/2012	12:01:07 PM	Bypass valve closed
8/21/2012	12:01:07 PM	Bubbler valve closed
8/21/2012	12:01:07 PM	Helium valve opened
8/21/2012	12:01:07 PM	Main Vac valve opened
8/21/2012	12:01:07 PM	Helium MFC set to  20.000000
8/21/2012	12:01:07 PM	H2 MFC set to  0.000000
8/21/2012	12:01:07 PM	BCl3 MFC set to  0.000000
8/21/2012	12:01:07 PM	PH3 MFC set to  0.000000
8/21/2012	12:01:07 PM	SiCl4 MFC set to  0.000000
8/21/2012	12:01:07 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:01:08 PM	Tube furnace set to 150
8/21/2012	12:01:38 PM	Helium valve closed
8/21/2012	12:01:38 PM	H2 valve closed
8/21/2012	12:01:38 PM	BCl3 valve closed
8/21/2012	12:01:38 PM	PH3 valve closed
8/21/2012	12:01:38 PM	SiCl4 pre valve closed
8/21/2012	12:01:38 PM	SiCl4 post valve closed
8/21/2012	12:01:38 PM	Bypass valve closed
8/21/2012	12:01:38 PM	Bubbler valve closed
8/21/2012	12:01:38 PM	Main Vac valve opened
8/21/2012	12:01:38 PM	Helium MFC set to  0.000000
8/21/2012	12:01:38 PM	H2 MFC set to  0.000000
8/21/2012	12:01:38 PM	BCl3 MFC set to  0.000000
8/21/2012	12:01:38 PM	PH3 MFC set to  0.000000
8/21/2012	12:01:38 PM	SiCl4 MFC set to  0.000000
8/21/2012	12:01:38 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:01:38 PM	Tube furnace set to 150
8/21/2012	12:02:08 PM	H2 valve closed
8/21/2012	12:02:08 PM	BCl3 valve closed
8/21/2012	12:02:08 PM	PH3 valve closed
8/21/2012	12:02:08 PM	SiCl4 pre valve closed
8/21/2012	12:02:08 PM	SiCl4 post valve closed
8/21/2012	12:02:08 PM	Bypass valve closed
8/21/2012	12:02:08 PM	Bubbler valve closed
8/21/2012	12:02:08 PM	Helium valve opened
8/21/2012	12:02:08 PM	Main Vac valve opened
8/21/2012	12:02:08 PM	Helium MFC set to  20.000000
8/21/2012	12:02:08 PM	H2 MFC set to  0.000000
8/21/2012	12:02:08 PM	BCl3 MFC set to  0.000000
8/21/2012	12:02:08 PM	PH3 MFC set to  0.000000
8/21/2012	12:02:08 PM	SiCl4 MFC set to  0.000000
8/21/2012	12:02:08 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:02:08 PM	Tube furnace set to 150
8/21/2012	12:02:38 PM	Helium valve closed
8/21/2012	12:02:38 PM	H2 valve closed
8/21/2012	12:02:38 PM	BCl3 valve closed
8/21/2012	12:02:38 PM	PH3 valve closed
8/21/2012	12:02:38 PM	SiCl4 pre valve closed
8/21/2012	12:02:38 PM	SiCl4 post valve closed
8/21/2012	12:02:38 PM	Bypass valve closed
8/21/2012	12:02:38 PM	Bubbler valve closed
8/21/2012	12:02:38 PM	Main Vac valve opened
8/21/2012	12:02:38 PM	Helium MFC set to  0.000000
8/21/2012	12:02:38 PM	H2 MFC set to  0.000000
8/21/2012	12:02:38 PM	BCl3 MFC set to  0.000000
8/21/2012	12:02:38 PM	PH3 MFC set to  0.000000
8/21/2012	12:02:38 PM	SiCl4 MFC set to  0.000000
8/21/2012	12:02:38 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:02:38 PM	Tube furnace set to 150
8/21/2012	12:02:39 PM	Run finished at 12:02 PM
8/21/2012	12:20:39 PM	Main Vac valve closed
8/21/2012	12:20:54 PM	Main Vac valve opened
8/21/2012	12:22:01 PM	Recipe started at 12:21 PM
8/21/2012	12:22:01 PM	Helium valve closed
8/21/2012	12:22:01 PM	H2 valve closed
8/21/2012	12:22:01 PM	BCl3 valve closed
8/21/2012	12:22:01 PM	PH3 valve closed
8/21/2012	12:22:01 PM	SiCl4 pre valve closed
8/21/2012	12:22:01 PM	SiCl4 post valve closed
8/21/2012	12:22:01 PM	Main Vac valve closed
8/21/2012	12:22:01 PM	Bypass valve closed
8/21/2012	12:22:01 PM	Bubbler valve closed
8/21/2012	12:22:01 PM	Helium MFC set to  0.000000
8/21/2012	12:22:01 PM	H2 MFC set to  0.000000
8/21/2012	12:22:01 PM	BCl3 MFC set to  0.000000
8/21/2012	12:22:01 PM	PH3 MFC set to  0.000000
8/21/2012	12:22:01 PM	SiCl4 MFC set to  0.000000
8/21/2012	12:22:01 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:22:02 PM	Tube furnace set to 0
8/21/2012	12:22:05 PM	Helium valve closed
8/21/2012	12:22:05 PM	BCl3 valve closed
8/21/2012	12:22:05 PM	PH3 valve closed
8/21/2012	12:22:05 PM	SiCl4 pre valve closed
8/21/2012	12:22:05 PM	SiCl4 post valve closed
8/21/2012	12:22:05 PM	Main Vac valve closed
8/21/2012	12:22:05 PM	Bypass valve closed
8/21/2012	12:22:05 PM	Bubbler valve closed
8/21/2012	12:22:05 PM	H2 valve opened
8/21/2012	12:22:05 PM	Helium MFC set to  0.000000
8/21/2012	12:22:05 PM	H2 MFC set to  500.000000
8/21/2012	12:22:05 PM	BCl3 MFC set to  0.000000
8/21/2012	12:22:05 PM	PH3 MFC set to  0.000000
8/21/2012	12:22:05 PM	SiCl4 MFC set to  0.000000
8/21/2012	12:22:05 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:22:05 PM	Tube furnace set to 50
8/21/2012	12:23:17 PM	Helium valve closed
8/21/2012	12:23:17 PM	BCl3 valve closed
8/21/2012	12:23:17 PM	PH3 valve closed
8/21/2012	12:23:17 PM	SiCl4 pre valve closed
8/21/2012	12:23:17 PM	SiCl4 post valve closed
8/21/2012	12:23:17 PM	Main Vac valve closed
8/21/2012	12:23:17 PM	Bypass valve closed
8/21/2012	12:23:17 PM	H2 valve opened
8/21/2012	12:23:17 PM	Bubbler valve opened
8/21/2012	12:23:17 PM	Helium MFC set to  0.000000
8/21/2012	12:23:17 PM	H2 MFC set to  500.000000
8/21/2012	12:23:17 PM	BCl3 MFC set to  0.000000
8/21/2012	12:23:17 PM	PH3 MFC set to  0.000000
8/21/2012	12:23:17 PM	SiCl4 MFC set to  0.000000
8/21/2012	12:23:17 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:23:17 PM	Tube furnace set to 50
8/21/2012	12:23:18 PM	Helium valve closed
8/21/2012	12:23:18 PM	BCl3 valve closed
8/21/2012	12:23:18 PM	PH3 valve closed
8/21/2012	12:23:18 PM	SiCl4 pre valve closed
8/21/2012	12:23:18 PM	SiCl4 post valve closed
8/21/2012	12:23:18 PM	Main Vac valve closed
8/21/2012	12:23:18 PM	Bypass valve closed
8/21/2012	12:23:18 PM	H2 valve opened
8/21/2012	12:23:18 PM	Bubbler valve opened
8/21/2012	12:23:18 PM	Helium MFC set to  0.000000
8/21/2012	12:23:18 PM	H2 MFC set to  450.000000
8/21/2012	12:23:18 PM	BCl3 MFC set to  0.000000
8/21/2012	12:23:18 PM	PH3 MFC set to  0.000000
8/21/2012	12:23:18 PM	SiCl4 MFC set to  0.000000
8/21/2012	12:23:18 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:23:19 PM	Tube furnace set to 1000
8/21/2012	12:43:19 PM	Helium valve closed
8/21/2012	12:43:19 PM	PH3 valve closed
8/21/2012	12:43:19 PM	Main Vac valve closed
8/21/2012	12:43:19 PM	Bypass valve closed
8/21/2012	12:43:19 PM	H2 valve opened
8/21/2012	12:43:19 PM	BCl3 valve opened
8/21/2012	12:43:19 PM	SiCl4 pre valve opened
8/21/2012	12:43:19 PM	SiCl4 post valve opened
8/21/2012	12:43:19 PM	Bubbler valve opened
8/21/2012	12:43:19 PM	Helium MFC set to  0.000000
8/21/2012	12:43:19 PM	H2 MFC set to  450.000000
8/21/2012	12:43:19 PM	BCl3 MFC set to  1.200000
8/21/2012	12:43:19 PM	PH3 MFC set to  0.000000
8/21/2012	12:43:19 PM	SiCl4 MFC set to  50.000000
8/21/2012	12:43:19 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:43:19 PM	Tube furnace set to 1000
8/21/2012	12:58:19 PM	Helium valve closed
8/21/2012	12:58:19 PM	BCl3 valve closed
8/21/2012	12:58:19 PM	PH3 valve closed
8/21/2012	12:58:19 PM	SiCl4 pre valve closed
8/21/2012	12:58:19 PM	SiCl4 post valve closed
8/21/2012	12:58:19 PM	Main Vac valve closed
8/21/2012	12:58:19 PM	Bypass valve closed
8/21/2012	12:58:19 PM	H2 valve opened
8/21/2012	12:58:19 PM	Bubbler valve opened
8/21/2012	12:58:19 PM	Helium MFC set to  0.000000
8/21/2012	12:58:19 PM	H2 MFC set to  500.000000
8/21/2012	12:58:19 PM	BCl3 MFC set to  0.000000
8/21/2012	12:58:19 PM	PH3 MFC set to  0.000000
8/21/2012	12:58:19 PM	SiCl4 MFC set to  0.000000
8/21/2012	12:58:19 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	12:58:19 PM	Tube furnace set to 750
8/21/2012	1:08:19 PM	H2 valve closed
8/21/2012	1:08:19 PM	BCl3 valve closed
8/21/2012	1:08:19 PM	PH3 valve closed
8/21/2012	1:08:19 PM	SiCl4 pre valve closed
8/21/2012	1:08:19 PM	SiCl4 post valve closed
8/21/2012	1:08:19 PM	Main Vac valve closed
8/21/2012	1:08:19 PM	Bypass valve closed
8/21/2012	1:08:19 PM	Helium valve opened
8/21/2012	1:08:19 PM	Bubbler valve opened
8/21/2012	1:08:19 PM	Helium MFC set to  400.000000
8/21/2012	1:08:19 PM	H2 MFC set to  0.000000
8/21/2012	1:08:19 PM	BCl3 MFC set to  0.000000
8/21/2012	1:08:19 PM	PH3 MFC set to  0.000000
8/21/2012	1:08:19 PM	SiCl4 MFC set to  0.000000
8/21/2012	1:08:19 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	1:08:19 PM	Tube furnace set to 0
8/21/2012	1:28:02 PM	Run aborted at 1:28 PM
8/21/2012	1:28:02 PM	Helium valve closed
8/21/2012	1:28:02 PM	H2 valve closed
8/21/2012	1:28:02 PM	BCl3 valve closed
8/21/2012	1:28:02 PM	PH3 valve closed
8/21/2012	1:28:02 PM	SiCl4 pre valve closed
8/21/2012	1:28:02 PM	SiCl4 post valve closed
8/21/2012	1:28:02 PM	Bypass valve closed
8/21/2012	1:28:02 PM	Main Vac valve closed
8/21/2012	1:28:02 PM	Bubbler valve closed
8/21/2012	1:28:02 PM	Helium MFC set to  0.000000
8/21/2012	1:28:02 PM	H2 MFC set to  0.000000
8/21/2012	1:28:02 PM	BCl3 MFC set to  0.000000
8/21/2012	1:28:02 PM	PH3 MFC set to  0.000000
8/21/2012	1:28:02 PM	SiCl4 MFC set to  0.000000
8/21/2012	1:28:02 PM	Tube furnace set to 0
8/21/2012	1:32:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	1:32:22 PM	Recipe started at 1:32 PM
8/21/2012	1:32:22 PM	Helium valve closed
8/21/2012	1:32:22 PM	H2 valve closed
8/21/2012	1:32:22 PM	BCl3 valve closed
8/21/2012	1:32:22 PM	PH3 valve closed
8/21/2012	1:32:22 PM	SiCl4 pre valve closed
8/21/2012	1:32:22 PM	SiCl4 post valve closed
8/21/2012	1:32:22 PM	Main Vac valve closed
8/21/2012	1:32:22 PM	Bubbler valve closed
8/21/2012	1:32:22 PM	Bypass valve opened
8/21/2012	1:32:22 PM	Helium MFC set to  0.000000
8/21/2012	1:32:22 PM	H2 MFC set to  0.000000
8/21/2012	1:32:22 PM	BCl3 MFC set to  0.000000
8/21/2012	1:32:22 PM	PH3 MFC set to  0.000000
8/21/2012	1:32:22 PM	SiCl4 MFC set to  0.000000
8/21/2012	1:32:22 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	1:32:22 PM	Tube furnace set to 0
8/21/2012	1:33:40 PM	Helium valve closed
8/21/2012	1:33:40 PM	H2 valve closed
8/21/2012	1:33:40 PM	BCl3 valve closed
8/21/2012	1:33:40 PM	PH3 valve closed
8/21/2012	1:33:40 PM	SiCl4 pre valve closed
8/21/2012	1:33:40 PM	SiCl4 post valve closed
8/21/2012	1:33:40 PM	Main Vac valve closed
8/21/2012	1:33:40 PM	Bubbler valve closed
8/21/2012	1:33:40 PM	Bypass valve opened
8/21/2012	1:33:40 PM	Helium MFC set to  0.000000
8/21/2012	1:33:40 PM	H2 MFC set to  0.000000
8/21/2012	1:33:40 PM	BCl3 MFC set to  0.000000
8/21/2012	1:33:40 PM	PH3 MFC set to  0.000000
8/21/2012	1:33:40 PM	SiCl4 MFC set to  0.000000
8/21/2012	1:33:40 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	1:33:40 PM	Tube furnace set to 0
8/21/2012	1:34:40 PM	Helium valve closed
8/21/2012	1:34:40 PM	H2 valve closed
8/21/2012	1:34:40 PM	BCl3 valve closed
8/21/2012	1:34:40 PM	PH3 valve closed
8/21/2012	1:34:40 PM	SiCl4 pre valve closed
8/21/2012	1:34:40 PM	SiCl4 post valve closed
8/21/2012	1:34:40 PM	Bypass valve closed
8/21/2012	1:34:40 PM	Bubbler valve closed
8/21/2012	1:34:40 PM	Main Vac valve opened
8/21/2012	1:34:40 PM	Helium MFC set to  0.000000
8/21/2012	1:34:40 PM	H2 MFC set to  0.000000
8/21/2012	1:34:40 PM	BCl3 MFC set to  0.000000
8/21/2012	1:34:40 PM	PH3 MFC set to  0.000000
8/21/2012	1:34:40 PM	SiCl4 MFC set to  0.000000
8/21/2012	1:34:40 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	1:34:40 PM	Tube furnace set to 0
8/21/2012	1:34:41 PM	Run finished at 1:34 PM
8/21/2012	1:34:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	2:00:30 PM	Recipe started at 2:00 PM
8/21/2012	2:00:30 PM	Helium valve closed
8/21/2012	2:00:30 PM	H2 valve closed
8/21/2012	2:00:30 PM	BCl3 valve closed
8/21/2012	2:00:30 PM	PH3 valve closed
8/21/2012	2:00:30 PM	SiCl4 pre valve closed
8/21/2012	2:00:30 PM	SiCl4 post valve closed
8/21/2012	2:00:30 PM	Main Vac valve closed
8/21/2012	2:00:30 PM	Bubbler valve closed
8/21/2012	2:00:30 PM	Bypass valve opened
8/21/2012	2:00:30 PM	Helium MFC set to  0.000000
8/21/2012	2:00:30 PM	H2 MFC set to  0.000000
8/21/2012	2:00:30 PM	BCl3 MFC set to  0.000000
8/21/2012	2:00:30 PM	PH3 MFC set to  0.000000
8/21/2012	2:00:30 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:00:30 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:00:30 PM	Tube furnace set to 150
8/21/2012	2:00:30 PM	Helium valve closed
8/21/2012	2:00:30 PM	H2 valve closed
8/21/2012	2:00:30 PM	BCl3 valve closed
8/21/2012	2:00:30 PM	PH3 valve closed
8/21/2012	2:00:30 PM	SiCl4 pre valve closed
8/21/2012	2:00:30 PM	SiCl4 post valve closed
8/21/2012	2:00:30 PM	Main Vac valve closed
8/21/2012	2:00:30 PM	Bubbler valve closed
8/21/2012	2:00:30 PM	Bypass valve opened
8/21/2012	2:00:30 PM	Helium MFC set to  0.000000
8/21/2012	2:00:30 PM	H2 MFC set to  0.000000
8/21/2012	2:00:30 PM	BCl3 MFC set to  0.000000
8/21/2012	2:00:30 PM	PH3 MFC set to  0.000000
8/21/2012	2:00:30 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:00:30 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:00:31 PM	Tube furnace set to 150
8/21/2012	2:00:33 PM	Helium valve closed
8/21/2012	2:00:33 PM	H2 valve closed
8/21/2012	2:00:33 PM	BCl3 valve closed
8/21/2012	2:00:33 PM	PH3 valve closed
8/21/2012	2:00:33 PM	SiCl4 pre valve closed
8/21/2012	2:00:33 PM	SiCl4 post valve closed
8/21/2012	2:00:33 PM	Bypass valve closed
8/21/2012	2:00:33 PM	Bubbler valve closed
8/21/2012	2:00:33 PM	Main Vac valve opened
8/21/2012	2:00:33 PM	Helium MFC set to  0.000000
8/21/2012	2:00:33 PM	H2 MFC set to  0.000000
8/21/2012	2:00:33 PM	BCl3 MFC set to  0.000000
8/21/2012	2:00:33 PM	PH3 MFC set to  0.000000
8/21/2012	2:00:33 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:00:33 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:00:33 PM	Tube furnace set to 150
8/21/2012	2:00:34 PM	H2 valve closed
8/21/2012	2:00:34 PM	BCl3 valve closed
8/21/2012	2:00:34 PM	PH3 valve closed
8/21/2012	2:00:34 PM	SiCl4 pre valve closed
8/21/2012	2:00:34 PM	SiCl4 post valve closed
8/21/2012	2:00:34 PM	Bypass valve closed
8/21/2012	2:00:34 PM	Bubbler valve closed
8/21/2012	2:00:34 PM	Helium valve opened
8/21/2012	2:00:34 PM	Main Vac valve opened
8/21/2012	2:00:34 PM	Helium MFC set to  20.000000
8/21/2012	2:00:34 PM	H2 MFC set to  0.000000
8/21/2012	2:00:34 PM	BCl3 MFC set to  0.000000
8/21/2012	2:00:34 PM	PH3 MFC set to  0.000000
8/21/2012	2:00:34 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:00:34 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:00:34 PM	Tube furnace set to 150
8/21/2012	2:01:04 PM	Helium valve closed
8/21/2012	2:01:04 PM	H2 valve closed
8/21/2012	2:01:04 PM	BCl3 valve closed
8/21/2012	2:01:04 PM	PH3 valve closed
8/21/2012	2:01:04 PM	SiCl4 pre valve closed
8/21/2012	2:01:04 PM	SiCl4 post valve closed
8/21/2012	2:01:04 PM	Bypass valve closed
8/21/2012	2:01:04 PM	Bubbler valve closed
8/21/2012	2:01:04 PM	Main Vac valve opened
8/21/2012	2:01:04 PM	Helium MFC set to  0.000000
8/21/2012	2:01:04 PM	H2 MFC set to  0.000000
8/21/2012	2:01:04 PM	BCl3 MFC set to  0.000000
8/21/2012	2:01:04 PM	PH3 MFC set to  0.000000
8/21/2012	2:01:04 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:01:04 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:01:04 PM	Tube furnace set to 150
8/21/2012	2:01:34 PM	H2 valve closed
8/21/2012	2:01:34 PM	BCl3 valve closed
8/21/2012	2:01:34 PM	PH3 valve closed
8/21/2012	2:01:34 PM	SiCl4 pre valve closed
8/21/2012	2:01:34 PM	SiCl4 post valve closed
8/21/2012	2:01:34 PM	Bypass valve closed
8/21/2012	2:01:34 PM	Bubbler valve closed
8/21/2012	2:01:34 PM	Helium valve opened
8/21/2012	2:01:34 PM	Main Vac valve opened
8/21/2012	2:01:34 PM	Helium MFC set to  20.000000
8/21/2012	2:01:34 PM	H2 MFC set to  0.000000
8/21/2012	2:01:34 PM	BCl3 MFC set to  0.000000
8/21/2012	2:01:34 PM	PH3 MFC set to  0.000000
8/21/2012	2:01:34 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:01:34 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:01:35 PM	Tube furnace set to 150
8/21/2012	2:02:05 PM	Helium valve closed
8/21/2012	2:02:05 PM	H2 valve closed
8/21/2012	2:02:05 PM	BCl3 valve closed
8/21/2012	2:02:05 PM	PH3 valve closed
8/21/2012	2:02:05 PM	SiCl4 pre valve closed
8/21/2012	2:02:05 PM	SiCl4 post valve closed
8/21/2012	2:02:05 PM	Bypass valve closed
8/21/2012	2:02:05 PM	Bubbler valve closed
8/21/2012	2:02:05 PM	Main Vac valve opened
8/21/2012	2:02:05 PM	Helium MFC set to  0.000000
8/21/2012	2:02:05 PM	H2 MFC set to  0.000000
8/21/2012	2:02:05 PM	BCl3 MFC set to  0.000000
8/21/2012	2:02:05 PM	PH3 MFC set to  0.000000
8/21/2012	2:02:05 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:02:05 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:02:05 PM	Tube furnace set to 150
8/21/2012	2:02:35 PM	H2 valve closed
8/21/2012	2:02:35 PM	BCl3 valve closed
8/21/2012	2:02:35 PM	PH3 valve closed
8/21/2012	2:02:35 PM	SiCl4 pre valve closed
8/21/2012	2:02:35 PM	SiCl4 post valve closed
8/21/2012	2:02:35 PM	Bypass valve closed
8/21/2012	2:02:35 PM	Bubbler valve closed
8/21/2012	2:02:35 PM	Helium valve opened
8/21/2012	2:02:35 PM	Main Vac valve opened
8/21/2012	2:02:35 PM	Helium MFC set to  20.000000
8/21/2012	2:02:35 PM	H2 MFC set to  0.000000
8/21/2012	2:02:35 PM	BCl3 MFC set to  0.000000
8/21/2012	2:02:35 PM	PH3 MFC set to  0.000000
8/21/2012	2:02:35 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:02:35 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:02:35 PM	Tube furnace set to 150
8/21/2012	2:03:05 PM	Helium valve closed
8/21/2012	2:03:05 PM	H2 valve closed
8/21/2012	2:03:05 PM	BCl3 valve closed
8/21/2012	2:03:05 PM	PH3 valve closed
8/21/2012	2:03:05 PM	SiCl4 pre valve closed
8/21/2012	2:03:05 PM	SiCl4 post valve closed
8/21/2012	2:03:05 PM	Bypass valve closed
8/21/2012	2:03:05 PM	Bubbler valve closed
8/21/2012	2:03:05 PM	Main Vac valve opened
8/21/2012	2:03:05 PM	Helium MFC set to  0.000000
8/21/2012	2:03:05 PM	H2 MFC set to  0.000000
8/21/2012	2:03:05 PM	BCl3 MFC set to  0.000000
8/21/2012	2:03:05 PM	PH3 MFC set to  0.000000
8/21/2012	2:03:05 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:03:05 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:03:05 PM	Tube furnace set to 150
8/21/2012	2:03:35 PM	H2 valve closed
8/21/2012	2:03:35 PM	BCl3 valve closed
8/21/2012	2:03:35 PM	PH3 valve closed
8/21/2012	2:03:35 PM	SiCl4 pre valve closed
8/21/2012	2:03:35 PM	SiCl4 post valve closed
8/21/2012	2:03:35 PM	Bypass valve closed
8/21/2012	2:03:35 PM	Bubbler valve closed
8/21/2012	2:03:35 PM	Helium valve opened
8/21/2012	2:03:35 PM	Main Vac valve opened
8/21/2012	2:03:35 PM	Helium MFC set to  20.000000
8/21/2012	2:03:35 PM	H2 MFC set to  0.000000
8/21/2012	2:03:35 PM	BCl3 MFC set to  0.000000
8/21/2012	2:03:35 PM	PH3 MFC set to  0.000000
8/21/2012	2:03:35 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:03:35 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:03:36 PM	Tube furnace set to 150
8/21/2012	2:04:06 PM	Helium valve closed
8/21/2012	2:04:06 PM	H2 valve closed
8/21/2012	2:04:06 PM	BCl3 valve closed
8/21/2012	2:04:06 PM	PH3 valve closed
8/21/2012	2:04:06 PM	SiCl4 pre valve closed
8/21/2012	2:04:06 PM	SiCl4 post valve closed
8/21/2012	2:04:06 PM	Bypass valve closed
8/21/2012	2:04:06 PM	Bubbler valve closed
8/21/2012	2:04:06 PM	Main Vac valve opened
8/21/2012	2:04:06 PM	Helium MFC set to  0.000000
8/21/2012	2:04:06 PM	H2 MFC set to  0.000000
8/21/2012	2:04:06 PM	BCl3 MFC set to  0.000000
8/21/2012	2:04:06 PM	PH3 MFC set to  0.000000
8/21/2012	2:04:06 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:04:06 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:04:06 PM	Tube furnace set to 150
8/21/2012	2:04:36 PM	H2 valve closed
8/21/2012	2:04:36 PM	BCl3 valve closed
8/21/2012	2:04:36 PM	PH3 valve closed
8/21/2012	2:04:36 PM	SiCl4 pre valve closed
8/21/2012	2:04:36 PM	SiCl4 post valve closed
8/21/2012	2:04:36 PM	Bypass valve closed
8/21/2012	2:04:36 PM	Bubbler valve closed
8/21/2012	2:04:36 PM	Helium valve opened
8/21/2012	2:04:36 PM	Main Vac valve opened
8/21/2012	2:04:36 PM	Helium MFC set to  20.000000
8/21/2012	2:04:36 PM	H2 MFC set to  0.000000
8/21/2012	2:04:36 PM	BCl3 MFC set to  0.000000
8/21/2012	2:04:36 PM	PH3 MFC set to  0.000000
8/21/2012	2:04:36 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:04:36 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:04:36 PM	Tube furnace set to 150
8/21/2012	2:05:06 PM	Helium valve closed
8/21/2012	2:05:06 PM	H2 valve closed
8/21/2012	2:05:06 PM	BCl3 valve closed
8/21/2012	2:05:06 PM	PH3 valve closed
8/21/2012	2:05:06 PM	SiCl4 pre valve closed
8/21/2012	2:05:06 PM	SiCl4 post valve closed
8/21/2012	2:05:06 PM	Bypass valve closed
8/21/2012	2:05:06 PM	Bubbler valve closed
8/21/2012	2:05:06 PM	Main Vac valve opened
8/21/2012	2:05:06 PM	Helium MFC set to  0.000000
8/21/2012	2:05:06 PM	H2 MFC set to  0.000000
8/21/2012	2:05:06 PM	BCl3 MFC set to  0.000000
8/21/2012	2:05:06 PM	PH3 MFC set to  0.000000
8/21/2012	2:05:06 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:05:06 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:05:06 PM	Tube furnace set to 150
8/21/2012	2:05:36 PM	H2 valve closed
8/21/2012	2:05:36 PM	BCl3 valve closed
8/21/2012	2:05:36 PM	PH3 valve closed
8/21/2012	2:05:36 PM	SiCl4 pre valve closed
8/21/2012	2:05:36 PM	SiCl4 post valve closed
8/21/2012	2:05:36 PM	Bypass valve closed
8/21/2012	2:05:36 PM	Bubbler valve closed
8/21/2012	2:05:36 PM	Helium valve opened
8/21/2012	2:05:36 PM	Main Vac valve opened
8/21/2012	2:05:36 PM	Helium MFC set to  20.000000
8/21/2012	2:05:36 PM	H2 MFC set to  0.000000
8/21/2012	2:05:36 PM	BCl3 MFC set to  0.000000
8/21/2012	2:05:36 PM	PH3 MFC set to  0.000000
8/21/2012	2:05:36 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:05:36 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:05:36 PM	Tube furnace set to 150
8/21/2012	2:06:06 PM	Helium valve closed
8/21/2012	2:06:07 PM	H2 valve closed
8/21/2012	2:06:07 PM	BCl3 valve closed
8/21/2012	2:06:07 PM	PH3 valve closed
8/21/2012	2:06:07 PM	SiCl4 pre valve closed
8/21/2012	2:06:07 PM	SiCl4 post valve closed
8/21/2012	2:06:07 PM	Bypass valve closed
8/21/2012	2:06:07 PM	Bubbler valve closed
8/21/2012	2:06:07 PM	Main Vac valve opened
8/21/2012	2:06:07 PM	Helium MFC set to  0.000000
8/21/2012	2:06:07 PM	H2 MFC set to  0.000000
8/21/2012	2:06:07 PM	BCl3 MFC set to  0.000000
8/21/2012	2:06:07 PM	PH3 MFC set to  0.000000
8/21/2012	2:06:07 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:06:07 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:06:07 PM	Tube furnace set to 150
8/21/2012	2:06:37 PM	H2 valve closed
8/21/2012	2:06:37 PM	BCl3 valve closed
8/21/2012	2:06:37 PM	PH3 valve closed
8/21/2012	2:06:37 PM	SiCl4 pre valve closed
8/21/2012	2:06:37 PM	SiCl4 post valve closed
8/21/2012	2:06:37 PM	Bypass valve closed
8/21/2012	2:06:37 PM	Bubbler valve closed
8/21/2012	2:06:37 PM	Helium valve opened
8/21/2012	2:06:37 PM	Main Vac valve opened
8/21/2012	2:06:37 PM	Helium MFC set to  20.000000
8/21/2012	2:06:37 PM	H2 MFC set to  0.000000
8/21/2012	2:06:37 PM	BCl3 MFC set to  0.000000
8/21/2012	2:06:37 PM	PH3 MFC set to  0.000000
8/21/2012	2:06:37 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:06:37 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:06:37 PM	Tube furnace set to 150
8/21/2012	2:07:07 PM	Helium valve closed
8/21/2012	2:07:07 PM	H2 valve closed
8/21/2012	2:07:07 PM	BCl3 valve closed
8/21/2012	2:07:07 PM	PH3 valve closed
8/21/2012	2:07:07 PM	SiCl4 pre valve closed
8/21/2012	2:07:07 PM	SiCl4 post valve closed
8/21/2012	2:07:07 PM	Bypass valve closed
8/21/2012	2:07:07 PM	Bubbler valve closed
8/21/2012	2:07:07 PM	Main Vac valve opened
8/21/2012	2:07:07 PM	Helium MFC set to  0.000000
8/21/2012	2:07:07 PM	H2 MFC set to  0.000000
8/21/2012	2:07:07 PM	BCl3 MFC set to  0.000000
8/21/2012	2:07:07 PM	PH3 MFC set to  0.000000
8/21/2012	2:07:07 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:07:07 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:07:07 PM	Tube furnace set to 150
8/21/2012	2:07:37 PM	H2 valve closed
8/21/2012	2:07:37 PM	BCl3 valve closed
8/21/2012	2:07:37 PM	PH3 valve closed
8/21/2012	2:07:37 PM	SiCl4 pre valve closed
8/21/2012	2:07:37 PM	SiCl4 post valve closed
8/21/2012	2:07:37 PM	Bypass valve closed
8/21/2012	2:07:37 PM	Bubbler valve closed
8/21/2012	2:07:37 PM	Helium valve opened
8/21/2012	2:07:37 PM	Main Vac valve opened
8/21/2012	2:07:37 PM	Helium MFC set to  20.000000
8/21/2012	2:07:37 PM	H2 MFC set to  0.000000
8/21/2012	2:07:37 PM	BCl3 MFC set to  0.000000
8/21/2012	2:07:37 PM	PH3 MFC set to  0.000000
8/21/2012	2:07:37 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:07:37 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:07:37 PM	Tube furnace set to 150
8/21/2012	2:08:07 PM	Helium valve closed
8/21/2012	2:08:07 PM	H2 valve closed
8/21/2012	2:08:07 PM	BCl3 valve closed
8/21/2012	2:08:07 PM	PH3 valve closed
8/21/2012	2:08:07 PM	SiCl4 pre valve closed
8/21/2012	2:08:07 PM	SiCl4 post valve closed
8/21/2012	2:08:07 PM	Bypass valve closed
8/21/2012	2:08:07 PM	Bubbler valve closed
8/21/2012	2:08:07 PM	Main Vac valve opened
8/21/2012	2:08:07 PM	Helium MFC set to  0.000000
8/21/2012	2:08:07 PM	H2 MFC set to  0.000000
8/21/2012	2:08:07 PM	BCl3 MFC set to  0.000000
8/21/2012	2:08:08 PM	PH3 MFC set to  0.000000
8/21/2012	2:08:08 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:08:08 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:08:08 PM	Tube furnace set to 150
8/21/2012	2:08:38 PM	H2 valve closed
8/21/2012	2:08:38 PM	BCl3 valve closed
8/21/2012	2:08:38 PM	PH3 valve closed
8/21/2012	2:08:38 PM	SiCl4 pre valve closed
8/21/2012	2:08:38 PM	SiCl4 post valve closed
8/21/2012	2:08:38 PM	Bypass valve closed
8/21/2012	2:08:38 PM	Bubbler valve closed
8/21/2012	2:08:38 PM	Helium valve opened
8/21/2012	2:08:38 PM	Main Vac valve opened
8/21/2012	2:08:38 PM	Helium MFC set to  20.000000
8/21/2012	2:08:38 PM	H2 MFC set to  0.000000
8/21/2012	2:08:38 PM	BCl3 MFC set to  0.000000
8/21/2012	2:08:38 PM	PH3 MFC set to  0.000000
8/21/2012	2:08:38 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:08:38 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:08:38 PM	Tube furnace set to 150
8/21/2012	2:09:08 PM	Helium valve closed
8/21/2012	2:09:08 PM	H2 valve closed
8/21/2012	2:09:08 PM	BCl3 valve closed
8/21/2012	2:09:08 PM	PH3 valve closed
8/21/2012	2:09:08 PM	SiCl4 pre valve closed
8/21/2012	2:09:08 PM	SiCl4 post valve closed
8/21/2012	2:09:08 PM	Bypass valve closed
8/21/2012	2:09:08 PM	Bubbler valve closed
8/21/2012	2:09:08 PM	Main Vac valve opened
8/21/2012	2:09:08 PM	Helium MFC set to  0.000000
8/21/2012	2:09:08 PM	H2 MFC set to  0.000000
8/21/2012	2:09:08 PM	BCl3 MFC set to  0.000000
8/21/2012	2:09:08 PM	PH3 MFC set to  0.000000
8/21/2012	2:09:08 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:09:08 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:09:08 PM	Tube furnace set to 150
8/21/2012	2:09:38 PM	H2 valve closed
8/21/2012	2:09:38 PM	BCl3 valve closed
8/21/2012	2:09:38 PM	PH3 valve closed
8/21/2012	2:09:38 PM	SiCl4 pre valve closed
8/21/2012	2:09:38 PM	SiCl4 post valve closed
8/21/2012	2:09:38 PM	Bypass valve closed
8/21/2012	2:09:38 PM	Bubbler valve closed
8/21/2012	2:09:38 PM	Helium valve opened
8/21/2012	2:09:38 PM	Main Vac valve opened
8/21/2012	2:09:38 PM	Helium MFC set to  20.000000
8/21/2012	2:09:38 PM	H2 MFC set to  0.000000
8/21/2012	2:09:38 PM	BCl3 MFC set to  0.000000
8/21/2012	2:09:38 PM	PH3 MFC set to  0.000000
8/21/2012	2:09:38 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:09:38 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:09:38 PM	Tube furnace set to 150
8/21/2012	2:10:08 PM	Helium valve closed
8/21/2012	2:10:08 PM	H2 valve closed
8/21/2012	2:10:08 PM	BCl3 valve closed
8/21/2012	2:10:08 PM	PH3 valve closed
8/21/2012	2:10:08 PM	SiCl4 pre valve closed
8/21/2012	2:10:08 PM	SiCl4 post valve closed
8/21/2012	2:10:08 PM	Bypass valve closed
8/21/2012	2:10:08 PM	Bubbler valve closed
8/21/2012	2:10:08 PM	Main Vac valve opened
8/21/2012	2:10:08 PM	Helium MFC set to  0.000000
8/21/2012	2:10:08 PM	H2 MFC set to  0.000000
8/21/2012	2:10:08 PM	BCl3 MFC set to  0.000000
8/21/2012	2:10:08 PM	PH3 MFC set to  0.000000
8/21/2012	2:10:08 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:10:08 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:10:09 PM	Tube furnace set to 150
8/21/2012	2:10:10 PM	Run finished at 2:10 PM
8/21/2012	2:12:32 PM	Main Vac valve closed
8/21/2012	2:12:44 PM	Main Vac valve opened
8/21/2012	2:13:51 PM	Recipe started at 2:13 PM
8/21/2012	2:13:51 PM	Helium valve closed
8/21/2012	2:13:51 PM	H2 valve closed
8/21/2012	2:13:51 PM	BCl3 valve closed
8/21/2012	2:13:51 PM	PH3 valve closed
8/21/2012	2:13:51 PM	SiCl4 pre valve closed
8/21/2012	2:13:51 PM	SiCl4 post valve closed
8/21/2012	2:13:51 PM	Main Vac valve closed
8/21/2012	2:13:51 PM	Bypass valve closed
8/21/2012	2:13:51 PM	Bubbler valve closed
8/21/2012	2:13:51 PM	Helium MFC set to  0.000000
8/21/2012	2:13:51 PM	H2 MFC set to  0.000000
8/21/2012	2:13:51 PM	BCl3 MFC set to  0.000000
8/21/2012	2:13:51 PM	PH3 MFC set to  0.000000
8/21/2012	2:13:51 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:13:51 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:13:51 PM	Tube furnace set to 0
8/21/2012	2:13:54 PM	Helium valve closed
8/21/2012	2:13:54 PM	BCl3 valve closed
8/21/2012	2:13:54 PM	PH3 valve closed
8/21/2012	2:13:54 PM	SiCl4 pre valve closed
8/21/2012	2:13:54 PM	SiCl4 post valve closed
8/21/2012	2:13:54 PM	Main Vac valve closed
8/21/2012	2:13:54 PM	Bypass valve closed
8/21/2012	2:13:54 PM	Bubbler valve closed
8/21/2012	2:13:54 PM	H2 valve opened
8/21/2012	2:13:54 PM	Helium MFC set to  0.000000
8/21/2012	2:13:54 PM	H2 MFC set to  500.000000
8/21/2012	2:13:54 PM	BCl3 MFC set to  0.000000
8/21/2012	2:13:54 PM	PH3 MFC set to  0.000000
8/21/2012	2:13:54 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:13:54 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:13:55 PM	Tube furnace set to 50
8/21/2012	2:15:06 PM	Helium valve closed
8/21/2012	2:15:06 PM	BCl3 valve closed
8/21/2012	2:15:06 PM	PH3 valve closed
8/21/2012	2:15:06 PM	SiCl4 pre valve closed
8/21/2012	2:15:06 PM	SiCl4 post valve closed
8/21/2012	2:15:06 PM	Main Vac valve closed
8/21/2012	2:15:06 PM	Bypass valve closed
8/21/2012	2:15:06 PM	H2 valve opened
8/21/2012	2:15:06 PM	Bubbler valve opened
8/21/2012	2:15:06 PM	Helium MFC set to  0.000000
8/21/2012	2:15:06 PM	H2 MFC set to  500.000000
8/21/2012	2:15:06 PM	BCl3 MFC set to  0.000000
8/21/2012	2:15:06 PM	PH3 MFC set to  0.000000
8/21/2012	2:15:06 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:15:06 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:15:06 PM	Tube furnace set to 50
8/21/2012	2:15:07 PM	Helium valve closed
8/21/2012	2:15:07 PM	BCl3 valve closed
8/21/2012	2:15:07 PM	PH3 valve closed
8/21/2012	2:15:07 PM	SiCl4 pre valve closed
8/21/2012	2:15:07 PM	SiCl4 post valve closed
8/21/2012	2:15:07 PM	Main Vac valve closed
8/21/2012	2:15:07 PM	Bypass valve closed
8/21/2012	2:15:07 PM	H2 valve opened
8/21/2012	2:15:07 PM	Bubbler valve opened
8/21/2012	2:15:07 PM	Helium MFC set to  0.000000
8/21/2012	2:15:07 PM	H2 MFC set to  450.000000
8/21/2012	2:15:07 PM	BCl3 MFC set to  0.000000
8/21/2012	2:15:07 PM	PH3 MFC set to  0.000000
8/21/2012	2:15:07 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:15:07 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:15:08 PM	Tube furnace set to 1000
8/21/2012	2:35:08 PM	Helium valve closed
8/21/2012	2:35:08 PM	PH3 valve closed
8/21/2012	2:35:08 PM	Main Vac valve closed
8/21/2012	2:35:08 PM	Bypass valve closed
8/21/2012	2:35:08 PM	H2 valve opened
8/21/2012	2:35:08 PM	BCl3 valve opened
8/21/2012	2:35:08 PM	SiCl4 pre valve opened
8/21/2012	2:35:08 PM	SiCl4 post valve opened
8/21/2012	2:35:08 PM	Bubbler valve opened
8/21/2012	2:35:08 PM	Helium MFC set to  0.000000
8/21/2012	2:35:08 PM	H2 MFC set to  450.000000
8/21/2012	2:35:08 PM	BCl3 MFC set to  1.200000
8/21/2012	2:35:08 PM	PH3 MFC set to  0.000000
8/21/2012	2:35:08 PM	SiCl4 MFC set to  50.000000
8/21/2012	2:35:08 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:35:08 PM	Tube furnace set to 1000
8/21/2012	2:50:08 PM	Helium valve closed
8/21/2012	2:50:08 PM	BCl3 valve closed
8/21/2012	2:50:08 PM	PH3 valve closed
8/21/2012	2:50:08 PM	SiCl4 pre valve closed
8/21/2012	2:50:08 PM	SiCl4 post valve closed
8/21/2012	2:50:08 PM	Main Vac valve closed
8/21/2012	2:50:08 PM	Bypass valve closed
8/21/2012	2:50:08 PM	H2 valve opened
8/21/2012	2:50:08 PM	Bubbler valve opened
8/21/2012	2:50:08 PM	Helium MFC set to  0.000000
8/21/2012	2:50:08 PM	H2 MFC set to  500.000000
8/21/2012	2:50:08 PM	BCl3 MFC set to  0.000000
8/21/2012	2:50:08 PM	PH3 MFC set to  0.000000
8/21/2012	2:50:08 PM	SiCl4 MFC set to  0.000000
8/21/2012	2:50:08 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	2:50:08 PM	Tube furnace set to 750
8/21/2012	3:00:08 PM	H2 valve closed
8/21/2012	3:00:08 PM	BCl3 valve closed
8/21/2012	3:00:08 PM	PH3 valve closed
8/21/2012	3:00:08 PM	SiCl4 pre valve closed
8/21/2012	3:00:08 PM	SiCl4 post valve closed
8/21/2012	3:00:08 PM	Main Vac valve closed
8/21/2012	3:00:08 PM	Bypass valve closed
8/21/2012	3:00:08 PM	Helium valve opened
8/21/2012	3:00:08 PM	Bubbler valve opened
8/21/2012	3:00:08 PM	Helium MFC set to  400.000000
8/21/2012	3:00:08 PM	H2 MFC set to  0.000000
8/21/2012	3:00:08 PM	BCl3 MFC set to  0.000000
8/21/2012	3:00:08 PM	PH3 MFC set to  0.000000
8/21/2012	3:00:08 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:00:08 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:00:08 PM	Tube furnace set to 0
8/21/2012	3:18:36 PM	Run aborted at 3:18 PM
8/21/2012	3:18:36 PM	Helium valve closed
8/21/2012	3:18:36 PM	H2 valve closed
8/21/2012	3:18:36 PM	BCl3 valve closed
8/21/2012	3:18:36 PM	PH3 valve closed
8/21/2012	3:18:36 PM	SiCl4 pre valve closed
8/21/2012	3:18:36 PM	SiCl4 post valve closed
8/21/2012	3:18:36 PM	Bypass valve closed
8/21/2012	3:18:36 PM	Main Vac valve closed
8/21/2012	3:18:36 PM	Bubbler valve closed
8/21/2012	3:18:36 PM	Helium MFC set to  0.000000
8/21/2012	3:18:36 PM	H2 MFC set to  0.000000
8/21/2012	3:18:36 PM	BCl3 MFC set to  0.000000
8/21/2012	3:18:36 PM	PH3 MFC set to  0.000000
8/21/2012	3:18:36 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:18:36 PM	Tube furnace set to 0
8/21/2012	3:18:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	3:18:46 PM	Recipe started at 3:18 PM
8/21/2012	3:18:46 PM	Helium valve closed
8/21/2012	3:18:46 PM	H2 valve closed
8/21/2012	3:18:46 PM	BCl3 valve closed
8/21/2012	3:18:46 PM	PH3 valve closed
8/21/2012	3:18:46 PM	SiCl4 pre valve closed
8/21/2012	3:18:46 PM	SiCl4 post valve closed
8/21/2012	3:18:46 PM	Main Vac valve closed
8/21/2012	3:18:46 PM	Bypass valve closed
8/21/2012	3:18:46 PM	Bubbler valve closed
8/21/2012	3:18:46 PM	Helium MFC set to  0.000000
8/21/2012	3:18:46 PM	H2 MFC set to  0.000000
8/21/2012	3:18:46 PM	BCl3 MFC set to  0.000000
8/21/2012	3:18:46 PM	PH3 MFC set to  0.000000
8/21/2012	3:18:46 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:18:46 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:18:46 PM	Tube furnace set to 0
8/21/2012	3:18:49 PM	H2 valve closed
8/21/2012	3:18:49 PM	BCl3 valve closed
8/21/2012	3:18:49 PM	PH3 valve closed
8/21/2012	3:18:49 PM	SiCl4 pre valve closed
8/21/2012	3:18:49 PM	SiCl4 post valve closed
8/21/2012	3:18:49 PM	Main Vac valve closed
8/21/2012	3:18:49 PM	Bypass valve closed
8/21/2012	3:18:49 PM	Bubbler valve closed
8/21/2012	3:18:49 PM	Helium valve opened
8/21/2012	3:18:49 PM	Helium MFC set to  500.000000
8/21/2012	3:18:49 PM	H2 MFC set to  0.000000
8/21/2012	3:18:49 PM	BCl3 MFC set to  0.000000
8/21/2012	3:18:49 PM	PH3 MFC set to  0.000000
8/21/2012	3:18:49 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:18:49 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:18:49 PM	Tube furnace set to 0
8/21/2012	3:18:50 PM	Helium valve closed
8/21/2012	3:18:50 PM	H2 valve closed
8/21/2012	3:18:50 PM	BCl3 valve closed
8/21/2012	3:18:50 PM	PH3 valve closed
8/21/2012	3:18:50 PM	SiCl4 pre valve closed
8/21/2012	3:18:50 PM	SiCl4 post valve closed
8/21/2012	3:18:50 PM	Main Vac valve closed
8/21/2012	3:18:50 PM	Bypass valve closed
8/21/2012	3:18:50 PM	Bubbler valve closed
8/21/2012	3:18:50 PM	Helium MFC set to  0.000000
8/21/2012	3:18:50 PM	H2 MFC set to  0.000000
8/21/2012	3:18:50 PM	BCl3 MFC set to  0.000000
8/21/2012	3:18:50 PM	PH3 MFC set to  0.000000
8/21/2012	3:18:50 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:18:50 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:18:50 PM	Tube furnace set to 0
8/21/2012	3:18:51 PM	Run finished at 3:18 PM
8/21/2012	3:18:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	3:25:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	3:25:55 PM	Recipe started at 3:25 PM
8/21/2012	3:25:55 PM	Helium valve closed
8/21/2012	3:25:55 PM	H2 valve closed
8/21/2012	3:25:55 PM	BCl3 valve closed
8/21/2012	3:25:55 PM	PH3 valve closed
8/21/2012	3:25:55 PM	SiCl4 pre valve closed
8/21/2012	3:25:55 PM	SiCl4 post valve closed
8/21/2012	3:25:55 PM	Main Vac valve closed
8/21/2012	3:25:55 PM	Bubbler valve closed
8/21/2012	3:25:55 PM	Bypass valve opened
8/21/2012	3:25:55 PM	Helium MFC set to  0.000000
8/21/2012	3:25:55 PM	H2 MFC set to  0.000000
8/21/2012	3:25:55 PM	BCl3 MFC set to  0.000000
8/21/2012	3:25:55 PM	PH3 MFC set to  0.000000
8/21/2012	3:25:55 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:25:55 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:25:55 PM	Tube furnace set to 0
8/21/2012	3:27:19 PM	Helium valve closed
8/21/2012	3:27:19 PM	H2 valve closed
8/21/2012	3:27:19 PM	BCl3 valve closed
8/21/2012	3:27:19 PM	PH3 valve closed
8/21/2012	3:27:19 PM	SiCl4 pre valve closed
8/21/2012	3:27:19 PM	SiCl4 post valve closed
8/21/2012	3:27:19 PM	Main Vac valve closed
8/21/2012	3:27:19 PM	Bubbler valve closed
8/21/2012	3:27:19 PM	Bypass valve opened
8/21/2012	3:27:19 PM	Helium MFC set to  0.000000
8/21/2012	3:27:19 PM	H2 MFC set to  0.000000
8/21/2012	3:27:19 PM	BCl3 MFC set to  0.000000
8/21/2012	3:27:19 PM	PH3 MFC set to  0.000000
8/21/2012	3:27:19 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:27:19 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:27:19 PM	Tube furnace set to 0
8/21/2012	3:28:19 PM	Helium valve closed
8/21/2012	3:28:19 PM	H2 valve closed
8/21/2012	3:28:19 PM	BCl3 valve closed
8/21/2012	3:28:19 PM	PH3 valve closed
8/21/2012	3:28:19 PM	SiCl4 pre valve closed
8/21/2012	3:28:19 PM	SiCl4 post valve closed
8/21/2012	3:28:19 PM	Bypass valve closed
8/21/2012	3:28:19 PM	Bubbler valve closed
8/21/2012	3:28:19 PM	Main Vac valve opened
8/21/2012	3:28:19 PM	Helium MFC set to  0.000000
8/21/2012	3:28:19 PM	H2 MFC set to  0.000000
8/21/2012	3:28:19 PM	BCl3 MFC set to  0.000000
8/21/2012	3:28:19 PM	PH3 MFC set to  0.000000
8/21/2012	3:28:19 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:28:19 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:28:19 PM	Tube furnace set to 0
8/21/2012	3:28:20 PM	Run finished at 3:28 PM
8/21/2012	3:28:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	3:51:49 PM	Recipe started at 3:51 PM
8/21/2012	3:51:49 PM	Helium valve closed
8/21/2012	3:51:49 PM	H2 valve closed
8/21/2012	3:51:49 PM	BCl3 valve closed
8/21/2012	3:51:49 PM	PH3 valve closed
8/21/2012	3:51:49 PM	SiCl4 pre valve closed
8/21/2012	3:51:49 PM	SiCl4 post valve closed
8/21/2012	3:51:49 PM	Main Vac valve closed
8/21/2012	3:51:49 PM	Bubbler valve closed
8/21/2012	3:51:49 PM	Bypass valve opened
8/21/2012	3:51:49 PM	Helium MFC set to  0.000000
8/21/2012	3:51:49 PM	H2 MFC set to  0.000000
8/21/2012	3:51:49 PM	BCl3 MFC set to  0.000000
8/21/2012	3:51:49 PM	PH3 MFC set to  0.000000
8/21/2012	3:51:49 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:51:49 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:51:49 PM	Tube furnace set to 150
8/21/2012	3:51:49 PM	Helium valve closed
8/21/2012	3:51:49 PM	H2 valve closed
8/21/2012	3:51:49 PM	BCl3 valve closed
8/21/2012	3:51:49 PM	PH3 valve closed
8/21/2012	3:51:49 PM	SiCl4 pre valve closed
8/21/2012	3:51:49 PM	SiCl4 post valve closed
8/21/2012	3:51:49 PM	Main Vac valve closed
8/21/2012	3:51:49 PM	Bubbler valve closed
8/21/2012	3:51:49 PM	Bypass valve opened
8/21/2012	3:51:49 PM	Helium MFC set to  0.000000
8/21/2012	3:51:49 PM	H2 MFC set to  0.000000
8/21/2012	3:51:49 PM	BCl3 MFC set to  0.000000
8/21/2012	3:51:49 PM	PH3 MFC set to  0.000000
8/21/2012	3:51:49 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:51:49 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:51:50 PM	Tube furnace set to 150
8/21/2012	3:51:50 PM	Helium valve closed
8/21/2012	3:51:50 PM	H2 valve closed
8/21/2012	3:51:50 PM	BCl3 valve closed
8/21/2012	3:51:50 PM	PH3 valve closed
8/21/2012	3:51:50 PM	SiCl4 pre valve closed
8/21/2012	3:51:50 PM	SiCl4 post valve closed
8/21/2012	3:51:50 PM	Bypass valve closed
8/21/2012	3:51:50 PM	Bubbler valve closed
8/21/2012	3:51:50 PM	Main Vac valve opened
8/21/2012	3:51:50 PM	Helium MFC set to  0.000000
8/21/2012	3:51:50 PM	H2 MFC set to  0.000000
8/21/2012	3:51:50 PM	BCl3 MFC set to  0.000000
8/21/2012	3:51:50 PM	PH3 MFC set to  0.000000
8/21/2012	3:51:50 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:51:50 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:51:50 PM	Tube furnace set to 150
8/21/2012	3:51:51 PM	H2 valve closed
8/21/2012	3:51:51 PM	BCl3 valve closed
8/21/2012	3:51:51 PM	PH3 valve closed
8/21/2012	3:51:51 PM	SiCl4 pre valve closed
8/21/2012	3:51:51 PM	SiCl4 post valve closed
8/21/2012	3:51:51 PM	Bypass valve closed
8/21/2012	3:51:51 PM	Bubbler valve closed
8/21/2012	3:51:51 PM	Helium valve opened
8/21/2012	3:51:51 PM	Main Vac valve opened
8/21/2012	3:51:51 PM	Helium MFC set to  20.000000
8/21/2012	3:51:51 PM	H2 MFC set to  0.000000
8/21/2012	3:51:51 PM	BCl3 MFC set to  0.000000
8/21/2012	3:51:51 PM	PH3 MFC set to  0.000000
8/21/2012	3:51:51 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:51:51 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:51:51 PM	Tube furnace set to 150
8/21/2012	3:52:22 PM	Helium valve closed
8/21/2012	3:52:22 PM	H2 valve closed
8/21/2012	3:52:22 PM	BCl3 valve closed
8/21/2012	3:52:22 PM	PH3 valve closed
8/21/2012	3:52:22 PM	SiCl4 pre valve closed
8/21/2012	3:52:22 PM	SiCl4 post valve closed
8/21/2012	3:52:22 PM	Bypass valve closed
8/21/2012	3:52:22 PM	Bubbler valve closed
8/21/2012	3:52:22 PM	Main Vac valve opened
8/21/2012	3:52:22 PM	Helium MFC set to  0.000000
8/21/2012	3:52:22 PM	H2 MFC set to  0.000000
8/21/2012	3:52:22 PM	BCl3 MFC set to  0.000000
8/21/2012	3:52:22 PM	PH3 MFC set to  0.000000
8/21/2012	3:52:22 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:52:22 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:52:22 PM	Tube furnace set to 150
8/21/2012	3:52:52 PM	H2 valve closed
8/21/2012	3:52:52 PM	BCl3 valve closed
8/21/2012	3:52:52 PM	PH3 valve closed
8/21/2012	3:52:52 PM	SiCl4 pre valve closed
8/21/2012	3:52:52 PM	SiCl4 post valve closed
8/21/2012	3:52:52 PM	Bypass valve closed
8/21/2012	3:52:52 PM	Bubbler valve closed
8/21/2012	3:52:52 PM	Helium valve opened
8/21/2012	3:52:52 PM	Main Vac valve opened
8/21/2012	3:52:52 PM	Helium MFC set to  20.000000
8/21/2012	3:52:52 PM	H2 MFC set to  0.000000
8/21/2012	3:52:52 PM	BCl3 MFC set to  0.000000
8/21/2012	3:52:52 PM	PH3 MFC set to  0.000000
8/21/2012	3:52:52 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:52:52 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:52:52 PM	Tube furnace set to 150
8/21/2012	3:53:22 PM	Helium valve closed
8/21/2012	3:53:22 PM	H2 valve closed
8/21/2012	3:53:22 PM	BCl3 valve closed
8/21/2012	3:53:22 PM	PH3 valve closed
8/21/2012	3:53:22 PM	SiCl4 pre valve closed
8/21/2012	3:53:22 PM	SiCl4 post valve closed
8/21/2012	3:53:22 PM	Bypass valve closed
8/21/2012	3:53:22 PM	Bubbler valve closed
8/21/2012	3:53:22 PM	Main Vac valve opened
8/21/2012	3:53:22 PM	Helium MFC set to  0.000000
8/21/2012	3:53:22 PM	H2 MFC set to  0.000000
8/21/2012	3:53:22 PM	BCl3 MFC set to  0.000000
8/21/2012	3:53:22 PM	PH3 MFC set to  0.000000
8/21/2012	3:53:22 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:53:22 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:53:22 PM	Tube furnace set to 150
8/21/2012	3:53:52 PM	H2 valve closed
8/21/2012	3:53:52 PM	BCl3 valve closed
8/21/2012	3:53:52 PM	PH3 valve closed
8/21/2012	3:53:52 PM	SiCl4 pre valve closed
8/21/2012	3:53:52 PM	SiCl4 post valve closed
8/21/2012	3:53:52 PM	Bypass valve closed
8/21/2012	3:53:52 PM	Bubbler valve closed
8/21/2012	3:53:52 PM	Helium valve opened
8/21/2012	3:53:52 PM	Main Vac valve opened
8/21/2012	3:53:52 PM	Helium MFC set to  20.000000
8/21/2012	3:53:52 PM	H2 MFC set to  0.000000
8/21/2012	3:53:52 PM	BCl3 MFC set to  0.000000
8/21/2012	3:53:52 PM	PH3 MFC set to  0.000000
8/21/2012	3:53:52 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:53:52 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:53:52 PM	Tube furnace set to 150
8/21/2012	3:54:22 PM	Helium valve closed
8/21/2012	3:54:22 PM	H2 valve closed
8/21/2012	3:54:22 PM	BCl3 valve closed
8/21/2012	3:54:22 PM	PH3 valve closed
8/21/2012	3:54:22 PM	SiCl4 pre valve closed
8/21/2012	3:54:22 PM	SiCl4 post valve closed
8/21/2012	3:54:22 PM	Bypass valve closed
8/21/2012	3:54:22 PM	Bubbler valve closed
8/21/2012	3:54:22 PM	Main Vac valve opened
8/21/2012	3:54:22 PM	Helium MFC set to  0.000000
8/21/2012	3:54:22 PM	H2 MFC set to  0.000000
8/21/2012	3:54:22 PM	BCl3 MFC set to  0.000000
8/21/2012	3:54:23 PM	PH3 MFC set to  0.000000
8/21/2012	3:54:23 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:54:23 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:54:23 PM	Tube furnace set to 150
8/21/2012	3:54:53 PM	H2 valve closed
8/21/2012	3:54:53 PM	BCl3 valve closed
8/21/2012	3:54:53 PM	PH3 valve closed
8/21/2012	3:54:53 PM	SiCl4 pre valve closed
8/21/2012	3:54:53 PM	SiCl4 post valve closed
8/21/2012	3:54:53 PM	Bypass valve closed
8/21/2012	3:54:53 PM	Bubbler valve closed
8/21/2012	3:54:53 PM	Helium valve opened
8/21/2012	3:54:53 PM	Main Vac valve opened
8/21/2012	3:54:53 PM	Helium MFC set to  20.000000
8/21/2012	3:54:53 PM	H2 MFC set to  0.000000
8/21/2012	3:54:53 PM	BCl3 MFC set to  0.000000
8/21/2012	3:54:53 PM	PH3 MFC set to  0.000000
8/21/2012	3:54:53 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:54:53 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:54:53 PM	Tube furnace set to 150
8/21/2012	3:55:23 PM	Helium valve closed
8/21/2012	3:55:23 PM	H2 valve closed
8/21/2012	3:55:23 PM	BCl3 valve closed
8/21/2012	3:55:23 PM	PH3 valve closed
8/21/2012	3:55:23 PM	SiCl4 pre valve closed
8/21/2012	3:55:23 PM	SiCl4 post valve closed
8/21/2012	3:55:23 PM	Bypass valve closed
8/21/2012	3:55:23 PM	Bubbler valve closed
8/21/2012	3:55:23 PM	Main Vac valve opened
8/21/2012	3:55:23 PM	Helium MFC set to  0.000000
8/21/2012	3:55:23 PM	H2 MFC set to  0.000000
8/21/2012	3:55:23 PM	BCl3 MFC set to  0.000000
8/21/2012	3:55:23 PM	PH3 MFC set to  0.000000
8/21/2012	3:55:23 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:55:23 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:55:23 PM	Tube furnace set to 150
8/21/2012	3:55:53 PM	H2 valve closed
8/21/2012	3:55:53 PM	BCl3 valve closed
8/21/2012	3:55:53 PM	PH3 valve closed
8/21/2012	3:55:53 PM	SiCl4 pre valve closed
8/21/2012	3:55:53 PM	SiCl4 post valve closed
8/21/2012	3:55:53 PM	Bypass valve closed
8/21/2012	3:55:53 PM	Bubbler valve closed
8/21/2012	3:55:53 PM	Helium valve opened
8/21/2012	3:55:53 PM	Main Vac valve opened
8/21/2012	3:55:53 PM	Helium MFC set to  20.000000
8/21/2012	3:55:53 PM	H2 MFC set to  0.000000
8/21/2012	3:55:53 PM	BCl3 MFC set to  0.000000
8/21/2012	3:55:53 PM	PH3 MFC set to  0.000000
8/21/2012	3:55:53 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:55:53 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:55:53 PM	Tube furnace set to 150
8/21/2012	3:56:23 PM	Helium valve closed
8/21/2012	3:56:23 PM	H2 valve closed
8/21/2012	3:56:23 PM	BCl3 valve closed
8/21/2012	3:56:23 PM	PH3 valve closed
8/21/2012	3:56:23 PM	SiCl4 pre valve closed
8/21/2012	3:56:23 PM	SiCl4 post valve closed
8/21/2012	3:56:23 PM	Bypass valve closed
8/21/2012	3:56:23 PM	Bubbler valve closed
8/21/2012	3:56:23 PM	Main Vac valve opened
8/21/2012	3:56:23 PM	Helium MFC set to  0.000000
8/21/2012	3:56:23 PM	H2 MFC set to  0.000000
8/21/2012	3:56:23 PM	BCl3 MFC set to  0.000000
8/21/2012	3:56:23 PM	PH3 MFC set to  0.000000
8/21/2012	3:56:23 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:56:23 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:56:24 PM	Tube furnace set to 150
8/21/2012	3:56:54 PM	H2 valve closed
8/21/2012	3:56:54 PM	BCl3 valve closed
8/21/2012	3:56:54 PM	PH3 valve closed
8/21/2012	3:56:54 PM	SiCl4 pre valve closed
8/21/2012	3:56:54 PM	SiCl4 post valve closed
8/21/2012	3:56:54 PM	Bypass valve closed
8/21/2012	3:56:54 PM	Bubbler valve closed
8/21/2012	3:56:54 PM	Helium valve opened
8/21/2012	3:56:54 PM	Main Vac valve opened
8/21/2012	3:56:54 PM	Helium MFC set to  20.000000
8/21/2012	3:56:54 PM	H2 MFC set to  0.000000
8/21/2012	3:56:54 PM	BCl3 MFC set to  0.000000
8/21/2012	3:56:54 PM	PH3 MFC set to  0.000000
8/21/2012	3:56:54 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:56:54 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:56:54 PM	Tube furnace set to 150
8/21/2012	3:57:24 PM	Helium valve closed
8/21/2012	3:57:24 PM	H2 valve closed
8/21/2012	3:57:24 PM	BCl3 valve closed
8/21/2012	3:57:24 PM	PH3 valve closed
8/21/2012	3:57:24 PM	SiCl4 pre valve closed
8/21/2012	3:57:24 PM	SiCl4 post valve closed
8/21/2012	3:57:24 PM	Bypass valve closed
8/21/2012	3:57:24 PM	Bubbler valve closed
8/21/2012	3:57:24 PM	Main Vac valve opened
8/21/2012	3:57:24 PM	Helium MFC set to  0.000000
8/21/2012	3:57:24 PM	H2 MFC set to  0.000000
8/21/2012	3:57:24 PM	BCl3 MFC set to  0.000000
8/21/2012	3:57:24 PM	PH3 MFC set to  0.000000
8/21/2012	3:57:24 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:57:24 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:57:24 PM	Tube furnace set to 150
8/21/2012	3:57:54 PM	H2 valve closed
8/21/2012	3:57:54 PM	BCl3 valve closed
8/21/2012	3:57:54 PM	PH3 valve closed
8/21/2012	3:57:54 PM	SiCl4 pre valve closed
8/21/2012	3:57:54 PM	SiCl4 post valve closed
8/21/2012	3:57:54 PM	Bypass valve closed
8/21/2012	3:57:54 PM	Bubbler valve closed
8/21/2012	3:57:54 PM	Helium valve opened
8/21/2012	3:57:54 PM	Main Vac valve opened
8/21/2012	3:57:54 PM	Helium MFC set to  20.000000
8/21/2012	3:57:54 PM	H2 MFC set to  0.000000
8/21/2012	3:57:54 PM	BCl3 MFC set to  0.000000
8/21/2012	3:57:54 PM	PH3 MFC set to  0.000000
8/21/2012	3:57:54 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:57:54 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:57:54 PM	Tube furnace set to 150
8/21/2012	3:58:24 PM	Helium valve closed
8/21/2012	3:58:24 PM	H2 valve closed
8/21/2012	3:58:24 PM	BCl3 valve closed
8/21/2012	3:58:24 PM	PH3 valve closed
8/21/2012	3:58:24 PM	SiCl4 pre valve closed
8/21/2012	3:58:24 PM	SiCl4 post valve closed
8/21/2012	3:58:24 PM	Bypass valve closed
8/21/2012	3:58:24 PM	Bubbler valve closed
8/21/2012	3:58:24 PM	Main Vac valve opened
8/21/2012	3:58:24 PM	Helium MFC set to  0.000000
8/21/2012	3:58:24 PM	H2 MFC set to  0.000000
8/21/2012	3:58:24 PM	BCl3 MFC set to  0.000000
8/21/2012	3:58:24 PM	PH3 MFC set to  0.000000
8/21/2012	3:58:24 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:58:24 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:58:25 PM	Tube furnace set to 150
8/21/2012	3:58:55 PM	H2 valve closed
8/21/2012	3:58:55 PM	BCl3 valve closed
8/21/2012	3:58:55 PM	PH3 valve closed
8/21/2012	3:58:55 PM	SiCl4 pre valve closed
8/21/2012	3:58:55 PM	SiCl4 post valve closed
8/21/2012	3:58:55 PM	Bypass valve closed
8/21/2012	3:58:55 PM	Bubbler valve closed
8/21/2012	3:58:55 PM	Helium valve opened
8/21/2012	3:58:55 PM	Main Vac valve opened
8/21/2012	3:58:55 PM	Helium MFC set to  20.000000
8/21/2012	3:58:55 PM	H2 MFC set to  0.000000
8/21/2012	3:58:55 PM	BCl3 MFC set to  0.000000
8/21/2012	3:58:55 PM	PH3 MFC set to  0.000000
8/21/2012	3:58:55 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:58:55 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:58:55 PM	Tube furnace set to 150
8/21/2012	3:59:25 PM	Helium valve closed
8/21/2012	3:59:25 PM	H2 valve closed
8/21/2012	3:59:25 PM	BCl3 valve closed
8/21/2012	3:59:25 PM	PH3 valve closed
8/21/2012	3:59:25 PM	SiCl4 pre valve closed
8/21/2012	3:59:25 PM	SiCl4 post valve closed
8/21/2012	3:59:25 PM	Bypass valve closed
8/21/2012	3:59:25 PM	Bubbler valve closed
8/21/2012	3:59:25 PM	Main Vac valve opened
8/21/2012	3:59:25 PM	Helium MFC set to  0.000000
8/21/2012	3:59:25 PM	H2 MFC set to  0.000000
8/21/2012	3:59:25 PM	BCl3 MFC set to  0.000000
8/21/2012	3:59:25 PM	PH3 MFC set to  0.000000
8/21/2012	3:59:25 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:59:25 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:59:25 PM	Tube furnace set to 150
8/21/2012	3:59:55 PM	H2 valve closed
8/21/2012	3:59:55 PM	BCl3 valve closed
8/21/2012	3:59:55 PM	PH3 valve closed
8/21/2012	3:59:55 PM	SiCl4 pre valve closed
8/21/2012	3:59:55 PM	SiCl4 post valve closed
8/21/2012	3:59:55 PM	Bypass valve closed
8/21/2012	3:59:55 PM	Bubbler valve closed
8/21/2012	3:59:55 PM	Helium valve opened
8/21/2012	3:59:55 PM	Main Vac valve opened
8/21/2012	3:59:55 PM	Helium MFC set to  20.000000
8/21/2012	3:59:55 PM	H2 MFC set to  0.000000
8/21/2012	3:59:55 PM	BCl3 MFC set to  0.000000
8/21/2012	3:59:55 PM	PH3 MFC set to  0.000000
8/21/2012	3:59:55 PM	SiCl4 MFC set to  0.000000
8/21/2012	3:59:55 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	3:59:55 PM	Tube furnace set to 150
8/21/2012	4:00:25 PM	Helium valve closed
8/21/2012	4:00:25 PM	H2 valve closed
8/21/2012	4:00:25 PM	BCl3 valve closed
8/21/2012	4:00:25 PM	PH3 valve closed
8/21/2012	4:00:25 PM	SiCl4 pre valve closed
8/21/2012	4:00:25 PM	SiCl4 post valve closed
8/21/2012	4:00:25 PM	Bypass valve closed
8/21/2012	4:00:25 PM	Bubbler valve closed
8/21/2012	4:00:25 PM	Main Vac valve opened
8/21/2012	4:00:25 PM	Helium MFC set to  0.000000
8/21/2012	4:00:25 PM	H2 MFC set to  0.000000
8/21/2012	4:00:25 PM	BCl3 MFC set to  0.000000
8/21/2012	4:00:25 PM	PH3 MFC set to  0.000000
8/21/2012	4:00:25 PM	SiCl4 MFC set to  0.000000
8/21/2012	4:00:25 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	4:00:26 PM	Tube furnace set to 150
8/21/2012	4:00:56 PM	H2 valve closed
8/21/2012	4:00:56 PM	BCl3 valve closed
8/21/2012	4:00:56 PM	PH3 valve closed
8/21/2012	4:00:56 PM	SiCl4 pre valve closed
8/21/2012	4:00:56 PM	SiCl4 post valve closed
8/21/2012	4:00:56 PM	Bypass valve closed
8/21/2012	4:00:56 PM	Bubbler valve closed
8/21/2012	4:00:56 PM	Helium valve opened
8/21/2012	4:00:56 PM	Main Vac valve opened
8/21/2012	4:00:56 PM	Helium MFC set to  20.000000
8/21/2012	4:00:56 PM	H2 MFC set to  0.000000
8/21/2012	4:00:56 PM	BCl3 MFC set to  0.000000
8/21/2012	4:00:56 PM	PH3 MFC set to  0.000000
8/21/2012	4:00:56 PM	SiCl4 MFC set to  0.000000
8/21/2012	4:00:56 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	4:00:56 PM	Tube furnace set to 150
8/21/2012	4:01:26 PM	Helium valve closed
8/21/2012	4:01:26 PM	H2 valve closed
8/21/2012	4:01:26 PM	BCl3 valve closed
8/21/2012	4:01:26 PM	PH3 valve closed
8/21/2012	4:01:26 PM	SiCl4 pre valve closed
8/21/2012	4:01:26 PM	SiCl4 post valve closed
8/21/2012	4:01:26 PM	Bypass valve closed
8/21/2012	4:01:26 PM	Bubbler valve closed
8/21/2012	4:01:26 PM	Main Vac valve opened
8/21/2012	4:01:26 PM	Helium MFC set to  0.000000
8/21/2012	4:01:26 PM	H2 MFC set to  0.000000
8/21/2012	4:01:26 PM	BCl3 MFC set to  0.000000
8/21/2012	4:01:26 PM	PH3 MFC set to  0.000000
8/21/2012	4:01:26 PM	SiCl4 MFC set to  0.000000
8/21/2012	4:01:26 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	4:01:26 PM	Tube furnace set to 150
8/21/2012	4:01:27 PM	Run finished at 4:01 PM
8/21/2012	4:22:10 PM	Main Vac valve closed
8/21/2012	4:22:22 PM	Main Vac valve opened
8/21/2012	4:25:59 PM	Recipe started at 4:25 PM
8/21/2012	4:25:59 PM	Helium valve closed
8/21/2012	4:25:59 PM	H2 valve closed
8/21/2012	4:25:59 PM	BCl3 valve closed
8/21/2012	4:25:59 PM	PH3 valve closed
8/21/2012	4:25:59 PM	SiCl4 pre valve closed
8/21/2012	4:25:59 PM	SiCl4 post valve closed
8/21/2012	4:25:59 PM	Main Vac valve closed
8/21/2012	4:25:59 PM	Bypass valve closed
8/21/2012	4:25:59 PM	Bubbler valve closed
8/21/2012	4:25:59 PM	Helium MFC set to  0.000000
8/21/2012	4:25:59 PM	H2 MFC set to  0.000000
8/21/2012	4:25:59 PM	BCl3 MFC set to  0.000000
8/21/2012	4:25:59 PM	PH3 MFC set to  0.000000
8/21/2012	4:25:59 PM	SiCl4 MFC set to  0.000000
8/21/2012	4:25:59 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	4:25:59 PM	Tube furnace set to 0
8/21/2012	4:26:02 PM	Helium valve closed
8/21/2012	4:26:02 PM	BCl3 valve closed
8/21/2012	4:26:02 PM	PH3 valve closed
8/21/2012	4:26:02 PM	SiCl4 pre valve closed
8/21/2012	4:26:02 PM	SiCl4 post valve closed
8/21/2012	4:26:02 PM	Main Vac valve closed
8/21/2012	4:26:02 PM	Bypass valve closed
8/21/2012	4:26:02 PM	Bubbler valve closed
8/21/2012	4:26:02 PM	H2 valve opened
8/21/2012	4:26:02 PM	Helium MFC set to  0.000000
8/21/2012	4:26:02 PM	H2 MFC set to  500.000000
8/21/2012	4:26:02 PM	BCl3 MFC set to  0.000000
8/21/2012	4:26:02 PM	PH3 MFC set to  0.000000
8/21/2012	4:26:02 PM	SiCl4 MFC set to  0.000000
8/21/2012	4:26:02 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	4:26:02 PM	Tube furnace set to 50
8/21/2012	4:27:14 PM	Helium valve closed
8/21/2012	4:27:14 PM	BCl3 valve closed
8/21/2012	4:27:14 PM	PH3 valve closed
8/21/2012	4:27:14 PM	SiCl4 pre valve closed
8/21/2012	4:27:14 PM	SiCl4 post valve closed
8/21/2012	4:27:14 PM	Main Vac valve closed
8/21/2012	4:27:14 PM	Bypass valve closed
8/21/2012	4:27:14 PM	H2 valve opened
8/21/2012	4:27:14 PM	Bubbler valve opened
8/21/2012	4:27:14 PM	Helium MFC set to  0.000000
8/21/2012	4:27:14 PM	H2 MFC set to  500.000000
8/21/2012	4:27:14 PM	BCl3 MFC set to  0.000000
8/21/2012	4:27:14 PM	PH3 MFC set to  0.000000
8/21/2012	4:27:14 PM	SiCl4 MFC set to  0.000000
8/21/2012	4:27:14 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	4:27:14 PM	Tube furnace set to 50
8/21/2012	4:27:15 PM	Helium valve closed
8/21/2012	4:27:15 PM	BCl3 valve closed
8/21/2012	4:27:15 PM	PH3 valve closed
8/21/2012	4:27:15 PM	SiCl4 pre valve closed
8/21/2012	4:27:15 PM	SiCl4 post valve closed
8/21/2012	4:27:15 PM	Main Vac valve closed
8/21/2012	4:27:16 PM	Bypass valve closed
8/21/2012	4:27:16 PM	H2 valve opened
8/21/2012	4:27:16 PM	Bubbler valve opened
8/21/2012	4:27:16 PM	Helium MFC set to  0.000000
8/21/2012	4:27:16 PM	H2 MFC set to  450.000000
8/21/2012	4:27:16 PM	BCl3 MFC set to  0.000000
8/21/2012	4:27:16 PM	PH3 MFC set to  0.000000
8/21/2012	4:27:16 PM	SiCl4 MFC set to  0.000000
8/21/2012	4:27:16 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	4:27:16 PM	Tube furnace set to 1000
8/21/2012	4:47:16 PM	Helium valve closed
8/21/2012	4:47:16 PM	PH3 valve closed
8/21/2012	4:47:16 PM	Main Vac valve closed
8/21/2012	4:47:16 PM	Bypass valve closed
8/21/2012	4:47:16 PM	H2 valve opened
8/21/2012	4:47:16 PM	BCl3 valve opened
8/21/2012	4:47:16 PM	SiCl4 pre valve opened
8/21/2012	4:47:16 PM	SiCl4 post valve opened
8/21/2012	4:47:16 PM	Bubbler valve opened
8/21/2012	4:47:16 PM	Helium MFC set to  0.000000
8/21/2012	4:47:16 PM	H2 MFC set to  450.000000
8/21/2012	4:47:16 PM	BCl3 MFC set to  1.200000
8/21/2012	4:47:16 PM	PH3 MFC set to  0.000000
8/21/2012	4:47:16 PM	SiCl4 MFC set to  50.000000
8/21/2012	4:47:16 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	4:47:16 PM	Tube furnace set to 1000
8/21/2012	5:02:16 PM	Helium valve closed
8/21/2012	5:02:16 PM	BCl3 valve closed
8/21/2012	5:02:16 PM	PH3 valve closed
8/21/2012	5:02:16 PM	SiCl4 pre valve closed
8/21/2012	5:02:16 PM	SiCl4 post valve closed
8/21/2012	5:02:16 PM	Main Vac valve closed
8/21/2012	5:02:16 PM	Bypass valve closed
8/21/2012	5:02:16 PM	H2 valve opened
8/21/2012	5:02:16 PM	Bubbler valve opened
8/21/2012	5:02:16 PM	Helium MFC set to  0.000000
8/21/2012	5:02:16 PM	H2 MFC set to  500.000000
8/21/2012	5:02:16 PM	BCl3 MFC set to  0.000000
8/21/2012	5:02:16 PM	PH3 MFC set to  0.000000
8/21/2012	5:02:16 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:02:16 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:02:16 PM	Tube furnace set to 750
8/21/2012	5:12:16 PM	H2 valve closed
8/21/2012	5:12:16 PM	BCl3 valve closed
8/21/2012	5:12:16 PM	PH3 valve closed
8/21/2012	5:12:16 PM	SiCl4 pre valve closed
8/21/2012	5:12:16 PM	SiCl4 post valve closed
8/21/2012	5:12:16 PM	Main Vac valve closed
8/21/2012	5:12:16 PM	Bypass valve closed
8/21/2012	5:12:16 PM	Helium valve opened
8/21/2012	5:12:16 PM	Bubbler valve opened
8/21/2012	5:12:16 PM	Helium MFC set to  400.000000
8/21/2012	5:12:16 PM	H2 MFC set to  0.000000
8/21/2012	5:12:16 PM	BCl3 MFC set to  0.000000
8/21/2012	5:12:16 PM	PH3 MFC set to  0.000000
8/21/2012	5:12:16 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:12:16 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:12:16 PM	Tube furnace set to 0
8/21/2012	5:24:25 PM	Run aborted at 5:24 PM
8/21/2012	5:24:25 PM	Helium valve closed
8/21/2012	5:24:25 PM	H2 valve closed
8/21/2012	5:24:25 PM	BCl3 valve closed
8/21/2012	5:24:25 PM	PH3 valve closed
8/21/2012	5:24:25 PM	SiCl4 pre valve closed
8/21/2012	5:24:25 PM	SiCl4 post valve closed
8/21/2012	5:24:25 PM	Bypass valve closed
8/21/2012	5:24:25 PM	Main Vac valve closed
8/21/2012	5:24:25 PM	Bubbler valve closed
8/21/2012	5:24:25 PM	Helium MFC set to  0.000000
8/21/2012	5:24:25 PM	H2 MFC set to  0.000000
8/21/2012	5:24:25 PM	BCl3 MFC set to  0.000000
8/21/2012	5:24:25 PM	PH3 MFC set to  0.000000
8/21/2012	5:24:25 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:24:25 PM	Tube furnace set to 0
8/21/2012	5:24:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	5:24:27 PM	Recipe started at 5:24 PM
8/21/2012	5:24:28 PM	Helium valve closed
8/21/2012	5:24:28 PM	H2 valve closed
8/21/2012	5:24:28 PM	BCl3 valve closed
8/21/2012	5:24:28 PM	PH3 valve closed
8/21/2012	5:24:28 PM	SiCl4 pre valve closed
8/21/2012	5:24:28 PM	SiCl4 post valve closed
8/21/2012	5:24:28 PM	Main Vac valve closed
8/21/2012	5:24:28 PM	Bypass valve closed
8/21/2012	5:24:28 PM	Bubbler valve closed
8/21/2012	5:24:28 PM	Helium MFC set to  0.000000
8/21/2012	5:24:28 PM	H2 MFC set to  0.000000
8/21/2012	5:24:28 PM	BCl3 MFC set to  0.000000
8/21/2012	5:24:28 PM	PH3 MFC set to  0.000000
8/21/2012	5:24:28 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:24:28 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:24:28 PM	Tube furnace set to 0
8/21/2012	5:24:31 PM	H2 valve closed
8/21/2012	5:24:31 PM	BCl3 valve closed
8/21/2012	5:24:31 PM	PH3 valve closed
8/21/2012	5:24:31 PM	SiCl4 pre valve closed
8/21/2012	5:24:31 PM	SiCl4 post valve closed
8/21/2012	5:24:31 PM	Main Vac valve closed
8/21/2012	5:24:31 PM	Bypass valve closed
8/21/2012	5:24:31 PM	Bubbler valve closed
8/21/2012	5:24:31 PM	Helium valve opened
8/21/2012	5:24:31 PM	Helium MFC set to  500.000000
8/21/2012	5:24:31 PM	H2 MFC set to  0.000000
8/21/2012	5:24:31 PM	BCl3 MFC set to  0.000000
8/21/2012	5:24:31 PM	PH3 MFC set to  0.000000
8/21/2012	5:24:31 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:24:31 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:24:31 PM	Tube furnace set to 0
8/21/2012	5:24:31 PM	Helium valve closed
8/21/2012	5:24:31 PM	H2 valve closed
8/21/2012	5:24:31 PM	BCl3 valve closed
8/21/2012	5:24:31 PM	PH3 valve closed
8/21/2012	5:24:31 PM	SiCl4 pre valve closed
8/21/2012	5:24:31 PM	SiCl4 post valve closed
8/21/2012	5:24:31 PM	Main Vac valve closed
8/21/2012	5:24:31 PM	Bypass valve closed
8/21/2012	5:24:31 PM	Bubbler valve closed
8/21/2012	5:24:31 PM	Helium MFC set to  0.000000
8/21/2012	5:24:31 PM	H2 MFC set to  0.000000
8/21/2012	5:24:31 PM	BCl3 MFC set to  0.000000
8/21/2012	5:24:31 PM	PH3 MFC set to  0.000000
8/21/2012	5:24:31 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:24:31 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:24:31 PM	Tube furnace set to 0
8/21/2012	5:24:32 PM	Run finished at 5:24 PM
8/21/2012	5:24:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	5:31:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	5:31:15 PM	Recipe started at 5:31 PM
8/21/2012	5:31:15 PM	Helium valve closed
8/21/2012	5:31:15 PM	H2 valve closed
8/21/2012	5:31:15 PM	BCl3 valve closed
8/21/2012	5:31:15 PM	PH3 valve closed
8/21/2012	5:31:15 PM	SiCl4 pre valve closed
8/21/2012	5:31:15 PM	SiCl4 post valve closed
8/21/2012	5:31:15 PM	Main Vac valve closed
8/21/2012	5:31:15 PM	Bubbler valve closed
8/21/2012	5:31:15 PM	Bypass valve opened
8/21/2012	5:31:15 PM	Helium MFC set to  0.000000
8/21/2012	5:31:15 PM	H2 MFC set to  0.000000
8/21/2012	5:31:15 PM	BCl3 MFC set to  0.000000
8/21/2012	5:31:15 PM	PH3 MFC set to  0.000000
8/21/2012	5:31:15 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:31:15 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:31:15 PM	Tube furnace set to 0
8/21/2012	5:32:37 PM	Helium valve closed
8/21/2012	5:32:37 PM	H2 valve closed
8/21/2012	5:32:37 PM	BCl3 valve closed
8/21/2012	5:32:37 PM	PH3 valve closed
8/21/2012	5:32:37 PM	SiCl4 pre valve closed
8/21/2012	5:32:37 PM	SiCl4 post valve closed
8/21/2012	5:32:37 PM	Main Vac valve closed
8/21/2012	5:32:37 PM	Bubbler valve closed
8/21/2012	5:32:37 PM	Bypass valve opened
8/21/2012	5:32:37 PM	Helium MFC set to  0.000000
8/21/2012	5:32:37 PM	H2 MFC set to  0.000000
8/21/2012	5:32:37 PM	BCl3 MFC set to  0.000000
8/21/2012	5:32:37 PM	PH3 MFC set to  0.000000
8/21/2012	5:32:37 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:32:38 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:32:38 PM	Tube furnace set to 0
8/21/2012	5:33:38 PM	Helium valve closed
8/21/2012	5:33:38 PM	H2 valve closed
8/21/2012	5:33:38 PM	BCl3 valve closed
8/21/2012	5:33:38 PM	PH3 valve closed
8/21/2012	5:33:38 PM	SiCl4 pre valve closed
8/21/2012	5:33:38 PM	SiCl4 post valve closed
8/21/2012	5:33:38 PM	Bypass valve closed
8/21/2012	5:33:38 PM	Bubbler valve closed
8/21/2012	5:33:38 PM	Main Vac valve opened
8/21/2012	5:33:38 PM	Helium MFC set to  0.000000
8/21/2012	5:33:38 PM	H2 MFC set to  0.000000
8/21/2012	5:33:38 PM	BCl3 MFC set to  0.000000
8/21/2012	5:33:38 PM	PH3 MFC set to  0.000000
8/21/2012	5:33:38 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:33:38 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:33:38 PM	Tube furnace set to 0
8/21/2012	5:33:39 PM	Run finished at 5:33 PM
8/21/2012	5:33:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	5:58:11 PM	Recipe started at 5:58 PM
8/21/2012	5:58:11 PM	Helium valve closed
8/21/2012	5:58:11 PM	H2 valve closed
8/21/2012	5:58:11 PM	BCl3 valve closed
8/21/2012	5:58:11 PM	PH3 valve closed
8/21/2012	5:58:11 PM	SiCl4 pre valve closed
8/21/2012	5:58:11 PM	SiCl4 post valve closed
8/21/2012	5:58:11 PM	Main Vac valve closed
8/21/2012	5:58:11 PM	Bubbler valve closed
8/21/2012	5:58:11 PM	Bypass valve opened
8/21/2012	5:58:11 PM	Helium MFC set to  0.000000
8/21/2012	5:58:11 PM	H2 MFC set to  0.000000
8/21/2012	5:58:11 PM	BCl3 MFC set to  0.000000
8/21/2012	5:58:11 PM	PH3 MFC set to  0.000000
8/21/2012	5:58:11 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:58:11 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:58:11 PM	Tube furnace set to 150
8/21/2012	5:58:11 PM	Helium valve closed
8/21/2012	5:58:11 PM	H2 valve closed
8/21/2012	5:58:11 PM	BCl3 valve closed
8/21/2012	5:58:11 PM	PH3 valve closed
8/21/2012	5:58:11 PM	SiCl4 pre valve closed
8/21/2012	5:58:11 PM	SiCl4 post valve closed
8/21/2012	5:58:11 PM	Main Vac valve closed
8/21/2012	5:58:11 PM	Bubbler valve closed
8/21/2012	5:58:11 PM	Bypass valve opened
8/21/2012	5:58:11 PM	Helium MFC set to  0.000000
8/21/2012	5:58:11 PM	H2 MFC set to  0.000000
8/21/2012	5:58:11 PM	BCl3 MFC set to  0.000000
8/21/2012	5:58:11 PM	PH3 MFC set to  0.000000
8/21/2012	5:58:11 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:58:11 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:58:11 PM	Tube furnace set to 150
8/21/2012	5:58:12 PM	Helium valve closed
8/21/2012	5:58:12 PM	H2 valve closed
8/21/2012	5:58:12 PM	BCl3 valve closed
8/21/2012	5:58:12 PM	PH3 valve closed
8/21/2012	5:58:12 PM	SiCl4 pre valve closed
8/21/2012	5:58:12 PM	SiCl4 post valve closed
8/21/2012	5:58:12 PM	Bypass valve closed
8/21/2012	5:58:12 PM	Bubbler valve closed
8/21/2012	5:58:12 PM	Main Vac valve opened
8/21/2012	5:58:12 PM	Helium MFC set to  0.000000
8/21/2012	5:58:12 PM	H2 MFC set to  0.000000
8/21/2012	5:58:12 PM	BCl3 MFC set to  0.000000
8/21/2012	5:58:12 PM	PH3 MFC set to  0.000000
8/21/2012	5:58:12 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:58:12 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:58:12 PM	Tube furnace set to 150
8/21/2012	5:58:13 PM	H2 valve closed
8/21/2012	5:58:13 PM	BCl3 valve closed
8/21/2012	5:58:13 PM	PH3 valve closed
8/21/2012	5:58:13 PM	SiCl4 pre valve closed
8/21/2012	5:58:13 PM	SiCl4 post valve closed
8/21/2012	5:58:13 PM	Bypass valve closed
8/21/2012	5:58:13 PM	Bubbler valve closed
8/21/2012	5:58:13 PM	Helium valve opened
8/21/2012	5:58:13 PM	Main Vac valve opened
8/21/2012	5:58:13 PM	Helium MFC set to  20.000000
8/21/2012	5:58:13 PM	H2 MFC set to  0.000000
8/21/2012	5:58:13 PM	BCl3 MFC set to  0.000000
8/21/2012	5:58:13 PM	PH3 MFC set to  0.000000
8/21/2012	5:58:13 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:58:13 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:58:13 PM	Tube furnace set to 150
8/21/2012	5:58:43 PM	Helium valve closed
8/21/2012	5:58:43 PM	H2 valve closed
8/21/2012	5:58:43 PM	BCl3 valve closed
8/21/2012	5:58:43 PM	PH3 valve closed
8/21/2012	5:58:43 PM	SiCl4 pre valve closed
8/21/2012	5:58:43 PM	SiCl4 post valve closed
8/21/2012	5:58:43 PM	Bypass valve closed
8/21/2012	5:58:43 PM	Bubbler valve closed
8/21/2012	5:58:43 PM	Main Vac valve opened
8/21/2012	5:58:43 PM	Helium MFC set to  0.000000
8/21/2012	5:58:43 PM	H2 MFC set to  0.000000
8/21/2012	5:58:43 PM	BCl3 MFC set to  0.000000
8/21/2012	5:58:43 PM	PH3 MFC set to  0.000000
8/21/2012	5:58:43 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:58:43 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:58:43 PM	Tube furnace set to 150
8/21/2012	5:59:13 PM	H2 valve closed
8/21/2012	5:59:13 PM	BCl3 valve closed
8/21/2012	5:59:13 PM	PH3 valve closed
8/21/2012	5:59:14 PM	SiCl4 pre valve closed
8/21/2012	5:59:14 PM	SiCl4 post valve closed
8/21/2012	5:59:14 PM	Bypass valve closed
8/21/2012	5:59:14 PM	Bubbler valve closed
8/21/2012	5:59:14 PM	Helium valve opened
8/21/2012	5:59:14 PM	Main Vac valve opened
8/21/2012	5:59:14 PM	Helium MFC set to  20.000000
8/21/2012	5:59:14 PM	H2 MFC set to  0.000000
8/21/2012	5:59:14 PM	BCl3 MFC set to  0.000000
8/21/2012	5:59:14 PM	PH3 MFC set to  0.000000
8/21/2012	5:59:14 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:59:14 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:59:14 PM	Tube furnace set to 150
8/21/2012	5:59:44 PM	Helium valve closed
8/21/2012	5:59:44 PM	H2 valve closed
8/21/2012	5:59:44 PM	BCl3 valve closed
8/21/2012	5:59:44 PM	PH3 valve closed
8/21/2012	5:59:44 PM	SiCl4 pre valve closed
8/21/2012	5:59:44 PM	SiCl4 post valve closed
8/21/2012	5:59:44 PM	Bypass valve closed
8/21/2012	5:59:44 PM	Bubbler valve closed
8/21/2012	5:59:44 PM	Main Vac valve opened
8/21/2012	5:59:44 PM	Helium MFC set to  0.000000
8/21/2012	5:59:44 PM	H2 MFC set to  0.000000
8/21/2012	5:59:44 PM	BCl3 MFC set to  0.000000
8/21/2012	5:59:44 PM	PH3 MFC set to  0.000000
8/21/2012	5:59:44 PM	SiCl4 MFC set to  0.000000
8/21/2012	5:59:44 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	5:59:44 PM	Tube furnace set to 150
8/21/2012	6:00:14 PM	H2 valve closed
8/21/2012	6:00:14 PM	BCl3 valve closed
8/21/2012	6:00:14 PM	PH3 valve closed
8/21/2012	6:00:14 PM	SiCl4 pre valve closed
8/21/2012	6:00:14 PM	SiCl4 post valve closed
8/21/2012	6:00:14 PM	Bypass valve closed
8/21/2012	6:00:14 PM	Bubbler valve closed
8/21/2012	6:00:14 PM	Helium valve opened
8/21/2012	6:00:14 PM	Main Vac valve opened
8/21/2012	6:00:14 PM	Helium MFC set to  20.000000
8/21/2012	6:00:14 PM	H2 MFC set to  0.000000
8/21/2012	6:00:14 PM	BCl3 MFC set to  0.000000
8/21/2012	6:00:14 PM	PH3 MFC set to  0.000000
8/21/2012	6:00:14 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:00:14 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:00:14 PM	Tube furnace set to 150
8/21/2012	6:00:44 PM	Helium valve closed
8/21/2012	6:00:44 PM	H2 valve closed
8/21/2012	6:00:44 PM	BCl3 valve closed
8/21/2012	6:00:44 PM	PH3 valve closed
8/21/2012	6:00:44 PM	SiCl4 pre valve closed
8/21/2012	6:00:44 PM	SiCl4 post valve closed
8/21/2012	6:00:44 PM	Bypass valve closed
8/21/2012	6:00:44 PM	Bubbler valve closed
8/21/2012	6:00:44 PM	Main Vac valve opened
8/21/2012	6:00:44 PM	Helium MFC set to  0.000000
8/21/2012	6:00:44 PM	H2 MFC set to  0.000000
8/21/2012	6:00:44 PM	BCl3 MFC set to  0.000000
8/21/2012	6:00:44 PM	PH3 MFC set to  0.000000
8/21/2012	6:00:44 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:00:44 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:00:44 PM	Tube furnace set to 150
8/21/2012	6:01:14 PM	H2 valve closed
8/21/2012	6:01:14 PM	BCl3 valve closed
8/21/2012	6:01:14 PM	PH3 valve closed
8/21/2012	6:01:14 PM	SiCl4 pre valve closed
8/21/2012	6:01:14 PM	SiCl4 post valve closed
8/21/2012	6:01:14 PM	Bypass valve closed
8/21/2012	6:01:14 PM	Bubbler valve closed
8/21/2012	6:01:14 PM	Helium valve opened
8/21/2012	6:01:14 PM	Main Vac valve opened
8/21/2012	6:01:14 PM	Helium MFC set to  20.000000
8/21/2012	6:01:14 PM	H2 MFC set to  0.000000
8/21/2012	6:01:14 PM	BCl3 MFC set to  0.000000
8/21/2012	6:01:15 PM	PH3 MFC set to  0.000000
8/21/2012	6:01:15 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:01:15 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:01:15 PM	Tube furnace set to 150
8/21/2012	6:01:45 PM	Helium valve closed
8/21/2012	6:01:45 PM	H2 valve closed
8/21/2012	6:01:45 PM	BCl3 valve closed
8/21/2012	6:01:45 PM	PH3 valve closed
8/21/2012	6:01:45 PM	SiCl4 pre valve closed
8/21/2012	6:01:45 PM	SiCl4 post valve closed
8/21/2012	6:01:45 PM	Bypass valve closed
8/21/2012	6:01:45 PM	Bubbler valve closed
8/21/2012	6:01:45 PM	Main Vac valve opened
8/21/2012	6:01:45 PM	Helium MFC set to  0.000000
8/21/2012	6:01:45 PM	H2 MFC set to  0.000000
8/21/2012	6:01:45 PM	BCl3 MFC set to  0.000000
8/21/2012	6:01:45 PM	PH3 MFC set to  0.000000
8/21/2012	6:01:45 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:01:45 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:01:45 PM	Tube furnace set to 150
8/21/2012	6:02:15 PM	H2 valve closed
8/21/2012	6:02:15 PM	BCl3 valve closed
8/21/2012	6:02:15 PM	PH3 valve closed
8/21/2012	6:02:15 PM	SiCl4 pre valve closed
8/21/2012	6:02:15 PM	SiCl4 post valve closed
8/21/2012	6:02:15 PM	Bypass valve closed
8/21/2012	6:02:15 PM	Bubbler valve closed
8/21/2012	6:02:15 PM	Helium valve opened
8/21/2012	6:02:15 PM	Main Vac valve opened
8/21/2012	6:02:15 PM	Helium MFC set to  20.000000
8/21/2012	6:02:15 PM	H2 MFC set to  0.000000
8/21/2012	6:02:15 PM	BCl3 MFC set to  0.000000
8/21/2012	6:02:15 PM	PH3 MFC set to  0.000000
8/21/2012	6:02:15 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:02:15 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:02:15 PM	Tube furnace set to 150
8/21/2012	6:02:45 PM	Helium valve closed
8/21/2012	6:02:45 PM	H2 valve closed
8/21/2012	6:02:45 PM	BCl3 valve closed
8/21/2012	6:02:45 PM	PH3 valve closed
8/21/2012	6:02:45 PM	SiCl4 pre valve closed
8/21/2012	6:02:45 PM	SiCl4 post valve closed
8/21/2012	6:02:45 PM	Bypass valve closed
8/21/2012	6:02:45 PM	Bubbler valve closed
8/21/2012	6:02:45 PM	Main Vac valve opened
8/21/2012	6:02:45 PM	Helium MFC set to  0.000000
8/21/2012	6:02:45 PM	H2 MFC set to  0.000000
8/21/2012	6:02:45 PM	BCl3 MFC set to  0.000000
8/21/2012	6:02:45 PM	PH3 MFC set to  0.000000
8/21/2012	6:02:45 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:02:45 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:02:45 PM	Tube furnace set to 150
8/21/2012	6:03:15 PM	H2 valve closed
8/21/2012	6:03:15 PM	BCl3 valve closed
8/21/2012	6:03:15 PM	PH3 valve closed
8/21/2012	6:03:15 PM	SiCl4 pre valve closed
8/21/2012	6:03:15 PM	SiCl4 post valve closed
8/21/2012	6:03:15 PM	Bypass valve closed
8/21/2012	6:03:15 PM	Bubbler valve closed
8/21/2012	6:03:15 PM	Helium valve opened
8/21/2012	6:03:15 PM	Main Vac valve opened
8/21/2012	6:03:15 PM	Helium MFC set to  20.000000
8/21/2012	6:03:15 PM	H2 MFC set to  0.000000
8/21/2012	6:03:15 PM	BCl3 MFC set to  0.000000
8/21/2012	6:03:15 PM	PH3 MFC set to  0.000000
8/21/2012	6:03:15 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:03:15 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:03:16 PM	Tube furnace set to 150
8/21/2012	6:03:46 PM	Helium valve closed
8/21/2012	6:03:46 PM	H2 valve closed
8/21/2012	6:03:46 PM	BCl3 valve closed
8/21/2012	6:03:46 PM	PH3 valve closed
8/21/2012	6:03:46 PM	SiCl4 pre valve closed
8/21/2012	6:03:46 PM	SiCl4 post valve closed
8/21/2012	6:03:46 PM	Bypass valve closed
8/21/2012	6:03:46 PM	Bubbler valve closed
8/21/2012	6:03:46 PM	Main Vac valve opened
8/21/2012	6:03:46 PM	Helium MFC set to  0.000000
8/21/2012	6:03:46 PM	H2 MFC set to  0.000000
8/21/2012	6:03:46 PM	BCl3 MFC set to  0.000000
8/21/2012	6:03:46 PM	PH3 MFC set to  0.000000
8/21/2012	6:03:46 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:03:46 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:03:46 PM	Tube furnace set to 150
8/21/2012	6:04:16 PM	H2 valve closed
8/21/2012	6:04:16 PM	BCl3 valve closed
8/21/2012	6:04:16 PM	PH3 valve closed
8/21/2012	6:04:16 PM	SiCl4 pre valve closed
8/21/2012	6:04:16 PM	SiCl4 post valve closed
8/21/2012	6:04:16 PM	Bypass valve closed
8/21/2012	6:04:16 PM	Bubbler valve closed
8/21/2012	6:04:16 PM	Helium valve opened
8/21/2012	6:04:16 PM	Main Vac valve opened
8/21/2012	6:04:16 PM	Helium MFC set to  20.000000
8/21/2012	6:04:16 PM	H2 MFC set to  0.000000
8/21/2012	6:04:16 PM	BCl3 MFC set to  0.000000
8/21/2012	6:04:16 PM	PH3 MFC set to  0.000000
8/21/2012	6:04:16 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:04:16 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:04:16 PM	Tube furnace set to 150
8/21/2012	6:04:46 PM	Helium valve closed
8/21/2012	6:04:46 PM	H2 valve closed
8/21/2012	6:04:46 PM	BCl3 valve closed
8/21/2012	6:04:46 PM	PH3 valve closed
8/21/2012	6:04:46 PM	SiCl4 pre valve closed
8/21/2012	6:04:46 PM	SiCl4 post valve closed
8/21/2012	6:04:46 PM	Bypass valve closed
8/21/2012	6:04:46 PM	Bubbler valve closed
8/21/2012	6:04:46 PM	Main Vac valve opened
8/21/2012	6:04:46 PM	Helium MFC set to  0.000000
8/21/2012	6:04:46 PM	H2 MFC set to  0.000000
8/21/2012	6:04:46 PM	BCl3 MFC set to  0.000000
8/21/2012	6:04:46 PM	PH3 MFC set to  0.000000
8/21/2012	6:04:46 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:04:46 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:04:46 PM	Tube furnace set to 150
8/21/2012	6:05:16 PM	H2 valve closed
8/21/2012	6:05:16 PM	BCl3 valve closed
8/21/2012	6:05:16 PM	PH3 valve closed
8/21/2012	6:05:16 PM	SiCl4 pre valve closed
8/21/2012	6:05:16 PM	SiCl4 post valve closed
8/21/2012	6:05:16 PM	Bypass valve closed
8/21/2012	6:05:16 PM	Bubbler valve closed
8/21/2012	6:05:16 PM	Helium valve opened
8/21/2012	6:05:16 PM	Main Vac valve opened
8/21/2012	6:05:16 PM	Helium MFC set to  20.000000
8/21/2012	6:05:16 PM	H2 MFC set to  0.000000
8/21/2012	6:05:16 PM	BCl3 MFC set to  0.000000
8/21/2012	6:05:16 PM	PH3 MFC set to  0.000000
8/21/2012	6:05:16 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:05:16 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:05:17 PM	Tube furnace set to 150
8/21/2012	6:05:47 PM	Helium valve closed
8/21/2012	6:05:47 PM	H2 valve closed
8/21/2012	6:05:47 PM	BCl3 valve closed
8/21/2012	6:05:47 PM	PH3 valve closed
8/21/2012	6:05:47 PM	SiCl4 pre valve closed
8/21/2012	6:05:47 PM	SiCl4 post valve closed
8/21/2012	6:05:47 PM	Bypass valve closed
8/21/2012	6:05:47 PM	Bubbler valve closed
8/21/2012	6:05:47 PM	Main Vac valve opened
8/21/2012	6:05:47 PM	Helium MFC set to  0.000000
8/21/2012	6:05:47 PM	H2 MFC set to  0.000000
8/21/2012	6:05:47 PM	BCl3 MFC set to  0.000000
8/21/2012	6:05:47 PM	PH3 MFC set to  0.000000
8/21/2012	6:05:47 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:05:47 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:05:47 PM	Tube furnace set to 150
8/21/2012	6:06:17 PM	H2 valve closed
8/21/2012	6:06:17 PM	BCl3 valve closed
8/21/2012	6:06:17 PM	PH3 valve closed
8/21/2012	6:06:17 PM	SiCl4 pre valve closed
8/21/2012	6:06:17 PM	SiCl4 post valve closed
8/21/2012	6:06:17 PM	Bypass valve closed
8/21/2012	6:06:17 PM	Bubbler valve closed
8/21/2012	6:06:17 PM	Helium valve opened
8/21/2012	6:06:17 PM	Main Vac valve opened
8/21/2012	6:06:17 PM	Helium MFC set to  20.000000
8/21/2012	6:06:17 PM	H2 MFC set to  0.000000
8/21/2012	6:06:17 PM	BCl3 MFC set to  0.000000
8/21/2012	6:06:17 PM	PH3 MFC set to  0.000000
8/21/2012	6:06:17 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:06:17 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:06:17 PM	Tube furnace set to 150
8/21/2012	6:06:47 PM	Helium valve closed
8/21/2012	6:06:47 PM	H2 valve closed
8/21/2012	6:06:47 PM	BCl3 valve closed
8/21/2012	6:06:47 PM	PH3 valve closed
8/21/2012	6:06:47 PM	SiCl4 pre valve closed
8/21/2012	6:06:47 PM	SiCl4 post valve closed
8/21/2012	6:06:47 PM	Bypass valve closed
8/21/2012	6:06:47 PM	Bubbler valve closed
8/21/2012	6:06:47 PM	Main Vac valve opened
8/21/2012	6:06:47 PM	Helium MFC set to  0.000000
8/21/2012	6:06:47 PM	H2 MFC set to  0.000000
8/21/2012	6:06:47 PM	BCl3 MFC set to  0.000000
8/21/2012	6:06:47 PM	PH3 MFC set to  0.000000
8/21/2012	6:06:47 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:06:47 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:06:47 PM	Tube furnace set to 150
8/21/2012	6:07:17 PM	H2 valve closed
8/21/2012	6:07:17 PM	BCl3 valve closed
8/21/2012	6:07:17 PM	PH3 valve closed
8/21/2012	6:07:17 PM	SiCl4 pre valve closed
8/21/2012	6:07:17 PM	SiCl4 post valve closed
8/21/2012	6:07:17 PM	Bypass valve closed
8/21/2012	6:07:17 PM	Bubbler valve closed
8/21/2012	6:07:17 PM	Helium valve opened
8/21/2012	6:07:17 PM	Main Vac valve opened
8/21/2012	6:07:17 PM	Helium MFC set to  20.000000
8/21/2012	6:07:17 PM	H2 MFC set to  0.000000
8/21/2012	6:07:17 PM	BCl3 MFC set to  0.000000
8/21/2012	6:07:17 PM	PH3 MFC set to  0.000000
8/21/2012	6:07:17 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:07:17 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:07:17 PM	Tube furnace set to 150
8/21/2012	6:07:22 PM	Helium valve closed
8/21/2012	6:07:22 PM	H2 valve closed
8/21/2012	6:07:22 PM	BCl3 valve closed
8/21/2012	6:07:22 PM	PH3 valve closed
8/21/2012	6:07:22 PM	SiCl4 pre valve closed
8/21/2012	6:07:22 PM	SiCl4 post valve closed
8/21/2012	6:07:22 PM	Bypass valve closed
8/21/2012	6:07:22 PM	Bubbler valve closed
8/21/2012	6:07:22 PM	Main Vac valve opened
8/21/2012	6:07:22 PM	Helium MFC set to  0.000000
8/21/2012	6:07:22 PM	H2 MFC set to  0.000000
8/21/2012	6:07:22 PM	BCl3 MFC set to  0.000000
8/21/2012	6:07:22 PM	PH3 MFC set to  0.000000
8/21/2012	6:07:22 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:07:22 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:07:22 PM	Tube furnace set to 150
8/21/2012	6:07:23 PM	Run finished at 6:07 PM
8/21/2012	6:07:34 PM	Recipe started at 6:07 PM
8/21/2012	6:07:34 PM	Helium valve closed
8/21/2012	6:07:34 PM	H2 valve closed
8/21/2012	6:07:34 PM	BCl3 valve closed
8/21/2012	6:07:34 PM	PH3 valve closed
8/21/2012	6:07:34 PM	SiCl4 pre valve closed
8/21/2012	6:07:34 PM	SiCl4 post valve closed
8/21/2012	6:07:34 PM	Main Vac valve closed
8/21/2012	6:07:34 PM	Bubbler valve closed
8/21/2012	6:07:34 PM	Bypass valve opened
8/21/2012	6:07:34 PM	Helium MFC set to  0.000000
8/21/2012	6:07:34 PM	H2 MFC set to  0.000000
8/21/2012	6:07:34 PM	BCl3 MFC set to  0.000000
8/21/2012	6:07:34 PM	PH3 MFC set to  0.000000
8/21/2012	6:07:34 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:07:34 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:07:34 PM	Tube furnace set to 150
8/21/2012	6:07:34 PM	Helium valve closed
8/21/2012	6:07:34 PM	H2 valve closed
8/21/2012	6:07:34 PM	BCl3 valve closed
8/21/2012	6:07:34 PM	PH3 valve closed
8/21/2012	6:07:34 PM	SiCl4 pre valve closed
8/21/2012	6:07:34 PM	SiCl4 post valve closed
8/21/2012	6:07:34 PM	Main Vac valve closed
8/21/2012	6:07:34 PM	Bubbler valve closed
8/21/2012	6:07:34 PM	Bypass valve opened
8/21/2012	6:07:34 PM	Helium MFC set to  0.000000
8/21/2012	6:07:34 PM	H2 MFC set to  0.000000
8/21/2012	6:07:34 PM	BCl3 MFC set to  0.000000
8/21/2012	6:07:34 PM	PH3 MFC set to  0.000000
8/21/2012	6:07:34 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:07:34 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:07:35 PM	Tube furnace set to 150
8/21/2012	6:07:38 PM	Helium valve closed
8/21/2012	6:07:38 PM	H2 valve closed
8/21/2012	6:07:38 PM	BCl3 valve closed
8/21/2012	6:07:38 PM	PH3 valve closed
8/21/2012	6:07:38 PM	SiCl4 pre valve closed
8/21/2012	6:07:38 PM	SiCl4 post valve closed
8/21/2012	6:07:38 PM	Bypass valve closed
8/21/2012	6:07:38 PM	Bubbler valve closed
8/21/2012	6:07:38 PM	Main Vac valve opened
8/21/2012	6:07:38 PM	Helium MFC set to  0.000000
8/21/2012	6:07:38 PM	H2 MFC set to  0.000000
8/21/2012	6:07:38 PM	BCl3 MFC set to  0.000000
8/21/2012	6:07:38 PM	PH3 MFC set to  0.000000
8/21/2012	6:07:38 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:07:38 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:07:38 PM	Tube furnace set to 150
8/21/2012	6:07:41 PM	H2 valve closed
8/21/2012	6:07:41 PM	BCl3 valve closed
8/21/2012	6:07:41 PM	PH3 valve closed
8/21/2012	6:07:41 PM	SiCl4 pre valve closed
8/21/2012	6:07:41 PM	SiCl4 post valve closed
8/21/2012	6:07:41 PM	Bypass valve closed
8/21/2012	6:07:41 PM	Bubbler valve closed
8/21/2012	6:07:41 PM	Helium valve opened
8/21/2012	6:07:41 PM	Main Vac valve opened
8/21/2012	6:07:41 PM	Helium MFC set to  20.000000
8/21/2012	6:07:41 PM	H2 MFC set to  0.000000
8/21/2012	6:07:41 PM	BCl3 MFC set to  0.000000
8/21/2012	6:07:41 PM	PH3 MFC set to  0.000000
8/21/2012	6:07:41 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:07:41 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:07:41 PM	Tube furnace set to 150
8/21/2012	6:08:12 PM	Helium valve closed
8/21/2012	6:08:12 PM	H2 valve closed
8/21/2012	6:08:12 PM	BCl3 valve closed
8/21/2012	6:08:12 PM	PH3 valve closed
8/21/2012	6:08:12 PM	SiCl4 pre valve closed
8/21/2012	6:08:12 PM	SiCl4 post valve closed
8/21/2012	6:08:12 PM	Bypass valve closed
8/21/2012	6:08:12 PM	Bubbler valve closed
8/21/2012	6:08:12 PM	Main Vac valve opened
8/21/2012	6:08:12 PM	Helium MFC set to  0.000000
8/21/2012	6:08:12 PM	H2 MFC set to  0.000000
8/21/2012	6:08:12 PM	BCl3 MFC set to  0.000000
8/21/2012	6:08:12 PM	PH3 MFC set to  0.000000
8/21/2012	6:08:12 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:08:12 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:08:12 PM	Tube furnace set to 150
8/21/2012	6:08:42 PM	H2 valve closed
8/21/2012	6:08:42 PM	BCl3 valve closed
8/21/2012	6:08:42 PM	PH3 valve closed
8/21/2012	6:08:42 PM	SiCl4 pre valve closed
8/21/2012	6:08:42 PM	SiCl4 post valve closed
8/21/2012	6:08:42 PM	Bypass valve closed
8/21/2012	6:08:42 PM	Bubbler valve closed
8/21/2012	6:08:42 PM	Helium valve opened
8/21/2012	6:08:42 PM	Main Vac valve opened
8/21/2012	6:08:42 PM	Helium MFC set to  20.000000
8/21/2012	6:08:42 PM	H2 MFC set to  0.000000
8/21/2012	6:08:42 PM	BCl3 MFC set to  0.000000
8/21/2012	6:08:42 PM	PH3 MFC set to  0.000000
8/21/2012	6:08:42 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:08:42 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:08:42 PM	Tube furnace set to 150
8/21/2012	6:09:12 PM	Helium valve closed
8/21/2012	6:09:12 PM	H2 valve closed
8/21/2012	6:09:12 PM	BCl3 valve closed
8/21/2012	6:09:12 PM	PH3 valve closed
8/21/2012	6:09:12 PM	SiCl4 pre valve closed
8/21/2012	6:09:12 PM	SiCl4 post valve closed
8/21/2012	6:09:12 PM	Bypass valve closed
8/21/2012	6:09:12 PM	Bubbler valve closed
8/21/2012	6:09:12 PM	Main Vac valve opened
8/21/2012	6:09:12 PM	Helium MFC set to  0.000000
8/21/2012	6:09:12 PM	H2 MFC set to  0.000000
8/21/2012	6:09:12 PM	BCl3 MFC set to  0.000000
8/21/2012	6:09:12 PM	PH3 MFC set to  0.000000
8/21/2012	6:09:12 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:09:12 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:09:12 PM	Tube furnace set to 150
8/21/2012	6:09:42 PM	H2 valve closed
8/21/2012	6:09:42 PM	BCl3 valve closed
8/21/2012	6:09:42 PM	PH3 valve closed
8/21/2012	6:09:42 PM	SiCl4 pre valve closed
8/21/2012	6:09:42 PM	SiCl4 post valve closed
8/21/2012	6:09:42 PM	Bypass valve closed
8/21/2012	6:09:42 PM	Bubbler valve closed
8/21/2012	6:09:42 PM	Helium valve opened
8/21/2012	6:09:42 PM	Main Vac valve opened
8/21/2012	6:09:42 PM	Helium MFC set to  20.000000
8/21/2012	6:09:42 PM	H2 MFC set to  0.000000
8/21/2012	6:09:42 PM	BCl3 MFC set to  0.000000
8/21/2012	6:09:42 PM	PH3 MFC set to  0.000000
8/21/2012	6:09:42 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:09:42 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:09:42 PM	Tube furnace set to 150
8/21/2012	6:10:12 PM	Helium valve closed
8/21/2012	6:10:12 PM	H2 valve closed
8/21/2012	6:10:12 PM	BCl3 valve closed
8/21/2012	6:10:12 PM	PH3 valve closed
8/21/2012	6:10:12 PM	SiCl4 pre valve closed
8/21/2012	6:10:12 PM	SiCl4 post valve closed
8/21/2012	6:10:12 PM	Bypass valve closed
8/21/2012	6:10:12 PM	Bubbler valve closed
8/21/2012	6:10:12 PM	Main Vac valve opened
8/21/2012	6:10:12 PM	Helium MFC set to  0.000000
8/21/2012	6:10:13 PM	H2 MFC set to  0.000000
8/21/2012	6:10:13 PM	BCl3 MFC set to  0.000000
8/21/2012	6:10:13 PM	PH3 MFC set to  0.000000
8/21/2012	6:10:13 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:10:13 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:10:13 PM	Tube furnace set to 150
8/21/2012	6:10:31 PM	Run aborted at 6:10 PM
8/21/2012	6:10:31 PM	Helium valve closed
8/21/2012	6:10:31 PM	H2 valve closed
8/21/2012	6:10:31 PM	BCl3 valve closed
8/21/2012	6:10:31 PM	PH3 valve closed
8/21/2012	6:10:31 PM	SiCl4 pre valve closed
8/21/2012	6:10:31 PM	SiCl4 post valve closed
8/21/2012	6:10:31 PM	Bypass valve closed
8/21/2012	6:10:31 PM	Main Vac valve closed
8/21/2012	6:10:31 PM	Bubbler valve closed
8/21/2012	6:10:31 PM	Helium MFC set to  0.000000
8/21/2012	6:10:31 PM	H2 MFC set to  0.000000
8/21/2012	6:10:31 PM	BCl3 MFC set to  0.000000
8/21/2012	6:10:31 PM	PH3 MFC set to  0.000000
8/21/2012	6:10:31 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:10:31 PM	Tube furnace set to 0
8/21/2012	6:10:34 PM	Main Vac valve opened
8/21/2012	6:10:49 PM	Main Vac valve closed
8/21/2012	6:11:00 PM	Main Vac valve opened
8/21/2012	6:11:45 PM	Recipe started at 6:11 PM
8/21/2012	6:11:45 PM	Helium valve closed
8/21/2012	6:11:45 PM	H2 valve closed
8/21/2012	6:11:45 PM	BCl3 valve closed
8/21/2012	6:11:45 PM	PH3 valve closed
8/21/2012	6:11:45 PM	SiCl4 pre valve closed
8/21/2012	6:11:45 PM	SiCl4 post valve closed
8/21/2012	6:11:45 PM	Main Vac valve closed
8/21/2012	6:11:45 PM	Bypass valve closed
8/21/2012	6:11:45 PM	Bubbler valve closed
8/21/2012	6:11:45 PM	Helium MFC set to  0.000000
8/21/2012	6:11:45 PM	H2 MFC set to  0.000000
8/21/2012	6:11:45 PM	BCl3 MFC set to  0.000000
8/21/2012	6:11:45 PM	PH3 MFC set to  0.000000
8/21/2012	6:11:45 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:11:45 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:11:45 PM	Tube furnace set to 0
8/21/2012	6:11:48 PM	Helium valve closed
8/21/2012	6:11:48 PM	BCl3 valve closed
8/21/2012	6:11:48 PM	PH3 valve closed
8/21/2012	6:11:48 PM	SiCl4 pre valve closed
8/21/2012	6:11:48 PM	SiCl4 post valve closed
8/21/2012	6:11:48 PM	Main Vac valve closed
8/21/2012	6:11:48 PM	Bypass valve closed
8/21/2012	6:11:48 PM	Bubbler valve closed
8/21/2012	6:11:48 PM	H2 valve opened
8/21/2012	6:11:48 PM	Helium MFC set to  0.000000
8/21/2012	6:11:48 PM	H2 MFC set to  500.000000
8/21/2012	6:11:48 PM	BCl3 MFC set to  0.000000
8/21/2012	6:11:48 PM	PH3 MFC set to  0.000000
8/21/2012	6:11:48 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:11:48 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:11:48 PM	Tube furnace set to 50
8/21/2012	6:13:00 PM	Helium valve closed
8/21/2012	6:13:00 PM	BCl3 valve closed
8/21/2012	6:13:00 PM	PH3 valve closed
8/21/2012	6:13:00 PM	SiCl4 pre valve closed
8/21/2012	6:13:00 PM	SiCl4 post valve closed
8/21/2012	6:13:00 PM	Main Vac valve closed
8/21/2012	6:13:00 PM	Bypass valve closed
8/21/2012	6:13:00 PM	H2 valve opened
8/21/2012	6:13:00 PM	Bubbler valve opened
8/21/2012	6:13:00 PM	Helium MFC set to  0.000000
8/21/2012	6:13:00 PM	H2 MFC set to  500.000000
8/21/2012	6:13:00 PM	BCl3 MFC set to  0.000000
8/21/2012	6:13:00 PM	PH3 MFC set to  0.000000
8/21/2012	6:13:00 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:13:00 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:13:00 PM	Tube furnace set to 50
8/21/2012	6:13:01 PM	Helium valve closed
8/21/2012	6:13:01 PM	BCl3 valve closed
8/21/2012	6:13:01 PM	PH3 valve closed
8/21/2012	6:13:01 PM	SiCl4 pre valve closed
8/21/2012	6:13:01 PM	SiCl4 post valve closed
8/21/2012	6:13:01 PM	Main Vac valve closed
8/21/2012	6:13:01 PM	Bypass valve closed
8/21/2012	6:13:01 PM	H2 valve opened
8/21/2012	6:13:01 PM	Bubbler valve opened
8/21/2012	6:13:01 PM	Helium MFC set to  0.000000
8/21/2012	6:13:01 PM	H2 MFC set to  450.000000
8/21/2012	6:13:01 PM	BCl3 MFC set to  0.000000
8/21/2012	6:13:01 PM	PH3 MFC set to  0.000000
8/21/2012	6:13:01 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:13:01 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:13:01 PM	Tube furnace set to 1000
8/21/2012	6:33:01 PM	Helium valve closed
8/21/2012	6:33:01 PM	PH3 valve closed
8/21/2012	6:33:01 PM	Main Vac valve closed
8/21/2012	6:33:01 PM	Bypass valve closed
8/21/2012	6:33:01 PM	H2 valve opened
8/21/2012	6:33:01 PM	BCl3 valve opened
8/21/2012	6:33:01 PM	SiCl4 pre valve opened
8/21/2012	6:33:01 PM	SiCl4 post valve opened
8/21/2012	6:33:01 PM	Bubbler valve opened
8/21/2012	6:33:01 PM	Helium MFC set to  0.000000
8/21/2012	6:33:01 PM	H2 MFC set to  450.000000
8/21/2012	6:33:01 PM	BCl3 MFC set to  1.200000
8/21/2012	6:33:01 PM	PH3 MFC set to  0.000000
8/21/2012	6:33:01 PM	SiCl4 MFC set to  50.000000
8/21/2012	6:33:01 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:33:02 PM	Tube furnace set to 1000
8/21/2012	6:48:02 PM	Helium valve closed
8/21/2012	6:48:02 PM	BCl3 valve closed
8/21/2012	6:48:02 PM	PH3 valve closed
8/21/2012	6:48:02 PM	SiCl4 pre valve closed
8/21/2012	6:48:02 PM	SiCl4 post valve closed
8/21/2012	6:48:02 PM	Main Vac valve closed
8/21/2012	6:48:02 PM	Bypass valve closed
8/21/2012	6:48:02 PM	H2 valve opened
8/21/2012	6:48:02 PM	Bubbler valve opened
8/21/2012	6:48:02 PM	Helium MFC set to  0.000000
8/21/2012	6:48:02 PM	H2 MFC set to  500.000000
8/21/2012	6:48:02 PM	BCl3 MFC set to  0.000000
8/21/2012	6:48:02 PM	PH3 MFC set to  0.000000
8/21/2012	6:48:02 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:48:02 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:48:02 PM	Tube furnace set to 750
8/21/2012	6:58:02 PM	H2 valve closed
8/21/2012	6:58:02 PM	BCl3 valve closed
8/21/2012	6:58:02 PM	PH3 valve closed
8/21/2012	6:58:02 PM	SiCl4 pre valve closed
8/21/2012	6:58:02 PM	SiCl4 post valve closed
8/21/2012	6:58:02 PM	Main Vac valve closed
8/21/2012	6:58:02 PM	Bypass valve closed
8/21/2012	6:58:02 PM	Helium valve opened
8/21/2012	6:58:02 PM	Bubbler valve opened
8/21/2012	6:58:02 PM	Helium MFC set to  400.000000
8/21/2012	6:58:02 PM	H2 MFC set to  0.000000
8/21/2012	6:58:02 PM	BCl3 MFC set to  0.000000
8/21/2012	6:58:02 PM	PH3 MFC set to  0.000000
8/21/2012	6:58:02 PM	SiCl4 MFC set to  0.000000
8/21/2012	6:58:02 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	6:58:02 PM	Tube furnace set to 0
8/21/2012	7:09:55 PM	Run aborted at 7:09 PM
8/21/2012	7:09:55 PM	Helium valve closed
8/21/2012	7:09:55 PM	H2 valve closed
8/21/2012	7:09:55 PM	BCl3 valve closed
8/21/2012	7:09:55 PM	PH3 valve closed
8/21/2012	7:09:55 PM	SiCl4 pre valve closed
8/21/2012	7:09:55 PM	SiCl4 post valve closed
8/21/2012	7:09:55 PM	Bypass valve closed
8/21/2012	7:09:55 PM	Main Vac valve closed
8/21/2012	7:09:55 PM	Bubbler valve closed
8/21/2012	7:09:55 PM	Helium MFC set to  0.000000
8/21/2012	7:09:55 PM	H2 MFC set to  0.000000
8/21/2012	7:09:55 PM	BCl3 MFC set to  0.000000
8/21/2012	7:09:55 PM	PH3 MFC set to  0.000000
8/21/2012	7:09:55 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:09:55 PM	Tube furnace set to 0
8/21/2012	7:09:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	7:09:58 PM	Recipe started at 7:09 PM
8/21/2012	7:09:58 PM	Helium valve closed
8/21/2012	7:09:58 PM	H2 valve closed
8/21/2012	7:09:58 PM	BCl3 valve closed
8/21/2012	7:09:58 PM	PH3 valve closed
8/21/2012	7:09:58 PM	SiCl4 pre valve closed
8/21/2012	7:09:58 PM	SiCl4 post valve closed
8/21/2012	7:09:58 PM	Main Vac valve closed
8/21/2012	7:09:58 PM	Bypass valve closed
8/21/2012	7:09:58 PM	Bubbler valve closed
8/21/2012	7:09:58 PM	Helium MFC set to  0.000000
8/21/2012	7:09:58 PM	H2 MFC set to  0.000000
8/21/2012	7:09:58 PM	BCl3 MFC set to  0.000000
8/21/2012	7:09:58 PM	PH3 MFC set to  0.000000
8/21/2012	7:09:58 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:09:58 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:09:58 PM	Tube furnace set to 0
8/21/2012	7:10:01 PM	H2 valve closed
8/21/2012	7:10:01 PM	BCl3 valve closed
8/21/2012	7:10:01 PM	PH3 valve closed
8/21/2012	7:10:01 PM	SiCl4 pre valve closed
8/21/2012	7:10:01 PM	SiCl4 post valve closed
8/21/2012	7:10:01 PM	Main Vac valve closed
8/21/2012	7:10:01 PM	Bypass valve closed
8/21/2012	7:10:01 PM	Bubbler valve closed
8/21/2012	7:10:01 PM	Helium valve opened
8/21/2012	7:10:01 PM	Helium MFC set to  500.000000
8/21/2012	7:10:01 PM	H2 MFC set to  0.000000
8/21/2012	7:10:01 PM	BCl3 MFC set to  0.000000
8/21/2012	7:10:01 PM	PH3 MFC set to  0.000000
8/21/2012	7:10:01 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:10:01 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:10:01 PM	Tube furnace set to 0
8/21/2012	7:10:02 PM	Helium valve closed
8/21/2012	7:10:02 PM	H2 valve closed
8/21/2012	7:10:02 PM	BCl3 valve closed
8/21/2012	7:10:02 PM	PH3 valve closed
8/21/2012	7:10:02 PM	SiCl4 pre valve closed
8/21/2012	7:10:02 PM	SiCl4 post valve closed
8/21/2012	7:10:02 PM	Main Vac valve closed
8/21/2012	7:10:02 PM	Bypass valve closed
8/21/2012	7:10:02 PM	Bubbler valve closed
8/21/2012	7:10:02 PM	Helium MFC set to  0.000000
8/21/2012	7:10:02 PM	H2 MFC set to  0.000000
8/21/2012	7:10:02 PM	BCl3 MFC set to  0.000000
8/21/2012	7:10:02 PM	PH3 MFC set to  0.000000
8/21/2012	7:10:02 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:10:02 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:10:02 PM	Tube furnace set to 0
8/21/2012	7:10:03 PM	Run finished at 7:10 PM
8/21/2012	7:10:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	7:16:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	7:16:44 PM	Recipe started at 7:16 PM
8/21/2012	7:16:44 PM	Helium valve closed
8/21/2012	7:16:44 PM	H2 valve closed
8/21/2012	7:16:44 PM	BCl3 valve closed
8/21/2012	7:16:44 PM	PH3 valve closed
8/21/2012	7:16:44 PM	SiCl4 pre valve closed
8/21/2012	7:16:44 PM	SiCl4 post valve closed
8/21/2012	7:16:44 PM	Main Vac valve closed
8/21/2012	7:16:44 PM	Bubbler valve closed
8/21/2012	7:16:44 PM	Bypass valve opened
8/21/2012	7:16:44 PM	Helium MFC set to  0.000000
8/21/2012	7:16:44 PM	H2 MFC set to  0.000000
8/21/2012	7:16:44 PM	BCl3 MFC set to  0.000000
8/21/2012	7:16:44 PM	PH3 MFC set to  0.000000
8/21/2012	7:16:44 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:16:44 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:16:44 PM	Tube furnace set to 0
8/21/2012	7:18:04 PM	Helium valve closed
8/21/2012	7:18:04 PM	H2 valve closed
8/21/2012	7:18:04 PM	BCl3 valve closed
8/21/2012	7:18:04 PM	PH3 valve closed
8/21/2012	7:18:04 PM	SiCl4 pre valve closed
8/21/2012	7:18:04 PM	SiCl4 post valve closed
8/21/2012	7:18:04 PM	Main Vac valve closed
8/21/2012	7:18:04 PM	Bubbler valve closed
8/21/2012	7:18:04 PM	Bypass valve opened
8/21/2012	7:18:04 PM	Helium MFC set to  0.000000
8/21/2012	7:18:04 PM	H2 MFC set to  0.000000
8/21/2012	7:18:04 PM	BCl3 MFC set to  0.000000
8/21/2012	7:18:04 PM	PH3 MFC set to  0.000000
8/21/2012	7:18:04 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:18:04 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:18:04 PM	Tube furnace set to 0
8/21/2012	7:19:04 PM	Helium valve closed
8/21/2012	7:19:04 PM	H2 valve closed
8/21/2012	7:19:04 PM	BCl3 valve closed
8/21/2012	7:19:04 PM	PH3 valve closed
8/21/2012	7:19:04 PM	SiCl4 pre valve closed
8/21/2012	7:19:04 PM	SiCl4 post valve closed
8/21/2012	7:19:04 PM	Bypass valve closed
8/21/2012	7:19:04 PM	Bubbler valve closed
8/21/2012	7:19:04 PM	Main Vac valve opened
8/21/2012	7:19:04 PM	Helium MFC set to  0.000000
8/21/2012	7:19:04 PM	H2 MFC set to  0.000000
8/21/2012	7:19:04 PM	BCl3 MFC set to  0.000000
8/21/2012	7:19:04 PM	PH3 MFC set to  0.000000
8/21/2012	7:19:04 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:19:04 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:19:04 PM	Tube furnace set to 0
8/21/2012	7:19:05 PM	Run finished at 7:19 PM
8/21/2012	7:19:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	7:46:00 PM	Recipe started at 7:45 PM
8/21/2012	7:46:00 PM	Helium valve closed
8/21/2012	7:46:00 PM	H2 valve closed
8/21/2012	7:46:00 PM	BCl3 valve closed
8/21/2012	7:46:00 PM	PH3 valve closed
8/21/2012	7:46:00 PM	SiCl4 pre valve closed
8/21/2012	7:46:00 PM	SiCl4 post valve closed
8/21/2012	7:46:00 PM	Main Vac valve closed
8/21/2012	7:46:00 PM	Bubbler valve closed
8/21/2012	7:46:00 PM	Bypass valve opened
8/21/2012	7:46:00 PM	Helium MFC set to  0.000000
8/21/2012	7:46:00 PM	H2 MFC set to  0.000000
8/21/2012	7:46:00 PM	BCl3 MFC set to  0.000000
8/21/2012	7:46:00 PM	PH3 MFC set to  0.000000
8/21/2012	7:46:00 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:46:00 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:46:00 PM	Tube furnace set to 150
8/21/2012	7:46:00 PM	Helium valve closed
8/21/2012	7:46:00 PM	H2 valve closed
8/21/2012	7:46:00 PM	BCl3 valve closed
8/21/2012	7:46:00 PM	PH3 valve closed
8/21/2012	7:46:00 PM	SiCl4 pre valve closed
8/21/2012	7:46:00 PM	SiCl4 post valve closed
8/21/2012	7:46:00 PM	Main Vac valve closed
8/21/2012	7:46:00 PM	Bubbler valve closed
8/21/2012	7:46:00 PM	Bypass valve opened
8/21/2012	7:46:00 PM	Helium MFC set to  0.000000
8/21/2012	7:46:00 PM	H2 MFC set to  0.000000
8/21/2012	7:46:00 PM	BCl3 MFC set to  0.000000
8/21/2012	7:46:00 PM	PH3 MFC set to  0.000000
8/21/2012	7:46:00 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:46:00 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:46:00 PM	Tube furnace set to 150
8/21/2012	7:46:03 PM	Helium valve closed
8/21/2012	7:46:03 PM	H2 valve closed
8/21/2012	7:46:03 PM	BCl3 valve closed
8/21/2012	7:46:03 PM	PH3 valve closed
8/21/2012	7:46:03 PM	SiCl4 pre valve closed
8/21/2012	7:46:03 PM	SiCl4 post valve closed
8/21/2012	7:46:03 PM	Bypass valve closed
8/21/2012	7:46:03 PM	Bubbler valve closed
8/21/2012	7:46:03 PM	Main Vac valve opened
8/21/2012	7:46:03 PM	Helium MFC set to  0.000000
8/21/2012	7:46:03 PM	H2 MFC set to  0.000000
8/21/2012	7:46:03 PM	BCl3 MFC set to  0.000000
8/21/2012	7:46:03 PM	PH3 MFC set to  0.000000
8/21/2012	7:46:03 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:46:03 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:46:03 PM	Tube furnace set to 150
8/21/2012	7:46:04 PM	H2 valve closed
8/21/2012	7:46:04 PM	BCl3 valve closed
8/21/2012	7:46:04 PM	PH3 valve closed
8/21/2012	7:46:04 PM	SiCl4 pre valve closed
8/21/2012	7:46:04 PM	SiCl4 post valve closed
8/21/2012	7:46:04 PM	Bypass valve closed
8/21/2012	7:46:04 PM	Bubbler valve closed
8/21/2012	7:46:04 PM	Helium valve opened
8/21/2012	7:46:04 PM	Main Vac valve opened
8/21/2012	7:46:04 PM	Helium MFC set to  20.000000
8/21/2012	7:46:04 PM	H2 MFC set to  0.000000
8/21/2012	7:46:04 PM	BCl3 MFC set to  0.000000
8/21/2012	7:46:04 PM	PH3 MFC set to  0.000000
8/21/2012	7:46:04 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:46:04 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:46:04 PM	Tube furnace set to 150
8/21/2012	7:46:34 PM	Helium valve closed
8/21/2012	7:46:34 PM	H2 valve closed
8/21/2012	7:46:34 PM	BCl3 valve closed
8/21/2012	7:46:34 PM	PH3 valve closed
8/21/2012	7:46:34 PM	SiCl4 pre valve closed
8/21/2012	7:46:34 PM	SiCl4 post valve closed
8/21/2012	7:46:34 PM	Bypass valve closed
8/21/2012	7:46:34 PM	Bubbler valve closed
8/21/2012	7:46:34 PM	Main Vac valve opened
8/21/2012	7:46:34 PM	Helium MFC set to  0.000000
8/21/2012	7:46:34 PM	H2 MFC set to  0.000000
8/21/2012	7:46:34 PM	BCl3 MFC set to  0.000000
8/21/2012	7:46:34 PM	PH3 MFC set to  0.000000
8/21/2012	7:46:34 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:46:34 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:46:35 PM	Tube furnace set to 150
8/21/2012	7:47:05 PM	H2 valve closed
8/21/2012	7:47:05 PM	BCl3 valve closed
8/21/2012	7:47:05 PM	PH3 valve closed
8/21/2012	7:47:05 PM	SiCl4 pre valve closed
8/21/2012	7:47:05 PM	SiCl4 post valve closed
8/21/2012	7:47:05 PM	Bypass valve closed
8/21/2012	7:47:05 PM	Bubbler valve closed
8/21/2012	7:47:05 PM	Helium valve opened
8/21/2012	7:47:05 PM	Main Vac valve opened
8/21/2012	7:47:05 PM	Helium MFC set to  20.000000
8/21/2012	7:47:05 PM	H2 MFC set to  0.000000
8/21/2012	7:47:05 PM	BCl3 MFC set to  0.000000
8/21/2012	7:47:05 PM	PH3 MFC set to  0.000000
8/21/2012	7:47:05 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:47:05 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:47:05 PM	Tube furnace set to 150
8/21/2012	7:47:35 PM	Helium valve closed
8/21/2012	7:47:35 PM	H2 valve closed
8/21/2012	7:47:35 PM	BCl3 valve closed
8/21/2012	7:47:35 PM	PH3 valve closed
8/21/2012	7:47:35 PM	SiCl4 pre valve closed
8/21/2012	7:47:35 PM	SiCl4 post valve closed
8/21/2012	7:47:35 PM	Bypass valve closed
8/21/2012	7:47:35 PM	Bubbler valve closed
8/21/2012	7:47:35 PM	Main Vac valve opened
8/21/2012	7:47:35 PM	Helium MFC set to  0.000000
8/21/2012	7:47:35 PM	H2 MFC set to  0.000000
8/21/2012	7:47:35 PM	BCl3 MFC set to  0.000000
8/21/2012	7:47:35 PM	PH3 MFC set to  0.000000
8/21/2012	7:47:35 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:47:35 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:47:35 PM	Tube furnace set to 150
8/21/2012	7:48:05 PM	H2 valve closed
8/21/2012	7:48:05 PM	BCl3 valve closed
8/21/2012	7:48:05 PM	PH3 valve closed
8/21/2012	7:48:05 PM	SiCl4 pre valve closed
8/21/2012	7:48:05 PM	SiCl4 post valve closed
8/21/2012	7:48:05 PM	Bypass valve closed
8/21/2012	7:48:05 PM	Bubbler valve closed
8/21/2012	7:48:05 PM	Helium valve opened
8/21/2012	7:48:05 PM	Main Vac valve opened
8/21/2012	7:48:05 PM	Helium MFC set to  20.000000
8/21/2012	7:48:05 PM	H2 MFC set to  0.000000
8/21/2012	7:48:05 PM	BCl3 MFC set to  0.000000
8/21/2012	7:48:05 PM	PH3 MFC set to  0.000000
8/21/2012	7:48:05 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:48:05 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:48:05 PM	Tube furnace set to 150
8/21/2012	7:48:35 PM	Helium valve closed
8/21/2012	7:48:35 PM	H2 valve closed
8/21/2012	7:48:35 PM	BCl3 valve closed
8/21/2012	7:48:35 PM	PH3 valve closed
8/21/2012	7:48:35 PM	SiCl4 pre valve closed
8/21/2012	7:48:35 PM	SiCl4 post valve closed
8/21/2012	7:48:35 PM	Bypass valve closed
8/21/2012	7:48:35 PM	Bubbler valve closed
8/21/2012	7:48:35 PM	Main Vac valve opened
8/21/2012	7:48:35 PM	Helium MFC set to  0.000000
8/21/2012	7:48:35 PM	H2 MFC set to  0.000000
8/21/2012	7:48:35 PM	BCl3 MFC set to  0.000000
8/21/2012	7:48:35 PM	PH3 MFC set to  0.000000
8/21/2012	7:48:35 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:48:35 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:48:36 PM	Tube furnace set to 150
8/21/2012	7:49:06 PM	H2 valve closed
8/21/2012	7:49:06 PM	BCl3 valve closed
8/21/2012	7:49:06 PM	PH3 valve closed
8/21/2012	7:49:06 PM	SiCl4 pre valve closed
8/21/2012	7:49:06 PM	SiCl4 post valve closed
8/21/2012	7:49:06 PM	Bypass valve closed
8/21/2012	7:49:06 PM	Bubbler valve closed
8/21/2012	7:49:06 PM	Helium valve opened
8/21/2012	7:49:06 PM	Main Vac valve opened
8/21/2012	7:49:06 PM	Helium MFC set to  20.000000
8/21/2012	7:49:06 PM	H2 MFC set to  0.000000
8/21/2012	7:49:06 PM	BCl3 MFC set to  0.000000
8/21/2012	7:49:06 PM	PH3 MFC set to  0.000000
8/21/2012	7:49:06 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:49:06 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:49:06 PM	Tube furnace set to 150
8/21/2012	7:49:36 PM	Helium valve closed
8/21/2012	7:49:36 PM	H2 valve closed
8/21/2012	7:49:36 PM	BCl3 valve closed
8/21/2012	7:49:36 PM	PH3 valve closed
8/21/2012	7:49:36 PM	SiCl4 pre valve closed
8/21/2012	7:49:36 PM	SiCl4 post valve closed
8/21/2012	7:49:36 PM	Bypass valve closed
8/21/2012	7:49:36 PM	Bubbler valve closed
8/21/2012	7:49:36 PM	Main Vac valve opened
8/21/2012	7:49:36 PM	Helium MFC set to  0.000000
8/21/2012	7:49:36 PM	H2 MFC set to  0.000000
8/21/2012	7:49:36 PM	BCl3 MFC set to  0.000000
8/21/2012	7:49:36 PM	PH3 MFC set to  0.000000
8/21/2012	7:49:36 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:49:36 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:49:36 PM	Tube furnace set to 150
8/21/2012	7:50:06 PM	H2 valve closed
8/21/2012	7:50:06 PM	BCl3 valve closed
8/21/2012	7:50:06 PM	PH3 valve closed
8/21/2012	7:50:06 PM	SiCl4 pre valve closed
8/21/2012	7:50:06 PM	SiCl4 post valve closed
8/21/2012	7:50:06 PM	Bypass valve closed
8/21/2012	7:50:06 PM	Bubbler valve closed
8/21/2012	7:50:06 PM	Helium valve opened
8/21/2012	7:50:06 PM	Main Vac valve opened
8/21/2012	7:50:06 PM	Helium MFC set to  20.000000
8/21/2012	7:50:06 PM	H2 MFC set to  0.000000
8/21/2012	7:50:06 PM	BCl3 MFC set to  0.000000
8/21/2012	7:50:06 PM	PH3 MFC set to  0.000000
8/21/2012	7:50:06 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:50:06 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:50:06 PM	Tube furnace set to 150
8/21/2012	7:50:36 PM	Helium valve closed
8/21/2012	7:50:36 PM	H2 valve closed
8/21/2012	7:50:36 PM	BCl3 valve closed
8/21/2012	7:50:36 PM	PH3 valve closed
8/21/2012	7:50:36 PM	SiCl4 pre valve closed
8/21/2012	7:50:36 PM	SiCl4 post valve closed
8/21/2012	7:50:36 PM	Bypass valve closed
8/21/2012	7:50:36 PM	Bubbler valve closed
8/21/2012	7:50:36 PM	Main Vac valve opened
8/21/2012	7:50:36 PM	Helium MFC set to  0.000000
8/21/2012	7:50:36 PM	H2 MFC set to  0.000000
8/21/2012	7:50:36 PM	BCl3 MFC set to  0.000000
8/21/2012	7:50:36 PM	PH3 MFC set to  0.000000
8/21/2012	7:50:36 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:50:36 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:50:36 PM	Tube furnace set to 150
8/21/2012	7:51:06 PM	H2 valve closed
8/21/2012	7:51:06 PM	BCl3 valve closed
8/21/2012	7:51:06 PM	PH3 valve closed
8/21/2012	7:51:06 PM	SiCl4 pre valve closed
8/21/2012	7:51:07 PM	SiCl4 post valve closed
8/21/2012	7:51:07 PM	Bypass valve closed
8/21/2012	7:51:07 PM	Bubbler valve closed
8/21/2012	7:51:07 PM	Helium valve opened
8/21/2012	7:51:07 PM	Main Vac valve opened
8/21/2012	7:51:07 PM	Helium MFC set to  20.000000
8/21/2012	7:51:07 PM	H2 MFC set to  0.000000
8/21/2012	7:51:07 PM	BCl3 MFC set to  0.000000
8/21/2012	7:51:07 PM	PH3 MFC set to  0.000000
8/21/2012	7:51:07 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:51:07 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:51:07 PM	Tube furnace set to 150
8/21/2012	7:51:37 PM	Helium valve closed
8/21/2012	7:51:37 PM	H2 valve closed
8/21/2012	7:51:37 PM	BCl3 valve closed
8/21/2012	7:51:37 PM	PH3 valve closed
8/21/2012	7:51:37 PM	SiCl4 pre valve closed
8/21/2012	7:51:37 PM	SiCl4 post valve closed
8/21/2012	7:51:37 PM	Bypass valve closed
8/21/2012	7:51:37 PM	Bubbler valve closed
8/21/2012	7:51:37 PM	Main Vac valve opened
8/21/2012	7:51:37 PM	Helium MFC set to  0.000000
8/21/2012	7:51:37 PM	H2 MFC set to  0.000000
8/21/2012	7:51:37 PM	BCl3 MFC set to  0.000000
8/21/2012	7:51:37 PM	PH3 MFC set to  0.000000
8/21/2012	7:51:37 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:51:37 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:51:37 PM	Tube furnace set to 150
8/21/2012	7:52:07 PM	H2 valve closed
8/21/2012	7:52:07 PM	BCl3 valve closed
8/21/2012	7:52:07 PM	PH3 valve closed
8/21/2012	7:52:07 PM	SiCl4 pre valve closed
8/21/2012	7:52:07 PM	SiCl4 post valve closed
8/21/2012	7:52:07 PM	Bypass valve closed
8/21/2012	7:52:07 PM	Bubbler valve closed
8/21/2012	7:52:07 PM	Helium valve opened
8/21/2012	7:52:07 PM	Main Vac valve opened
8/21/2012	7:52:07 PM	Helium MFC set to  20.000000
8/21/2012	7:52:07 PM	H2 MFC set to  0.000000
8/21/2012	7:52:07 PM	BCl3 MFC set to  0.000000
8/21/2012	7:52:07 PM	PH3 MFC set to  0.000000
8/21/2012	7:52:07 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:52:07 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:52:07 PM	Tube furnace set to 150
8/21/2012	7:52:37 PM	Helium valve closed
8/21/2012	7:52:37 PM	H2 valve closed
8/21/2012	7:52:37 PM	BCl3 valve closed
8/21/2012	7:52:37 PM	PH3 valve closed
8/21/2012	7:52:37 PM	SiCl4 pre valve closed
8/21/2012	7:52:37 PM	SiCl4 post valve closed
8/21/2012	7:52:37 PM	Bypass valve closed
8/21/2012	7:52:37 PM	Bubbler valve closed
8/21/2012	7:52:37 PM	Main Vac valve opened
8/21/2012	7:52:37 PM	Helium MFC set to  0.000000
8/21/2012	7:52:37 PM	H2 MFC set to  0.000000
8/21/2012	7:52:37 PM	BCl3 MFC set to  0.000000
8/21/2012	7:52:37 PM	PH3 MFC set to  0.000000
8/21/2012	7:52:37 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:52:37 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:52:37 PM	Tube furnace set to 150
8/21/2012	7:53:07 PM	H2 valve closed
8/21/2012	7:53:07 PM	BCl3 valve closed
8/21/2012	7:53:07 PM	PH3 valve closed
8/21/2012	7:53:07 PM	SiCl4 pre valve closed
8/21/2012	7:53:07 PM	SiCl4 post valve closed
8/21/2012	7:53:07 PM	Bypass valve closed
8/21/2012	7:53:07 PM	Bubbler valve closed
8/21/2012	7:53:07 PM	Helium valve opened
8/21/2012	7:53:07 PM	Main Vac valve opened
8/21/2012	7:53:07 PM	Helium MFC set to  20.000000
8/21/2012	7:53:07 PM	H2 MFC set to  0.000000
8/21/2012	7:53:07 PM	BCl3 MFC set to  0.000000
8/21/2012	7:53:07 PM	PH3 MFC set to  0.000000
8/21/2012	7:53:07 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:53:07 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:53:08 PM	Tube furnace set to 150
8/21/2012	7:53:38 PM	Helium valve closed
8/21/2012	7:53:38 PM	H2 valve closed
8/21/2012	7:53:38 PM	BCl3 valve closed
8/21/2012	7:53:38 PM	PH3 valve closed
8/21/2012	7:53:38 PM	SiCl4 pre valve closed
8/21/2012	7:53:38 PM	SiCl4 post valve closed
8/21/2012	7:53:38 PM	Bypass valve closed
8/21/2012	7:53:38 PM	Bubbler valve closed
8/21/2012	7:53:38 PM	Main Vac valve opened
8/21/2012	7:53:38 PM	Helium MFC set to  0.000000
8/21/2012	7:53:38 PM	H2 MFC set to  0.000000
8/21/2012	7:53:38 PM	BCl3 MFC set to  0.000000
8/21/2012	7:53:38 PM	PH3 MFC set to  0.000000
8/21/2012	7:53:38 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:53:38 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:53:38 PM	Tube furnace set to 150
8/21/2012	7:54:08 PM	H2 valve closed
8/21/2012	7:54:08 PM	BCl3 valve closed
8/21/2012	7:54:08 PM	PH3 valve closed
8/21/2012	7:54:08 PM	SiCl4 pre valve closed
8/21/2012	7:54:08 PM	SiCl4 post valve closed
8/21/2012	7:54:08 PM	Bypass valve closed
8/21/2012	7:54:08 PM	Bubbler valve closed
8/21/2012	7:54:08 PM	Helium valve opened
8/21/2012	7:54:08 PM	Main Vac valve opened
8/21/2012	7:54:08 PM	Helium MFC set to  20.000000
8/21/2012	7:54:08 PM	H2 MFC set to  0.000000
8/21/2012	7:54:08 PM	BCl3 MFC set to  0.000000
8/21/2012	7:54:08 PM	PH3 MFC set to  0.000000
8/21/2012	7:54:08 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:54:08 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:54:08 PM	Tube furnace set to 150
8/21/2012	7:54:38 PM	Helium valve closed
8/21/2012	7:54:38 PM	H2 valve closed
8/21/2012	7:54:38 PM	BCl3 valve closed
8/21/2012	7:54:38 PM	PH3 valve closed
8/21/2012	7:54:38 PM	SiCl4 pre valve closed
8/21/2012	7:54:38 PM	SiCl4 post valve closed
8/21/2012	7:54:38 PM	Bypass valve closed
8/21/2012	7:54:38 PM	Bubbler valve closed
8/21/2012	7:54:38 PM	Main Vac valve opened
8/21/2012	7:54:38 PM	Helium MFC set to  0.000000
8/21/2012	7:54:38 PM	H2 MFC set to  0.000000
8/21/2012	7:54:38 PM	BCl3 MFC set to  0.000000
8/21/2012	7:54:38 PM	PH3 MFC set to  0.000000
8/21/2012	7:54:38 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:54:38 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:54:38 PM	Tube furnace set to 150
8/21/2012	7:55:08 PM	H2 valve closed
8/21/2012	7:55:08 PM	BCl3 valve closed
8/21/2012	7:55:08 PM	PH3 valve closed
8/21/2012	7:55:08 PM	SiCl4 pre valve closed
8/21/2012	7:55:08 PM	SiCl4 post valve closed
8/21/2012	7:55:08 PM	Bypass valve closed
8/21/2012	7:55:08 PM	Bubbler valve closed
8/21/2012	7:55:08 PM	Helium valve opened
8/21/2012	7:55:08 PM	Main Vac valve opened
8/21/2012	7:55:08 PM	Helium MFC set to  20.000000
8/21/2012	7:55:08 PM	H2 MFC set to  0.000000
8/21/2012	7:55:08 PM	BCl3 MFC set to  0.000000
8/21/2012	7:55:08 PM	PH3 MFC set to  0.000000
8/21/2012	7:55:08 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:55:08 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:55:09 PM	Tube furnace set to 150
8/21/2012	7:55:39 PM	Helium valve closed
8/21/2012	7:55:39 PM	H2 valve closed
8/21/2012	7:55:39 PM	BCl3 valve closed
8/21/2012	7:55:39 PM	PH3 valve closed
8/21/2012	7:55:39 PM	SiCl4 pre valve closed
8/21/2012	7:55:39 PM	SiCl4 post valve closed
8/21/2012	7:55:39 PM	Bypass valve closed
8/21/2012	7:55:39 PM	Bubbler valve closed
8/21/2012	7:55:39 PM	Main Vac valve opened
8/21/2012	7:55:39 PM	Helium MFC set to  0.000000
8/21/2012	7:55:39 PM	H2 MFC set to  0.000000
8/21/2012	7:55:39 PM	BCl3 MFC set to  0.000000
8/21/2012	7:55:39 PM	PH3 MFC set to  0.000000
8/21/2012	7:55:39 PM	SiCl4 MFC set to  0.000000
8/21/2012	7:55:39 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	7:55:39 PM	Tube furnace set to 150
8/21/2012	7:55:40 PM	Run finished at 7:55 PM
8/21/2012	8:13:29 PM	Main Vac valve closed
8/21/2012	8:13:42 PM	Main Vac valve opened
8/21/2012	8:15:01 PM	Recipe started at 8:14 PM
8/21/2012	8:15:01 PM	Helium valve closed
8/21/2012	8:15:01 PM	H2 valve closed
8/21/2012	8:15:01 PM	BCl3 valve closed
8/21/2012	8:15:01 PM	PH3 valve closed
8/21/2012	8:15:01 PM	SiCl4 pre valve closed
8/21/2012	8:15:01 PM	SiCl4 post valve closed
8/21/2012	8:15:01 PM	Main Vac valve closed
8/21/2012	8:15:01 PM	Bypass valve closed
8/21/2012	8:15:01 PM	Bubbler valve closed
8/21/2012	8:15:01 PM	Helium MFC set to  0.000000
8/21/2012	8:15:01 PM	H2 MFC set to  0.000000
8/21/2012	8:15:01 PM	BCl3 MFC set to  0.000000
8/21/2012	8:15:01 PM	PH3 MFC set to  0.000000
8/21/2012	8:15:01 PM	SiCl4 MFC set to  0.000000
8/21/2012	8:15:01 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	8:15:01 PM	Tube furnace set to 0
8/21/2012	8:15:04 PM	Helium valve closed
8/21/2012	8:15:04 PM	BCl3 valve closed
8/21/2012	8:15:04 PM	PH3 valve closed
8/21/2012	8:15:04 PM	SiCl4 pre valve closed
8/21/2012	8:15:04 PM	SiCl4 post valve closed
8/21/2012	8:15:04 PM	Main Vac valve closed
8/21/2012	8:15:04 PM	Bypass valve closed
8/21/2012	8:15:04 PM	Bubbler valve closed
8/21/2012	8:15:04 PM	H2 valve opened
8/21/2012	8:15:04 PM	Helium MFC set to  0.000000
8/21/2012	8:15:04 PM	H2 MFC set to  500.000000
8/21/2012	8:15:04 PM	BCl3 MFC set to  0.000000
8/21/2012	8:15:04 PM	PH3 MFC set to  0.000000
8/21/2012	8:15:04 PM	SiCl4 MFC set to  0.000000
8/21/2012	8:15:04 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	8:15:04 PM	Tube furnace set to 50
8/21/2012	8:16:16 PM	Helium valve closed
8/21/2012	8:16:16 PM	BCl3 valve closed
8/21/2012	8:16:16 PM	PH3 valve closed
8/21/2012	8:16:16 PM	SiCl4 pre valve closed
8/21/2012	8:16:16 PM	SiCl4 post valve closed
8/21/2012	8:16:16 PM	Main Vac valve closed
8/21/2012	8:16:16 PM	Bypass valve closed
8/21/2012	8:16:16 PM	H2 valve opened
8/21/2012	8:16:17 PM	Bubbler valve opened
8/21/2012	8:16:17 PM	Helium MFC set to  0.000000
8/21/2012	8:16:17 PM	H2 MFC set to  500.000000
8/21/2012	8:16:17 PM	BCl3 MFC set to  0.000000
8/21/2012	8:16:17 PM	PH3 MFC set to  0.000000
8/21/2012	8:16:17 PM	SiCl4 MFC set to  0.000000
8/21/2012	8:16:17 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	8:16:17 PM	Tube furnace set to 50
8/21/2012	8:16:18 PM	Helium valve closed
8/21/2012	8:16:18 PM	BCl3 valve closed
8/21/2012	8:16:18 PM	PH3 valve closed
8/21/2012	8:16:18 PM	SiCl4 pre valve closed
8/21/2012	8:16:18 PM	SiCl4 post valve closed
8/21/2012	8:16:18 PM	Main Vac valve closed
8/21/2012	8:16:18 PM	Bypass valve closed
8/21/2012	8:16:18 PM	H2 valve opened
8/21/2012	8:16:18 PM	Bubbler valve opened
8/21/2012	8:16:18 PM	Helium MFC set to  0.000000
8/21/2012	8:16:18 PM	H2 MFC set to  450.000000
8/21/2012	8:16:18 PM	BCl3 MFC set to  0.000000
8/21/2012	8:16:18 PM	PH3 MFC set to  0.000000
8/21/2012	8:16:18 PM	SiCl4 MFC set to  0.000000
8/21/2012	8:16:18 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	8:16:18 PM	Tube furnace set to 1000
8/21/2012	8:36:18 PM	Helium valve closed
8/21/2012	8:36:18 PM	PH3 valve closed
8/21/2012	8:36:18 PM	Main Vac valve closed
8/21/2012	8:36:18 PM	Bypass valve closed
8/21/2012	8:36:18 PM	H2 valve opened
8/21/2012	8:36:18 PM	BCl3 valve opened
8/21/2012	8:36:18 PM	SiCl4 pre valve opened
8/21/2012	8:36:18 PM	SiCl4 post valve opened
8/21/2012	8:36:18 PM	Bubbler valve opened
8/21/2012	8:36:18 PM	Helium MFC set to  0.000000
8/21/2012	8:36:18 PM	H2 MFC set to  450.000000
8/21/2012	8:36:18 PM	BCl3 MFC set to  1.200000
8/21/2012	8:36:18 PM	PH3 MFC set to  0.000000
8/21/2012	8:36:18 PM	SiCl4 MFC set to  50.000000
8/21/2012	8:36:18 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	8:36:18 PM	Tube furnace set to 1000
8/21/2012	8:51:18 PM	Helium valve closed
8/21/2012	8:51:18 PM	BCl3 valve closed
8/21/2012	8:51:18 PM	PH3 valve closed
8/21/2012	8:51:18 PM	SiCl4 pre valve closed
8/21/2012	8:51:18 PM	SiCl4 post valve closed
8/21/2012	8:51:18 PM	Main Vac valve closed
8/21/2012	8:51:18 PM	Bypass valve closed
8/21/2012	8:51:18 PM	H2 valve opened
8/21/2012	8:51:18 PM	Bubbler valve opened
8/21/2012	8:51:18 PM	Helium MFC set to  0.000000
8/21/2012	8:51:18 PM	H2 MFC set to  500.000000
8/21/2012	8:51:18 PM	BCl3 MFC set to  0.000000
8/21/2012	8:51:18 PM	PH3 MFC set to  0.000000
8/21/2012	8:51:18 PM	SiCl4 MFC set to  0.000000
8/21/2012	8:51:18 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	8:51:18 PM	Tube furnace set to 750
8/21/2012	9:01:18 PM	H2 valve closed
8/21/2012	9:01:18 PM	BCl3 valve closed
8/21/2012	9:01:18 PM	PH3 valve closed
8/21/2012	9:01:18 PM	SiCl4 pre valve closed
8/21/2012	9:01:18 PM	SiCl4 post valve closed
8/21/2012	9:01:18 PM	Main Vac valve closed
8/21/2012	9:01:18 PM	Bypass valve closed
8/21/2012	9:01:18 PM	Helium valve opened
8/21/2012	9:01:18 PM	Bubbler valve opened
8/21/2012	9:01:18 PM	Helium MFC set to  400.000000
8/21/2012	9:01:18 PM	H2 MFC set to  0.000000
8/21/2012	9:01:18 PM	BCl3 MFC set to  0.000000
8/21/2012	9:01:18 PM	PH3 MFC set to  0.000000
8/21/2012	9:01:18 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:01:18 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:01:19 PM	Tube furnace set to 0
8/21/2012	9:13:00 PM	Run aborted at 9:13 PM
8/21/2012	9:13:00 PM	Helium valve closed
8/21/2012	9:13:00 PM	H2 valve closed
8/21/2012	9:13:00 PM	BCl3 valve closed
8/21/2012	9:13:00 PM	PH3 valve closed
8/21/2012	9:13:00 PM	SiCl4 pre valve closed
8/21/2012	9:13:00 PM	SiCl4 post valve closed
8/21/2012	9:13:00 PM	Bypass valve closed
8/21/2012	9:13:00 PM	Main Vac valve closed
8/21/2012	9:13:00 PM	Bubbler valve closed
8/21/2012	9:13:00 PM	Helium MFC set to  0.000000
8/21/2012	9:13:00 PM	H2 MFC set to  0.000000
8/21/2012	9:13:00 PM	BCl3 MFC set to  0.000000
8/21/2012	9:13:00 PM	PH3 MFC set to  0.000000
8/21/2012	9:13:00 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:13:00 PM	Tube furnace set to 0
8/21/2012	9:13:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	9:13:03 PM	Recipe started at 9:13 PM
8/21/2012	9:13:03 PM	Helium valve closed
8/21/2012	9:13:03 PM	H2 valve closed
8/21/2012	9:13:03 PM	BCl3 valve closed
8/21/2012	9:13:03 PM	PH3 valve closed
8/21/2012	9:13:03 PM	SiCl4 pre valve closed
8/21/2012	9:13:03 PM	SiCl4 post valve closed
8/21/2012	9:13:03 PM	Main Vac valve closed
8/21/2012	9:13:03 PM	Bypass valve closed
8/21/2012	9:13:03 PM	Bubbler valve closed
8/21/2012	9:13:03 PM	Helium MFC set to  0.000000
8/21/2012	9:13:03 PM	H2 MFC set to  0.000000
8/21/2012	9:13:03 PM	BCl3 MFC set to  0.000000
8/21/2012	9:13:03 PM	PH3 MFC set to  0.000000
8/21/2012	9:13:03 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:13:03 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:13:03 PM	Tube furnace set to 0
8/21/2012	9:13:06 PM	H2 valve closed
8/21/2012	9:13:06 PM	BCl3 valve closed
8/21/2012	9:13:06 PM	PH3 valve closed
8/21/2012	9:13:06 PM	SiCl4 pre valve closed
8/21/2012	9:13:06 PM	SiCl4 post valve closed
8/21/2012	9:13:06 PM	Main Vac valve closed
8/21/2012	9:13:06 PM	Bypass valve closed
8/21/2012	9:13:06 PM	Bubbler valve closed
8/21/2012	9:13:06 PM	Helium valve opened
8/21/2012	9:13:06 PM	Helium MFC set to  500.000000
8/21/2012	9:13:06 PM	H2 MFC set to  0.000000
8/21/2012	9:13:06 PM	BCl3 MFC set to  0.000000
8/21/2012	9:13:06 PM	PH3 MFC set to  0.000000
8/21/2012	9:13:06 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:13:06 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:13:06 PM	Tube furnace set to 0
8/21/2012	9:13:07 PM	Helium valve closed
8/21/2012	9:13:07 PM	H2 valve closed
8/21/2012	9:13:07 PM	BCl3 valve closed
8/21/2012	9:13:07 PM	PH3 valve closed
8/21/2012	9:13:07 PM	SiCl4 pre valve closed
8/21/2012	9:13:07 PM	SiCl4 post valve closed
8/21/2012	9:13:07 PM	Main Vac valve closed
8/21/2012	9:13:07 PM	Bypass valve closed
8/21/2012	9:13:07 PM	Bubbler valve closed
8/21/2012	9:13:07 PM	Helium MFC set to  0.000000
8/21/2012	9:13:07 PM	H2 MFC set to  0.000000
8/21/2012	9:13:07 PM	BCl3 MFC set to  0.000000
8/21/2012	9:13:07 PM	PH3 MFC set to  0.000000
8/21/2012	9:13:07 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:13:07 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:13:07 PM	Tube furnace set to 0
8/21/2012	9:13:08 PM	Run finished at 9:13 PM
8/21/2012	9:13:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	9:20:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	9:20:03 PM	Recipe started at 9:20 PM
8/21/2012	9:20:03 PM	Helium valve closed
8/21/2012	9:20:03 PM	H2 valve closed
8/21/2012	9:20:03 PM	BCl3 valve closed
8/21/2012	9:20:03 PM	PH3 valve closed
8/21/2012	9:20:03 PM	SiCl4 pre valve closed
8/21/2012	9:20:03 PM	SiCl4 post valve closed
8/21/2012	9:20:03 PM	Main Vac valve closed
8/21/2012	9:20:03 PM	Bubbler valve closed
8/21/2012	9:20:03 PM	Bypass valve opened
8/21/2012	9:20:03 PM	Helium MFC set to  0.000000
8/21/2012	9:20:03 PM	H2 MFC set to  0.000000
8/21/2012	9:20:03 PM	BCl3 MFC set to  0.000000
8/21/2012	9:20:03 PM	PH3 MFC set to  0.000000
8/21/2012	9:20:03 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:20:03 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:20:03 PM	Tube furnace set to 0
8/21/2012	9:21:25 PM	Helium valve closed
8/21/2012	9:21:25 PM	H2 valve closed
8/21/2012	9:21:25 PM	BCl3 valve closed
8/21/2012	9:21:25 PM	PH3 valve closed
8/21/2012	9:21:25 PM	SiCl4 pre valve closed
8/21/2012	9:21:25 PM	SiCl4 post valve closed
8/21/2012	9:21:25 PM	Main Vac valve closed
8/21/2012	9:21:25 PM	Bubbler valve closed
8/21/2012	9:21:25 PM	Bypass valve opened
8/21/2012	9:21:25 PM	Helium MFC set to  0.000000
8/21/2012	9:21:25 PM	H2 MFC set to  0.000000
8/21/2012	9:21:25 PM	BCl3 MFC set to  0.000000
8/21/2012	9:21:25 PM	PH3 MFC set to  0.000000
8/21/2012	9:21:25 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:21:25 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:21:25 PM	Tube furnace set to 0
8/21/2012	9:22:25 PM	Helium valve closed
8/21/2012	9:22:25 PM	H2 valve closed
8/21/2012	9:22:25 PM	BCl3 valve closed
8/21/2012	9:22:26 PM	PH3 valve closed
8/21/2012	9:22:26 PM	SiCl4 pre valve closed
8/21/2012	9:22:26 PM	SiCl4 post valve closed
8/21/2012	9:22:26 PM	Bypass valve closed
8/21/2012	9:22:26 PM	Bubbler valve closed
8/21/2012	9:22:26 PM	Main Vac valve opened
8/21/2012	9:22:26 PM	Helium MFC set to  0.000000
8/21/2012	9:22:26 PM	H2 MFC set to  0.000000
8/21/2012	9:22:26 PM	BCl3 MFC set to  0.000000
8/21/2012	9:22:26 PM	PH3 MFC set to  0.000000
8/21/2012	9:22:26 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:22:26 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:22:26 PM	Tube furnace set to 0
8/21/2012	9:22:27 PM	Run finished at 9:22 PM
8/21/2012	9:22:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	9:30:43 PM	Recipe started at 9:30 PM
8/21/2012	9:30:43 PM	Helium valve closed
8/21/2012	9:30:43 PM	H2 valve closed
8/21/2012	9:30:43 PM	BCl3 valve closed
8/21/2012	9:30:43 PM	PH3 valve closed
8/21/2012	9:30:43 PM	SiCl4 pre valve closed
8/21/2012	9:30:43 PM	SiCl4 post valve closed
8/21/2012	9:30:43 PM	Main Vac valve closed
8/21/2012	9:30:43 PM	Bubbler valve closed
8/21/2012	9:30:43 PM	Bypass valve opened
8/21/2012	9:30:43 PM	Helium MFC set to  0.000000
8/21/2012	9:30:43 PM	H2 MFC set to  0.000000
8/21/2012	9:30:43 PM	BCl3 MFC set to  0.000000
8/21/2012	9:30:43 PM	PH3 MFC set to  0.000000
8/21/2012	9:30:43 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:30:43 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:30:43 PM	Tube furnace set to 150
8/21/2012	9:30:43 PM	Helium valve closed
8/21/2012	9:30:43 PM	H2 valve closed
8/21/2012	9:30:43 PM	BCl3 valve closed
8/21/2012	9:30:43 PM	PH3 valve closed
8/21/2012	9:30:43 PM	SiCl4 pre valve closed
8/21/2012	9:30:43 PM	SiCl4 post valve closed
8/21/2012	9:30:43 PM	Main Vac valve closed
8/21/2012	9:30:43 PM	Bubbler valve closed
8/21/2012	9:30:43 PM	Bypass valve opened
8/21/2012	9:30:43 PM	Helium MFC set to  0.000000
8/21/2012	9:30:43 PM	H2 MFC set to  0.000000
8/21/2012	9:30:43 PM	BCl3 MFC set to  0.000000
8/21/2012	9:30:43 PM	PH3 MFC set to  0.000000
8/21/2012	9:30:43 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:30:43 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:30:43 PM	Tube furnace set to 150
8/21/2012	9:30:44 PM	Helium valve closed
8/21/2012	9:30:44 PM	H2 valve closed
8/21/2012	9:30:44 PM	BCl3 valve closed
8/21/2012	9:30:44 PM	PH3 valve closed
8/21/2012	9:30:44 PM	SiCl4 pre valve closed
8/21/2012	9:30:44 PM	SiCl4 post valve closed
8/21/2012	9:30:44 PM	Bypass valve closed
8/21/2012	9:30:44 PM	Bubbler valve closed
8/21/2012	9:30:44 PM	Main Vac valve opened
8/21/2012	9:30:44 PM	Helium MFC set to  0.000000
8/21/2012	9:30:44 PM	H2 MFC set to  0.000000
8/21/2012	9:30:44 PM	BCl3 MFC set to  0.000000
8/21/2012	9:30:44 PM	PH3 MFC set to  0.000000
8/21/2012	9:30:44 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:30:44 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:30:44 PM	Tube furnace set to 150
8/21/2012	9:30:45 PM	H2 valve closed
8/21/2012	9:30:45 PM	BCl3 valve closed
8/21/2012	9:30:45 PM	PH3 valve closed
8/21/2012	9:30:46 PM	SiCl4 pre valve closed
8/21/2012	9:30:46 PM	SiCl4 post valve closed
8/21/2012	9:30:46 PM	Bypass valve closed
8/21/2012	9:30:46 PM	Bubbler valve closed
8/21/2012	9:30:46 PM	Helium valve opened
8/21/2012	9:30:46 PM	Main Vac valve opened
8/21/2012	9:30:46 PM	Helium MFC set to  20.000000
8/21/2012	9:30:46 PM	H2 MFC set to  0.000000
8/21/2012	9:30:46 PM	BCl3 MFC set to  0.000000
8/21/2012	9:30:46 PM	PH3 MFC set to  0.000000
8/21/2012	9:30:46 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:30:46 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:30:46 PM	Tube furnace set to 150
8/21/2012	9:31:16 PM	Helium valve closed
8/21/2012	9:31:16 PM	H2 valve closed
8/21/2012	9:31:16 PM	BCl3 valve closed
8/21/2012	9:31:16 PM	PH3 valve closed
8/21/2012	9:31:16 PM	SiCl4 pre valve closed
8/21/2012	9:31:16 PM	SiCl4 post valve closed
8/21/2012	9:31:16 PM	Bypass valve closed
8/21/2012	9:31:16 PM	Bubbler valve closed
8/21/2012	9:31:16 PM	Main Vac valve opened
8/21/2012	9:31:16 PM	Helium MFC set to  0.000000
8/21/2012	9:31:16 PM	H2 MFC set to  0.000000
8/21/2012	9:31:16 PM	BCl3 MFC set to  0.000000
8/21/2012	9:31:16 PM	PH3 MFC set to  0.000000
8/21/2012	9:31:16 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:31:16 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:31:16 PM	Tube furnace set to 150
8/21/2012	9:31:46 PM	H2 valve closed
8/21/2012	9:31:46 PM	BCl3 valve closed
8/21/2012	9:31:46 PM	PH3 valve closed
8/21/2012	9:31:46 PM	SiCl4 pre valve closed
8/21/2012	9:31:46 PM	SiCl4 post valve closed
8/21/2012	9:31:46 PM	Bypass valve closed
8/21/2012	9:31:46 PM	Bubbler valve closed
8/21/2012	9:31:46 PM	Helium valve opened
8/21/2012	9:31:46 PM	Main Vac valve opened
8/21/2012	9:31:46 PM	Helium MFC set to  20.000000
8/21/2012	9:31:46 PM	H2 MFC set to  0.000000
8/21/2012	9:31:46 PM	BCl3 MFC set to  0.000000
8/21/2012	9:31:46 PM	PH3 MFC set to  0.000000
8/21/2012	9:31:46 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:31:46 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:31:46 PM	Tube furnace set to 150
8/21/2012	9:32:16 PM	Helium valve closed
8/21/2012	9:32:16 PM	H2 valve closed
8/21/2012	9:32:16 PM	BCl3 valve closed
8/21/2012	9:32:16 PM	PH3 valve closed
8/21/2012	9:32:16 PM	SiCl4 pre valve closed
8/21/2012	9:32:16 PM	SiCl4 post valve closed
8/21/2012	9:32:16 PM	Bypass valve closed
8/21/2012	9:32:16 PM	Bubbler valve closed
8/21/2012	9:32:16 PM	Main Vac valve opened
8/21/2012	9:32:16 PM	Helium MFC set to  0.000000
8/21/2012	9:32:16 PM	H2 MFC set to  0.000000
8/21/2012	9:32:16 PM	BCl3 MFC set to  0.000000
8/21/2012	9:32:16 PM	PH3 MFC set to  0.000000
8/21/2012	9:32:16 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:32:16 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:32:16 PM	Tube furnace set to 150
8/21/2012	9:32:46 PM	H2 valve closed
8/21/2012	9:32:46 PM	BCl3 valve closed
8/21/2012	9:32:46 PM	PH3 valve closed
8/21/2012	9:32:46 PM	SiCl4 pre valve closed
8/21/2012	9:32:46 PM	SiCl4 post valve closed
8/21/2012	9:32:46 PM	Bypass valve closed
8/21/2012	9:32:46 PM	Bubbler valve closed
8/21/2012	9:32:46 PM	Helium valve opened
8/21/2012	9:32:46 PM	Main Vac valve opened
8/21/2012	9:32:46 PM	Helium MFC set to  20.000000
8/21/2012	9:32:46 PM	H2 MFC set to  0.000000
8/21/2012	9:32:46 PM	BCl3 MFC set to  0.000000
8/21/2012	9:32:46 PM	PH3 MFC set to  0.000000
8/21/2012	9:32:46 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:32:46 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:32:47 PM	Tube furnace set to 150
8/21/2012	9:33:17 PM	Helium valve closed
8/21/2012	9:33:17 PM	H2 valve closed
8/21/2012	9:33:17 PM	BCl3 valve closed
8/21/2012	9:33:17 PM	PH3 valve closed
8/21/2012	9:33:17 PM	SiCl4 pre valve closed
8/21/2012	9:33:17 PM	SiCl4 post valve closed
8/21/2012	9:33:17 PM	Bypass valve closed
8/21/2012	9:33:17 PM	Bubbler valve closed
8/21/2012	9:33:17 PM	Main Vac valve opened
8/21/2012	9:33:17 PM	Helium MFC set to  0.000000
8/21/2012	9:33:17 PM	H2 MFC set to  0.000000
8/21/2012	9:33:17 PM	BCl3 MFC set to  0.000000
8/21/2012	9:33:17 PM	PH3 MFC set to  0.000000
8/21/2012	9:33:17 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:33:17 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:33:17 PM	Tube furnace set to 150
8/21/2012	9:33:47 PM	H2 valve closed
8/21/2012	9:33:47 PM	BCl3 valve closed
8/21/2012	9:33:47 PM	PH3 valve closed
8/21/2012	9:33:47 PM	SiCl4 pre valve closed
8/21/2012	9:33:47 PM	SiCl4 post valve closed
8/21/2012	9:33:47 PM	Bypass valve closed
8/21/2012	9:33:47 PM	Bubbler valve closed
8/21/2012	9:33:47 PM	Helium valve opened
8/21/2012	9:33:47 PM	Main Vac valve opened
8/21/2012	9:33:47 PM	Helium MFC set to  20.000000
8/21/2012	9:33:47 PM	H2 MFC set to  0.000000
8/21/2012	9:33:47 PM	BCl3 MFC set to  0.000000
8/21/2012	9:33:47 PM	PH3 MFC set to  0.000000
8/21/2012	9:33:47 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:33:47 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:33:47 PM	Tube furnace set to 150
8/21/2012	9:34:17 PM	Helium valve closed
8/21/2012	9:34:17 PM	H2 valve closed
8/21/2012	9:34:17 PM	BCl3 valve closed
8/21/2012	9:34:17 PM	PH3 valve closed
8/21/2012	9:34:17 PM	SiCl4 pre valve closed
8/21/2012	9:34:17 PM	SiCl4 post valve closed
8/21/2012	9:34:17 PM	Bypass valve closed
8/21/2012	9:34:17 PM	Bubbler valve closed
8/21/2012	9:34:17 PM	Main Vac valve opened
8/21/2012	9:34:17 PM	Helium MFC set to  0.000000
8/21/2012	9:34:17 PM	H2 MFC set to  0.000000
8/21/2012	9:34:17 PM	BCl3 MFC set to  0.000000
8/21/2012	9:34:17 PM	PH3 MFC set to  0.000000
8/21/2012	9:34:17 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:34:17 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:34:17 PM	Tube furnace set to 150
8/21/2012	9:34:47 PM	H2 valve closed
8/21/2012	9:34:47 PM	BCl3 valve closed
8/21/2012	9:34:47 PM	PH3 valve closed
8/21/2012	9:34:47 PM	SiCl4 pre valve closed
8/21/2012	9:34:47 PM	SiCl4 post valve closed
8/21/2012	9:34:47 PM	Bypass valve closed
8/21/2012	9:34:47 PM	Bubbler valve closed
8/21/2012	9:34:47 PM	Helium valve opened
8/21/2012	9:34:47 PM	Main Vac valve opened
8/21/2012	9:34:47 PM	Helium MFC set to  20.000000
8/21/2012	9:34:47 PM	H2 MFC set to  0.000000
8/21/2012	9:34:47 PM	BCl3 MFC set to  0.000000
8/21/2012	9:34:47 PM	PH3 MFC set to  0.000000
8/21/2012	9:34:47 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:34:47 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:34:48 PM	Tube furnace set to 150
8/21/2012	9:35:18 PM	Helium valve closed
8/21/2012	9:35:18 PM	H2 valve closed
8/21/2012	9:35:18 PM	BCl3 valve closed
8/21/2012	9:35:18 PM	PH3 valve closed
8/21/2012	9:35:18 PM	SiCl4 pre valve closed
8/21/2012	9:35:18 PM	SiCl4 post valve closed
8/21/2012	9:35:18 PM	Bypass valve closed
8/21/2012	9:35:18 PM	Bubbler valve closed
8/21/2012	9:35:18 PM	Main Vac valve opened
8/21/2012	9:35:18 PM	Helium MFC set to  0.000000
8/21/2012	9:35:18 PM	H2 MFC set to  0.000000
8/21/2012	9:35:18 PM	BCl3 MFC set to  0.000000
8/21/2012	9:35:18 PM	PH3 MFC set to  0.000000
8/21/2012	9:35:18 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:35:18 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:35:18 PM	Tube furnace set to 150
8/21/2012	9:35:48 PM	H2 valve closed
8/21/2012	9:35:48 PM	BCl3 valve closed
8/21/2012	9:35:48 PM	PH3 valve closed
8/21/2012	9:35:48 PM	SiCl4 pre valve closed
8/21/2012	9:35:48 PM	SiCl4 post valve closed
8/21/2012	9:35:48 PM	Bypass valve closed
8/21/2012	9:35:48 PM	Bubbler valve closed
8/21/2012	9:35:48 PM	Helium valve opened
8/21/2012	9:35:48 PM	Main Vac valve opened
8/21/2012	9:35:48 PM	Helium MFC set to  20.000000
8/21/2012	9:35:48 PM	H2 MFC set to  0.000000
8/21/2012	9:35:48 PM	BCl3 MFC set to  0.000000
8/21/2012	9:35:48 PM	PH3 MFC set to  0.000000
8/21/2012	9:35:48 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:35:48 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:35:48 PM	Tube furnace set to 150
8/21/2012	9:36:18 PM	Helium valve closed
8/21/2012	9:36:18 PM	H2 valve closed
8/21/2012	9:36:18 PM	BCl3 valve closed
8/21/2012	9:36:18 PM	PH3 valve closed
8/21/2012	9:36:18 PM	SiCl4 pre valve closed
8/21/2012	9:36:18 PM	SiCl4 post valve closed
8/21/2012	9:36:18 PM	Bypass valve closed
8/21/2012	9:36:18 PM	Bubbler valve closed
8/21/2012	9:36:18 PM	Main Vac valve opened
8/21/2012	9:36:18 PM	Helium MFC set to  0.000000
8/21/2012	9:36:18 PM	H2 MFC set to  0.000000
8/21/2012	9:36:18 PM	BCl3 MFC set to  0.000000
8/21/2012	9:36:18 PM	PH3 MFC set to  0.000000
8/21/2012	9:36:18 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:36:18 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:36:18 PM	Tube furnace set to 150
8/21/2012	9:36:48 PM	H2 valve closed
8/21/2012	9:36:48 PM	BCl3 valve closed
8/21/2012	9:36:48 PM	PH3 valve closed
8/21/2012	9:36:48 PM	SiCl4 pre valve closed
8/21/2012	9:36:48 PM	SiCl4 post valve closed
8/21/2012	9:36:48 PM	Bypass valve closed
8/21/2012	9:36:48 PM	Bubbler valve closed
8/21/2012	9:36:48 PM	Helium valve opened
8/21/2012	9:36:48 PM	Main Vac valve opened
8/21/2012	9:36:48 PM	Helium MFC set to  20.000000
8/21/2012	9:36:48 PM	H2 MFC set to  0.000000
8/21/2012	9:36:48 PM	BCl3 MFC set to  0.000000
8/21/2012	9:36:48 PM	PH3 MFC set to  0.000000
8/21/2012	9:36:48 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:36:48 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:36:49 PM	Tube furnace set to 150
8/21/2012	9:37:19 PM	Helium valve closed
8/21/2012	9:37:19 PM	H2 valve closed
8/21/2012	9:37:19 PM	BCl3 valve closed
8/21/2012	9:37:19 PM	PH3 valve closed
8/21/2012	9:37:19 PM	SiCl4 pre valve closed
8/21/2012	9:37:19 PM	SiCl4 post valve closed
8/21/2012	9:37:19 PM	Bypass valve closed
8/21/2012	9:37:19 PM	Bubbler valve closed
8/21/2012	9:37:19 PM	Main Vac valve opened
8/21/2012	9:37:19 PM	Helium MFC set to  0.000000
8/21/2012	9:37:19 PM	H2 MFC set to  0.000000
8/21/2012	9:37:19 PM	BCl3 MFC set to  0.000000
8/21/2012	9:37:19 PM	PH3 MFC set to  0.000000
8/21/2012	9:37:19 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:37:19 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:37:19 PM	Tube furnace set to 150
8/21/2012	9:37:49 PM	H2 valve closed
8/21/2012	9:37:49 PM	BCl3 valve closed
8/21/2012	9:37:49 PM	PH3 valve closed
8/21/2012	9:37:49 PM	SiCl4 pre valve closed
8/21/2012	9:37:49 PM	SiCl4 post valve closed
8/21/2012	9:37:49 PM	Bypass valve closed
8/21/2012	9:37:49 PM	Bubbler valve closed
8/21/2012	9:37:49 PM	Helium valve opened
8/21/2012	9:37:49 PM	Main Vac valve opened
8/21/2012	9:37:49 PM	Helium MFC set to  20.000000
8/21/2012	9:37:49 PM	H2 MFC set to  0.000000
8/21/2012	9:37:49 PM	BCl3 MFC set to  0.000000
8/21/2012	9:37:49 PM	PH3 MFC set to  0.000000
8/21/2012	9:37:49 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:37:49 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:37:49 PM	Tube furnace set to 150
8/21/2012	9:38:19 PM	Helium valve closed
8/21/2012	9:38:19 PM	H2 valve closed
8/21/2012	9:38:19 PM	BCl3 valve closed
8/21/2012	9:38:19 PM	PH3 valve closed
8/21/2012	9:38:19 PM	SiCl4 pre valve closed
8/21/2012	9:38:19 PM	SiCl4 post valve closed
8/21/2012	9:38:19 PM	Bypass valve closed
8/21/2012	9:38:19 PM	Bubbler valve closed
8/21/2012	9:38:19 PM	Main Vac valve opened
8/21/2012	9:38:19 PM	Helium MFC set to  0.000000
8/21/2012	9:38:19 PM	H2 MFC set to  0.000000
8/21/2012	9:38:19 PM	BCl3 MFC set to  0.000000
8/21/2012	9:38:19 PM	PH3 MFC set to  0.000000
8/21/2012	9:38:19 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:38:19 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:38:19 PM	Tube furnace set to 150
8/21/2012	9:38:49 PM	H2 valve closed
8/21/2012	9:38:49 PM	BCl3 valve closed
8/21/2012	9:38:49 PM	PH3 valve closed
8/21/2012	9:38:49 PM	SiCl4 pre valve closed
8/21/2012	9:38:49 PM	SiCl4 post valve closed
8/21/2012	9:38:49 PM	Bypass valve closed
8/21/2012	9:38:49 PM	Bubbler valve closed
8/21/2012	9:38:49 PM	Helium valve opened
8/21/2012	9:38:49 PM	Main Vac valve opened
8/21/2012	9:38:49 PM	Helium MFC set to  20.000000
8/21/2012	9:38:49 PM	H2 MFC set to  0.000000
8/21/2012	9:38:49 PM	BCl3 MFC set to  0.000000
8/21/2012	9:38:49 PM	PH3 MFC set to  0.000000
8/21/2012	9:38:49 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:38:49 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:38:49 PM	Tube furnace set to 150
8/21/2012	9:39:19 PM	Helium valve closed
8/21/2012	9:39:19 PM	H2 valve closed
8/21/2012	9:39:20 PM	BCl3 valve closed
8/21/2012	9:39:20 PM	PH3 valve closed
8/21/2012	9:39:20 PM	SiCl4 pre valve closed
8/21/2012	9:39:20 PM	SiCl4 post valve closed
8/21/2012	9:39:20 PM	Bypass valve closed
8/21/2012	9:39:20 PM	Bubbler valve closed
8/21/2012	9:39:20 PM	Main Vac valve opened
8/21/2012	9:39:20 PM	Helium MFC set to  0.000000
8/21/2012	9:39:20 PM	H2 MFC set to  0.000000
8/21/2012	9:39:20 PM	BCl3 MFC set to  0.000000
8/21/2012	9:39:20 PM	PH3 MFC set to  0.000000
8/21/2012	9:39:20 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:39:20 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:39:20 PM	Tube furnace set to 150
8/21/2012	9:39:50 PM	H2 valve closed
8/21/2012	9:39:50 PM	BCl3 valve closed
8/21/2012	9:39:50 PM	PH3 valve closed
8/21/2012	9:39:50 PM	SiCl4 pre valve closed
8/21/2012	9:39:50 PM	SiCl4 post valve closed
8/21/2012	9:39:50 PM	Bypass valve closed
8/21/2012	9:39:50 PM	Bubbler valve closed
8/21/2012	9:39:50 PM	Helium valve opened
8/21/2012	9:39:50 PM	Main Vac valve opened
8/21/2012	9:39:50 PM	Helium MFC set to  20.000000
8/21/2012	9:39:50 PM	H2 MFC set to  0.000000
8/21/2012	9:39:50 PM	BCl3 MFC set to  0.000000
8/21/2012	9:39:50 PM	PH3 MFC set to  0.000000
8/21/2012	9:39:50 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:39:50 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:39:50 PM	Tube furnace set to 150
8/21/2012	9:40:20 PM	Helium valve closed
8/21/2012	9:40:20 PM	H2 valve closed
8/21/2012	9:40:20 PM	BCl3 valve closed
8/21/2012	9:40:20 PM	PH3 valve closed
8/21/2012	9:40:20 PM	SiCl4 pre valve closed
8/21/2012	9:40:20 PM	SiCl4 post valve closed
8/21/2012	9:40:20 PM	Bypass valve closed
8/21/2012	9:40:20 PM	Bubbler valve closed
8/21/2012	9:40:20 PM	Main Vac valve opened
8/21/2012	9:40:20 PM	Helium MFC set to  0.000000
8/21/2012	9:40:20 PM	H2 MFC set to  0.000000
8/21/2012	9:40:20 PM	BCl3 MFC set to  0.000000
8/21/2012	9:40:20 PM	PH3 MFC set to  0.000000
8/21/2012	9:40:20 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:40:20 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:40:20 PM	Tube furnace set to 150
8/21/2012	9:40:21 PM	Run finished at 9:40 PM
8/21/2012	9:48:45 PM	Recipe started at 9:48 PM
8/21/2012	9:48:45 PM	Helium valve closed
8/21/2012	9:48:45 PM	H2 valve closed
8/21/2012	9:48:45 PM	BCl3 valve closed
8/21/2012	9:48:45 PM	PH3 valve closed
8/21/2012	9:48:45 PM	SiCl4 pre valve closed
8/21/2012	9:48:45 PM	SiCl4 post valve closed
8/21/2012	9:48:45 PM	Main Vac valve closed
8/21/2012	9:48:45 PM	Bubbler valve closed
8/21/2012	9:48:45 PM	Bypass valve opened
8/21/2012	9:48:45 PM	Helium MFC set to  0.000000
8/21/2012	9:48:45 PM	H2 MFC set to  0.000000
8/21/2012	9:48:45 PM	BCl3 MFC set to  0.000000
8/21/2012	9:48:45 PM	PH3 MFC set to  0.000000
8/21/2012	9:48:45 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:48:45 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:48:45 PM	Tube furnace set to 150
8/21/2012	9:48:46 PM	Helium valve closed
8/21/2012	9:48:46 PM	H2 valve closed
8/21/2012	9:48:46 PM	BCl3 valve closed
8/21/2012	9:48:46 PM	PH3 valve closed
8/21/2012	9:48:46 PM	SiCl4 pre valve closed
8/21/2012	9:48:46 PM	SiCl4 post valve closed
8/21/2012	9:48:46 PM	Main Vac valve closed
8/21/2012	9:48:46 PM	Bubbler valve closed
8/21/2012	9:48:46 PM	Bypass valve opened
8/21/2012	9:48:46 PM	Helium MFC set to  0.000000
8/21/2012	9:48:46 PM	H2 MFC set to  0.000000
8/21/2012	9:48:46 PM	BCl3 MFC set to  0.000000
8/21/2012	9:48:46 PM	PH3 MFC set to  0.000000
8/21/2012	9:48:46 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:48:46 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:48:46 PM	Tube furnace set to 150
8/21/2012	9:48:48 PM	Helium valve closed
8/21/2012	9:48:48 PM	H2 valve closed
8/21/2012	9:48:48 PM	BCl3 valve closed
8/21/2012	9:48:48 PM	PH3 valve closed
8/21/2012	9:48:48 PM	SiCl4 pre valve closed
8/21/2012	9:48:48 PM	SiCl4 post valve closed
8/21/2012	9:48:48 PM	Bypass valve closed
8/21/2012	9:48:48 PM	Bubbler valve closed
8/21/2012	9:48:48 PM	Main Vac valve opened
8/21/2012	9:48:48 PM	Helium MFC set to  0.000000
8/21/2012	9:48:48 PM	H2 MFC set to  0.000000
8/21/2012	9:48:48 PM	BCl3 MFC set to  0.000000
8/21/2012	9:48:48 PM	PH3 MFC set to  0.000000
8/21/2012	9:48:48 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:48:48 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:48:48 PM	Tube furnace set to 150
8/21/2012	9:48:49 PM	H2 valve closed
8/21/2012	9:48:49 PM	BCl3 valve closed
8/21/2012	9:48:49 PM	PH3 valve closed
8/21/2012	9:48:49 PM	SiCl4 pre valve closed
8/21/2012	9:48:49 PM	SiCl4 post valve closed
8/21/2012	9:48:49 PM	Bypass valve closed
8/21/2012	9:48:49 PM	Bubbler valve closed
8/21/2012	9:48:49 PM	Helium valve opened
8/21/2012	9:48:49 PM	Main Vac valve opened
8/21/2012	9:48:49 PM	Helium MFC set to  20.000000
8/21/2012	9:48:49 PM	H2 MFC set to  0.000000
8/21/2012	9:48:49 PM	BCl3 MFC set to  0.000000
8/21/2012	9:48:49 PM	PH3 MFC set to  0.000000
8/21/2012	9:48:49 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:48:49 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:48:49 PM	Tube furnace set to 150
8/21/2012	9:49:19 PM	Helium valve closed
8/21/2012	9:49:19 PM	H2 valve closed
8/21/2012	9:49:19 PM	BCl3 valve closed
8/21/2012	9:49:19 PM	PH3 valve closed
8/21/2012	9:49:19 PM	SiCl4 pre valve closed
8/21/2012	9:49:19 PM	SiCl4 post valve closed
8/21/2012	9:49:19 PM	Bypass valve closed
8/21/2012	9:49:19 PM	Bubbler valve closed
8/21/2012	9:49:19 PM	Main Vac valve opened
8/21/2012	9:49:19 PM	Helium MFC set to  0.000000
8/21/2012	9:49:19 PM	H2 MFC set to  0.000000
8/21/2012	9:49:19 PM	BCl3 MFC set to  0.000000
8/21/2012	9:49:19 PM	PH3 MFC set to  0.000000
8/21/2012	9:49:19 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:49:19 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:49:20 PM	Tube furnace set to 150
8/21/2012	9:49:50 PM	H2 valve closed
8/21/2012	9:49:50 PM	BCl3 valve closed
8/21/2012	9:49:50 PM	PH3 valve closed
8/21/2012	9:49:50 PM	SiCl4 pre valve closed
8/21/2012	9:49:50 PM	SiCl4 post valve closed
8/21/2012	9:49:50 PM	Bypass valve closed
8/21/2012	9:49:50 PM	Bubbler valve closed
8/21/2012	9:49:50 PM	Helium valve opened
8/21/2012	9:49:50 PM	Main Vac valve opened
8/21/2012	9:49:50 PM	Helium MFC set to  20.000000
8/21/2012	9:49:50 PM	H2 MFC set to  0.000000
8/21/2012	9:49:50 PM	BCl3 MFC set to  0.000000
8/21/2012	9:49:50 PM	PH3 MFC set to  0.000000
8/21/2012	9:49:50 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:49:50 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:49:50 PM	Tube furnace set to 150
8/21/2012	9:50:20 PM	Helium valve closed
8/21/2012	9:50:20 PM	H2 valve closed
8/21/2012	9:50:20 PM	BCl3 valve closed
8/21/2012	9:50:20 PM	PH3 valve closed
8/21/2012	9:50:20 PM	SiCl4 pre valve closed
8/21/2012	9:50:20 PM	SiCl4 post valve closed
8/21/2012	9:50:20 PM	Bypass valve closed
8/21/2012	9:50:20 PM	Bubbler valve closed
8/21/2012	9:50:20 PM	Main Vac valve opened
8/21/2012	9:50:20 PM	Helium MFC set to  0.000000
8/21/2012	9:50:20 PM	H2 MFC set to  0.000000
8/21/2012	9:50:20 PM	BCl3 MFC set to  0.000000
8/21/2012	9:50:20 PM	PH3 MFC set to  0.000000
8/21/2012	9:50:20 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:50:20 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:50:20 PM	Tube furnace set to 150
8/21/2012	9:50:50 PM	H2 valve closed
8/21/2012	9:50:50 PM	BCl3 valve closed
8/21/2012	9:50:50 PM	PH3 valve closed
8/21/2012	9:50:50 PM	SiCl4 pre valve closed
8/21/2012	9:50:50 PM	SiCl4 post valve closed
8/21/2012	9:50:50 PM	Bypass valve closed
8/21/2012	9:50:50 PM	Bubbler valve closed
8/21/2012	9:50:50 PM	Helium valve opened
8/21/2012	9:50:50 PM	Main Vac valve opened
8/21/2012	9:50:50 PM	Helium MFC set to  20.000000
8/21/2012	9:50:50 PM	H2 MFC set to  0.000000
8/21/2012	9:50:50 PM	BCl3 MFC set to  0.000000
8/21/2012	9:50:50 PM	PH3 MFC set to  0.000000
8/21/2012	9:50:50 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:50:50 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:50:50 PM	Tube furnace set to 150
8/21/2012	9:51:20 PM	Helium valve closed
8/21/2012	9:51:20 PM	H2 valve closed
8/21/2012	9:51:20 PM	BCl3 valve closed
8/21/2012	9:51:20 PM	PH3 valve closed
8/21/2012	9:51:20 PM	SiCl4 pre valve closed
8/21/2012	9:51:20 PM	SiCl4 post valve closed
8/21/2012	9:51:20 PM	Bypass valve closed
8/21/2012	9:51:20 PM	Bubbler valve closed
8/21/2012	9:51:20 PM	Main Vac valve opened
8/21/2012	9:51:20 PM	Helium MFC set to  0.000000
8/21/2012	9:51:20 PM	H2 MFC set to  0.000000
8/21/2012	9:51:20 PM	BCl3 MFC set to  0.000000
8/21/2012	9:51:20 PM	PH3 MFC set to  0.000000
8/21/2012	9:51:20 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:51:20 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:51:20 PM	Tube furnace set to 150
8/21/2012	9:51:50 PM	H2 valve closed
8/21/2012	9:51:50 PM	BCl3 valve closed
8/21/2012	9:51:50 PM	PH3 valve closed
8/21/2012	9:51:50 PM	SiCl4 pre valve closed
8/21/2012	9:51:50 PM	SiCl4 post valve closed
8/21/2012	9:51:50 PM	Bypass valve closed
8/21/2012	9:51:50 PM	Bubbler valve closed
8/21/2012	9:51:51 PM	Helium valve opened
8/21/2012	9:51:51 PM	Main Vac valve opened
8/21/2012	9:51:51 PM	Helium MFC set to  20.000000
8/21/2012	9:51:51 PM	H2 MFC set to  0.000000
8/21/2012	9:51:51 PM	BCl3 MFC set to  0.000000
8/21/2012	9:51:51 PM	PH3 MFC set to  0.000000
8/21/2012	9:51:51 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:51:51 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:51:51 PM	Tube furnace set to 150
8/21/2012	9:52:21 PM	Helium valve closed
8/21/2012	9:52:21 PM	H2 valve closed
8/21/2012	9:52:21 PM	BCl3 valve closed
8/21/2012	9:52:21 PM	PH3 valve closed
8/21/2012	9:52:21 PM	SiCl4 pre valve closed
8/21/2012	9:52:21 PM	SiCl4 post valve closed
8/21/2012	9:52:21 PM	Bypass valve closed
8/21/2012	9:52:21 PM	Bubbler valve closed
8/21/2012	9:52:21 PM	Main Vac valve opened
8/21/2012	9:52:21 PM	Helium MFC set to  0.000000
8/21/2012	9:52:21 PM	H2 MFC set to  0.000000
8/21/2012	9:52:21 PM	BCl3 MFC set to  0.000000
8/21/2012	9:52:21 PM	PH3 MFC set to  0.000000
8/21/2012	9:52:21 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:52:21 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:52:21 PM	Tube furnace set to 150
8/21/2012	9:52:51 PM	H2 valve closed
8/21/2012	9:52:51 PM	BCl3 valve closed
8/21/2012	9:52:51 PM	PH3 valve closed
8/21/2012	9:52:51 PM	SiCl4 pre valve closed
8/21/2012	9:52:51 PM	SiCl4 post valve closed
8/21/2012	9:52:51 PM	Bypass valve closed
8/21/2012	9:52:51 PM	Bubbler valve closed
8/21/2012	9:52:51 PM	Helium valve opened
8/21/2012	9:52:51 PM	Main Vac valve opened
8/21/2012	9:52:51 PM	Helium MFC set to  20.000000
8/21/2012	9:52:51 PM	H2 MFC set to  0.000000
8/21/2012	9:52:51 PM	BCl3 MFC set to  0.000000
8/21/2012	9:52:51 PM	PH3 MFC set to  0.000000
8/21/2012	9:52:51 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:52:51 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:52:51 PM	Tube furnace set to 150
8/21/2012	9:53:21 PM	Helium valve closed
8/21/2012	9:53:21 PM	H2 valve closed
8/21/2012	9:53:21 PM	BCl3 valve closed
8/21/2012	9:53:21 PM	PH3 valve closed
8/21/2012	9:53:21 PM	SiCl4 pre valve closed
8/21/2012	9:53:21 PM	SiCl4 post valve closed
8/21/2012	9:53:21 PM	Bypass valve closed
8/21/2012	9:53:21 PM	Bubbler valve closed
8/21/2012	9:53:21 PM	Main Vac valve opened
8/21/2012	9:53:21 PM	Helium MFC set to  0.000000
8/21/2012	9:53:21 PM	H2 MFC set to  0.000000
8/21/2012	9:53:21 PM	BCl3 MFC set to  0.000000
8/21/2012	9:53:21 PM	PH3 MFC set to  0.000000
8/21/2012	9:53:21 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:53:21 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:53:21 PM	Tube furnace set to 150
8/21/2012	9:53:51 PM	H2 valve closed
8/21/2012	9:53:51 PM	BCl3 valve closed
8/21/2012	9:53:51 PM	PH3 valve closed
8/21/2012	9:53:51 PM	SiCl4 pre valve closed
8/21/2012	9:53:51 PM	SiCl4 post valve closed
8/21/2012	9:53:51 PM	Bypass valve closed
8/21/2012	9:53:51 PM	Bubbler valve closed
8/21/2012	9:53:51 PM	Helium valve opened
8/21/2012	9:53:51 PM	Main Vac valve opened
8/21/2012	9:53:51 PM	Helium MFC set to  20.000000
8/21/2012	9:53:51 PM	H2 MFC set to  0.000000
8/21/2012	9:53:51 PM	BCl3 MFC set to  0.000000
8/21/2012	9:53:51 PM	PH3 MFC set to  0.000000
8/21/2012	9:53:51 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:53:51 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:53:52 PM	Tube furnace set to 150
8/21/2012	9:54:22 PM	Helium valve closed
8/21/2012	9:54:22 PM	H2 valve closed
8/21/2012	9:54:22 PM	BCl3 valve closed
8/21/2012	9:54:22 PM	PH3 valve closed
8/21/2012	9:54:22 PM	SiCl4 pre valve closed
8/21/2012	9:54:22 PM	SiCl4 post valve closed
8/21/2012	9:54:22 PM	Bypass valve closed
8/21/2012	9:54:22 PM	Bubbler valve closed
8/21/2012	9:54:22 PM	Main Vac valve opened
8/21/2012	9:54:22 PM	Helium MFC set to  0.000000
8/21/2012	9:54:22 PM	H2 MFC set to  0.000000
8/21/2012	9:54:22 PM	BCl3 MFC set to  0.000000
8/21/2012	9:54:22 PM	PH3 MFC set to  0.000000
8/21/2012	9:54:22 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:54:22 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:54:22 PM	Tube furnace set to 150
8/21/2012	9:54:52 PM	H2 valve closed
8/21/2012	9:54:52 PM	BCl3 valve closed
8/21/2012	9:54:52 PM	PH3 valve closed
8/21/2012	9:54:52 PM	SiCl4 pre valve closed
8/21/2012	9:54:52 PM	SiCl4 post valve closed
8/21/2012	9:54:52 PM	Bypass valve closed
8/21/2012	9:54:52 PM	Bubbler valve closed
8/21/2012	9:54:52 PM	Helium valve opened
8/21/2012	9:54:52 PM	Main Vac valve opened
8/21/2012	9:54:52 PM	Helium MFC set to  20.000000
8/21/2012	9:54:52 PM	H2 MFC set to  0.000000
8/21/2012	9:54:52 PM	BCl3 MFC set to  0.000000
8/21/2012	9:54:52 PM	PH3 MFC set to  0.000000
8/21/2012	9:54:52 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:54:52 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:54:52 PM	Tube furnace set to 150
8/21/2012	9:55:22 PM	Helium valve closed
8/21/2012	9:55:22 PM	H2 valve closed
8/21/2012	9:55:22 PM	BCl3 valve closed
8/21/2012	9:55:22 PM	PH3 valve closed
8/21/2012	9:55:22 PM	SiCl4 pre valve closed
8/21/2012	9:55:22 PM	SiCl4 post valve closed
8/21/2012	9:55:22 PM	Bypass valve closed
8/21/2012	9:55:22 PM	Bubbler valve closed
8/21/2012	9:55:22 PM	Main Vac valve opened
8/21/2012	9:55:22 PM	Helium MFC set to  0.000000
8/21/2012	9:55:22 PM	H2 MFC set to  0.000000
8/21/2012	9:55:22 PM	BCl3 MFC set to  0.000000
8/21/2012	9:55:22 PM	PH3 MFC set to  0.000000
8/21/2012	9:55:22 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:55:22 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:55:22 PM	Tube furnace set to 150
8/21/2012	9:55:52 PM	H2 valve closed
8/21/2012	9:55:52 PM	BCl3 valve closed
8/21/2012	9:55:52 PM	PH3 valve closed
8/21/2012	9:55:52 PM	SiCl4 pre valve closed
8/21/2012	9:55:52 PM	SiCl4 post valve closed
8/21/2012	9:55:52 PM	Bypass valve closed
8/21/2012	9:55:52 PM	Bubbler valve closed
8/21/2012	9:55:52 PM	Helium valve opened
8/21/2012	9:55:52 PM	Main Vac valve opened
8/21/2012	9:55:52 PM	Helium MFC set to  20.000000
8/21/2012	9:55:52 PM	H2 MFC set to  0.000000
8/21/2012	9:55:52 PM	BCl3 MFC set to  0.000000
8/21/2012	9:55:52 PM	PH3 MFC set to  0.000000
8/21/2012	9:55:52 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:55:52 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:55:53 PM	Tube furnace set to 150
8/21/2012	9:56:23 PM	Helium valve closed
8/21/2012	9:56:23 PM	H2 valve closed
8/21/2012	9:56:23 PM	BCl3 valve closed
8/21/2012	9:56:23 PM	PH3 valve closed
8/21/2012	9:56:23 PM	SiCl4 pre valve closed
8/21/2012	9:56:23 PM	SiCl4 post valve closed
8/21/2012	9:56:23 PM	Bypass valve closed
8/21/2012	9:56:23 PM	Bubbler valve closed
8/21/2012	9:56:23 PM	Main Vac valve opened
8/21/2012	9:56:23 PM	Helium MFC set to  0.000000
8/21/2012	9:56:23 PM	H2 MFC set to  0.000000
8/21/2012	9:56:23 PM	BCl3 MFC set to  0.000000
8/21/2012	9:56:23 PM	PH3 MFC set to  0.000000
8/21/2012	9:56:23 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:56:23 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:56:23 PM	Tube furnace set to 150
8/21/2012	9:56:53 PM	H2 valve closed
8/21/2012	9:56:53 PM	BCl3 valve closed
8/21/2012	9:56:53 PM	PH3 valve closed
8/21/2012	9:56:53 PM	SiCl4 pre valve closed
8/21/2012	9:56:53 PM	SiCl4 post valve closed
8/21/2012	9:56:53 PM	Bypass valve closed
8/21/2012	9:56:53 PM	Bubbler valve closed
8/21/2012	9:56:53 PM	Helium valve opened
8/21/2012	9:56:53 PM	Main Vac valve opened
8/21/2012	9:56:53 PM	Helium MFC set to  20.000000
8/21/2012	9:56:53 PM	H2 MFC set to  0.000000
8/21/2012	9:56:53 PM	BCl3 MFC set to  0.000000
8/21/2012	9:56:53 PM	PH3 MFC set to  0.000000
8/21/2012	9:56:53 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:56:53 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:56:53 PM	Tube furnace set to 150
8/21/2012	9:57:23 PM	Helium valve closed
8/21/2012	9:57:23 PM	H2 valve closed
8/21/2012	9:57:23 PM	BCl3 valve closed
8/21/2012	9:57:23 PM	PH3 valve closed
8/21/2012	9:57:23 PM	SiCl4 pre valve closed
8/21/2012	9:57:23 PM	SiCl4 post valve closed
8/21/2012	9:57:23 PM	Bypass valve closed
8/21/2012	9:57:23 PM	Bubbler valve closed
8/21/2012	9:57:23 PM	Main Vac valve opened
8/21/2012	9:57:23 PM	Helium MFC set to  0.000000
8/21/2012	9:57:23 PM	H2 MFC set to  0.000000
8/21/2012	9:57:23 PM	BCl3 MFC set to  0.000000
8/21/2012	9:57:23 PM	PH3 MFC set to  0.000000
8/21/2012	9:57:23 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:57:23 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:57:23 PM	Tube furnace set to 150
8/21/2012	9:57:53 PM	H2 valve closed
8/21/2012	9:57:53 PM	BCl3 valve closed
8/21/2012	9:57:53 PM	PH3 valve closed
8/21/2012	9:57:53 PM	SiCl4 pre valve closed
8/21/2012	9:57:53 PM	SiCl4 post valve closed
8/21/2012	9:57:53 PM	Bypass valve closed
8/21/2012	9:57:53 PM	Bubbler valve closed
8/21/2012	9:57:53 PM	Helium valve opened
8/21/2012	9:57:53 PM	Main Vac valve opened
8/21/2012	9:57:53 PM	Helium MFC set to  20.000000
8/21/2012	9:57:53 PM	H2 MFC set to  0.000000
8/21/2012	9:57:53 PM	BCl3 MFC set to  0.000000
8/21/2012	9:57:53 PM	PH3 MFC set to  0.000000
8/21/2012	9:57:53 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:57:53 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:57:54 PM	Tube furnace set to 150
8/21/2012	9:58:24 PM	Helium valve closed
8/21/2012	9:58:24 PM	H2 valve closed
8/21/2012	9:58:24 PM	BCl3 valve closed
8/21/2012	9:58:24 PM	PH3 valve closed
8/21/2012	9:58:24 PM	SiCl4 pre valve closed
8/21/2012	9:58:24 PM	SiCl4 post valve closed
8/21/2012	9:58:24 PM	Bypass valve closed
8/21/2012	9:58:24 PM	Bubbler valve closed
8/21/2012	9:58:24 PM	Main Vac valve opened
8/21/2012	9:58:24 PM	Helium MFC set to  0.000000
8/21/2012	9:58:24 PM	H2 MFC set to  0.000000
8/21/2012	9:58:24 PM	BCl3 MFC set to  0.000000
8/21/2012	9:58:24 PM	PH3 MFC set to  0.000000
8/21/2012	9:58:24 PM	SiCl4 MFC set to  0.000000
8/21/2012	9:58:24 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	9:58:24 PM	Tube furnace set to 150
8/21/2012	9:58:25 PM	Run finished at 9:58 PM
8/21/2012	10:04:40 PM	Main Vac valve closed
8/21/2012	10:04:53 PM	Main Vac valve opened
8/21/2012	10:06:22 PM	Recipe started at 10:06 PM
8/21/2012	10:06:22 PM	Helium valve closed
8/21/2012	10:06:22 PM	H2 valve closed
8/21/2012	10:06:22 PM	BCl3 valve closed
8/21/2012	10:06:22 PM	PH3 valve closed
8/21/2012	10:06:22 PM	SiCl4 pre valve closed
8/21/2012	10:06:22 PM	SiCl4 post valve closed
8/21/2012	10:06:22 PM	Main Vac valve closed
8/21/2012	10:06:22 PM	Bypass valve closed
8/21/2012	10:06:22 PM	Bubbler valve closed
8/21/2012	10:06:23 PM	Helium MFC set to  0.000000
8/21/2012	10:06:23 PM	H2 MFC set to  0.000000
8/21/2012	10:06:23 PM	BCl3 MFC set to  0.000000
8/21/2012	10:06:23 PM	PH3 MFC set to  0.000000
8/21/2012	10:06:23 PM	SiCl4 MFC set to  0.000000
8/21/2012	10:06:23 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:06:23 PM	Tube furnace set to 0
8/21/2012	10:06:26 PM	Helium valve closed
8/21/2012	10:06:26 PM	BCl3 valve closed
8/21/2012	10:06:26 PM	PH3 valve closed
8/21/2012	10:06:26 PM	SiCl4 pre valve closed
8/21/2012	10:06:26 PM	SiCl4 post valve closed
8/21/2012	10:06:26 PM	Main Vac valve closed
8/21/2012	10:06:26 PM	Bypass valve closed
8/21/2012	10:06:26 PM	Bubbler valve closed
8/21/2012	10:06:26 PM	H2 valve opened
8/21/2012	10:06:26 PM	Helium MFC set to  0.000000
8/21/2012	10:06:26 PM	H2 MFC set to  500.000000
8/21/2012	10:06:26 PM	BCl3 MFC set to  0.000000
8/21/2012	10:06:26 PM	PH3 MFC set to  0.000000
8/21/2012	10:06:26 PM	SiCl4 MFC set to  0.000000
8/21/2012	10:06:26 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:06:26 PM	Tube furnace set to 50
8/21/2012	10:07:37 PM	Helium valve closed
8/21/2012	10:07:37 PM	BCl3 valve closed
8/21/2012	10:07:37 PM	PH3 valve closed
8/21/2012	10:07:37 PM	SiCl4 pre valve closed
8/21/2012	10:07:37 PM	SiCl4 post valve closed
8/21/2012	10:07:37 PM	Main Vac valve closed
8/21/2012	10:07:37 PM	Bypass valve closed
8/21/2012	10:07:37 PM	H2 valve opened
8/21/2012	10:07:37 PM	Bubbler valve opened
8/21/2012	10:07:37 PM	Helium MFC set to  0.000000
8/21/2012	10:07:37 PM	H2 MFC set to  500.000000
8/21/2012	10:07:37 PM	BCl3 MFC set to  0.000000
8/21/2012	10:07:37 PM	PH3 MFC set to  0.000000
8/21/2012	10:07:37 PM	SiCl4 MFC set to  0.000000
8/21/2012	10:07:38 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:07:38 PM	Tube furnace set to 50
8/21/2012	10:07:39 PM	Helium valve closed
8/21/2012	10:07:39 PM	BCl3 valve closed
8/21/2012	10:07:39 PM	PH3 valve closed
8/21/2012	10:07:39 PM	SiCl4 pre valve closed
8/21/2012	10:07:39 PM	SiCl4 post valve closed
8/21/2012	10:07:39 PM	Main Vac valve closed
8/21/2012	10:07:39 PM	Bypass valve closed
8/21/2012	10:07:39 PM	H2 valve opened
8/21/2012	10:07:39 PM	Bubbler valve opened
8/21/2012	10:07:39 PM	Helium MFC set to  0.000000
8/21/2012	10:07:39 PM	H2 MFC set to  450.000000
8/21/2012	10:07:39 PM	BCl3 MFC set to  0.000000
8/21/2012	10:07:39 PM	PH3 MFC set to  0.000000
8/21/2012	10:07:39 PM	SiCl4 MFC set to  0.000000
8/21/2012	10:07:39 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:07:39 PM	Tube furnace set to 1000
8/21/2012	10:27:39 PM	Helium valve closed
8/21/2012	10:27:39 PM	PH3 valve closed
8/21/2012	10:27:39 PM	Main Vac valve closed
8/21/2012	10:27:39 PM	Bypass valve closed
8/21/2012	10:27:39 PM	H2 valve opened
8/21/2012	10:27:39 PM	BCl3 valve opened
8/21/2012	10:27:39 PM	SiCl4 pre valve opened
8/21/2012	10:27:39 PM	SiCl4 post valve opened
8/21/2012	10:27:39 PM	Bubbler valve opened
8/21/2012	10:27:39 PM	Helium MFC set to  0.000000
8/21/2012	10:27:39 PM	H2 MFC set to  450.000000
8/21/2012	10:27:39 PM	BCl3 MFC set to  1.200000
8/21/2012	10:27:39 PM	PH3 MFC set to  0.000000
8/21/2012	10:27:39 PM	SiCl4 MFC set to  50.000000
8/21/2012	10:27:39 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:27:39 PM	Tube furnace set to 1000
8/21/2012	10:42:39 PM	Helium valve closed
8/21/2012	10:42:39 PM	BCl3 valve closed
8/21/2012	10:42:39 PM	PH3 valve closed
8/21/2012	10:42:39 PM	SiCl4 pre valve closed
8/21/2012	10:42:39 PM	SiCl4 post valve closed
8/21/2012	10:42:39 PM	Main Vac valve closed
8/21/2012	10:42:39 PM	Bypass valve closed
8/21/2012	10:42:39 PM	H2 valve opened
8/21/2012	10:42:39 PM	Bubbler valve opened
8/21/2012	10:42:39 PM	Helium MFC set to  0.000000
8/21/2012	10:42:39 PM	H2 MFC set to  500.000000
8/21/2012	10:42:39 PM	BCl3 MFC set to  0.000000
8/21/2012	10:42:39 PM	PH3 MFC set to  0.000000
8/21/2012	10:42:39 PM	SiCl4 MFC set to  0.000000
8/21/2012	10:42:39 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:42:39 PM	Tube furnace set to 750
8/21/2012	10:52:39 PM	H2 valve closed
8/21/2012	10:52:39 PM	BCl3 valve closed
8/21/2012	10:52:39 PM	PH3 valve closed
8/21/2012	10:52:39 PM	SiCl4 pre valve closed
8/21/2012	10:52:39 PM	SiCl4 post valve closed
8/21/2012	10:52:39 PM	Main Vac valve closed
8/21/2012	10:52:39 PM	Bypass valve closed
8/21/2012	10:52:39 PM	Helium valve opened
8/21/2012	10:52:39 PM	Bubbler valve opened
8/21/2012	10:52:39 PM	Helium MFC set to  400.000000
8/21/2012	10:52:39 PM	H2 MFC set to  0.000000
8/21/2012	10:52:39 PM	BCl3 MFC set to  0.000000
8/21/2012	10:52:39 PM	PH3 MFC set to  0.000000
8/21/2012	10:52:39 PM	SiCl4 MFC set to  0.000000
8/21/2012	10:52:39 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	10:52:39 PM	Tube furnace set to 0
8/21/2012	11:02:20 PM	Run aborted at 11:02 PM
8/21/2012	11:02:20 PM	Helium valve closed
8/21/2012	11:02:20 PM	H2 valve closed
8/21/2012	11:02:20 PM	BCl3 valve closed
8/21/2012	11:02:20 PM	PH3 valve closed
8/21/2012	11:02:20 PM	SiCl4 pre valve closed
8/21/2012	11:02:20 PM	SiCl4 post valve closed
8/21/2012	11:02:20 PM	Bypass valve closed
8/21/2012	11:02:20 PM	Main Vac valve closed
8/21/2012	11:02:20 PM	Bubbler valve closed
8/21/2012	11:02:20 PM	Helium MFC set to  0.000000
8/21/2012	11:02:20 PM	H2 MFC set to  0.000000
8/21/2012	11:02:20 PM	BCl3 MFC set to  0.000000
8/21/2012	11:02:20 PM	PH3 MFC set to  0.000000
8/21/2012	11:02:20 PM	SiCl4 MFC set to  0.000000
8/21/2012	11:02:20 PM	Tube furnace set to 0
8/21/2012	11:02:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	11:02:22 PM	Recipe started at 11:02 PM
8/21/2012	11:02:22 PM	Helium valve closed
8/21/2012	11:02:22 PM	H2 valve closed
8/21/2012	11:02:22 PM	BCl3 valve closed
8/21/2012	11:02:23 PM	PH3 valve closed
8/21/2012	11:02:23 PM	SiCl4 pre valve closed
8/21/2012	11:02:23 PM	SiCl4 post valve closed
8/21/2012	11:02:23 PM	Main Vac valve closed
8/21/2012	11:02:23 PM	Bypass valve closed
8/21/2012	11:02:23 PM	Bubbler valve closed
8/21/2012	11:02:23 PM	Helium MFC set to  0.000000
8/21/2012	11:02:23 PM	H2 MFC set to  0.000000
8/21/2012	11:02:23 PM	BCl3 MFC set to  0.000000
8/21/2012	11:02:23 PM	PH3 MFC set to  0.000000
8/21/2012	11:02:23 PM	SiCl4 MFC set to  0.000000
8/21/2012	11:02:23 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:02:23 PM	Tube furnace set to 0
8/21/2012	11:02:26 PM	H2 valve closed
8/21/2012	11:02:26 PM	BCl3 valve closed
8/21/2012	11:02:26 PM	PH3 valve closed
8/21/2012	11:02:26 PM	SiCl4 pre valve closed
8/21/2012	11:02:26 PM	SiCl4 post valve closed
8/21/2012	11:02:26 PM	Main Vac valve closed
8/21/2012	11:02:26 PM	Bypass valve closed
8/21/2012	11:02:26 PM	Bubbler valve closed
8/21/2012	11:02:26 PM	Helium valve opened
8/21/2012	11:02:26 PM	Helium MFC set to  500.000000
8/21/2012	11:02:26 PM	H2 MFC set to  0.000000
8/21/2012	11:02:26 PM	BCl3 MFC set to  0.000000
8/21/2012	11:02:26 PM	PH3 MFC set to  0.000000
8/21/2012	11:02:26 PM	SiCl4 MFC set to  0.000000
8/21/2012	11:02:26 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:02:26 PM	Tube furnace set to 0
8/21/2012	11:02:26 PM	Helium valve closed
8/21/2012	11:02:26 PM	H2 valve closed
8/21/2012	11:02:26 PM	BCl3 valve closed
8/21/2012	11:02:26 PM	PH3 valve closed
8/21/2012	11:02:26 PM	SiCl4 pre valve closed
8/21/2012	11:02:26 PM	SiCl4 post valve closed
8/21/2012	11:02:26 PM	Main Vac valve closed
8/21/2012	11:02:26 PM	Bypass valve closed
8/21/2012	11:02:26 PM	Bubbler valve closed
8/21/2012	11:02:26 PM	Helium MFC set to  0.000000
8/21/2012	11:02:26 PM	H2 MFC set to  0.000000
8/21/2012	11:02:26 PM	BCl3 MFC set to  0.000000
8/21/2012	11:02:26 PM	PH3 MFC set to  0.000000
8/21/2012	11:02:26 PM	SiCl4 MFC set to  0.000000
8/21/2012	11:02:26 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:02:26 PM	Tube furnace set to 0
8/21/2012	11:02:27 PM	Run finished at 11:02 PM
8/21/2012	11:02:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2012	11:11:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	11:11:30 PM	Recipe started at 11:11 PM
8/21/2012	11:11:30 PM	Helium valve closed
8/21/2012	11:11:30 PM	H2 valve closed
8/21/2012	11:11:30 PM	BCl3 valve closed
8/21/2012	11:11:30 PM	PH3 valve closed
8/21/2012	11:11:30 PM	SiCl4 pre valve closed
8/21/2012	11:11:30 PM	SiCl4 post valve closed
8/21/2012	11:11:30 PM	Main Vac valve closed
8/21/2012	11:11:30 PM	Bubbler valve closed
8/21/2012	11:11:30 PM	Bypass valve opened
8/21/2012	11:11:30 PM	Helium MFC set to  0.000000
8/21/2012	11:11:30 PM	H2 MFC set to  0.000000
8/21/2012	11:11:30 PM	BCl3 MFC set to  0.000000
8/21/2012	11:11:30 PM	PH3 MFC set to  0.000000
8/21/2012	11:11:30 PM	SiCl4 MFC set to  0.000000
8/21/2012	11:11:30 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:11:30 PM	Tube furnace set to 0
8/21/2012	11:11:44 PM	Run aborted at 11:11 PM
8/21/2012	11:11:44 PM	Helium valve closed
8/21/2012	11:11:44 PM	H2 valve closed
8/21/2012	11:11:44 PM	BCl3 valve closed
8/21/2012	11:11:44 PM	PH3 valve closed
8/21/2012	11:11:44 PM	SiCl4 pre valve closed
8/21/2012	11:11:44 PM	SiCl4 post valve closed
8/21/2012	11:11:44 PM	Bypass valve closed
8/21/2012	11:11:44 PM	Main Vac valve closed
8/21/2012	11:11:44 PM	Bubbler valve closed
8/21/2012	11:11:44 PM	Helium MFC set to  0.000000
8/21/2012	11:11:44 PM	H2 MFC set to  0.000000
8/21/2012	11:11:44 PM	BCl3 MFC set to  0.000000
8/21/2012	11:11:44 PM	PH3 MFC set to  0.000000
8/21/2012	11:11:44 PM	SiCl4 MFC set to  0.000000
8/21/2012	11:11:44 PM	Tube furnace set to 0
8/21/2012	11:11:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	11:11:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2012	11:11:52 PM	Recipe started at 11:11 PM
8/21/2012	11:11:52 PM	Helium valve closed
8/21/2012	11:11:52 PM	H2 valve closed
8/21/2012	11:11:52 PM	BCl3 valve closed
8/21/2012	11:11:52 PM	PH3 valve closed
8/21/2012	11:11:52 PM	SiCl4 pre valve closed
8/21/2012	11:11:52 PM	SiCl4 post valve closed
8/21/2012	11:11:52 PM	Main Vac valve closed
8/21/2012	11:11:52 PM	Bubbler valve closed
8/21/2012	11:11:52 PM	Bypass valve opened
8/21/2012	11:11:52 PM	Helium MFC set to  0.000000
8/21/2012	11:11:52 PM	H2 MFC set to  0.000000
8/21/2012	11:11:52 PM	BCl3 MFC set to  0.000000
8/21/2012	11:11:52 PM	PH3 MFC set to  0.000000
8/21/2012	11:11:52 PM	SiCl4 MFC set to  0.000000
8/21/2012	11:11:52 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:11:52 PM	Tube furnace set to 0
8/21/2012	11:13:05 PM	Helium valve closed
8/21/2012	11:13:05 PM	H2 valve closed
8/21/2012	11:13:05 PM	BCl3 valve closed
8/21/2012	11:13:05 PM	PH3 valve closed
8/21/2012	11:13:05 PM	SiCl4 pre valve closed
8/21/2012	11:13:05 PM	SiCl4 post valve closed
8/21/2012	11:13:05 PM	Main Vac valve closed
8/21/2012	11:13:05 PM	Bubbler valve closed
8/21/2012	11:13:05 PM	Bypass valve opened
8/21/2012	11:13:05 PM	Helium MFC set to  0.000000
8/21/2012	11:13:05 PM	H2 MFC set to  0.000000
8/21/2012	11:13:05 PM	BCl3 MFC set to  0.000000
8/21/2012	11:13:05 PM	PH3 MFC set to  0.000000
8/21/2012	11:13:05 PM	SiCl4 MFC set to  0.000000
8/21/2012	11:13:05 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:13:05 PM	Tube furnace set to 0
8/21/2012	11:14:05 PM	Helium valve closed
8/21/2012	11:14:05 PM	H2 valve closed
8/21/2012	11:14:05 PM	BCl3 valve closed
8/21/2012	11:14:05 PM	PH3 valve closed
8/21/2012	11:14:05 PM	SiCl4 pre valve closed
8/21/2012	11:14:05 PM	SiCl4 post valve closed
8/21/2012	11:14:05 PM	Bypass valve closed
8/21/2012	11:14:05 PM	Bubbler valve closed
8/21/2012	11:14:05 PM	Main Vac valve opened
8/21/2012	11:14:05 PM	Helium MFC set to  0.000000
8/21/2012	11:14:05 PM	H2 MFC set to  0.000000
8/21/2012	11:14:05 PM	BCl3 MFC set to  0.000000
8/21/2012	11:14:05 PM	PH3 MFC set to  0.000000
8/21/2012	11:14:05 PM	SiCl4 MFC set to  0.000000
8/21/2012	11:14:05 PM	Bypass solenoid MFC set to  0.000000
8/21/2012	11:14:05 PM	Tube furnace set to 0
8/21/2012	11:14:06 PM	Run finished at 11:14 PM
8/21/2012	11:14:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
